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公开(公告)号：US20050230636A1
公开(公告)日：2005-10-20
申请号：US11105584
申请日：2005-04-14
CPC分类号： H01J37/20 , H01J2237/2001 , H01J2237/20292 , H01J2237/208
摘要： Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.
摘要翻译： 样本架的信息或安装在样本架上的样本的信息被存储在安装到电子显微镜上的样本保持器内的存储器中。 访问存储器以将样本保持器的信息传送到电子显微镜，从而确保用户可以使用样本架而不会使样本架的特性错误，并且可以减少样本信息的错误记录的危险。
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公开(公告)号：US06930306B2
公开(公告)日：2005-08-16
申请号：US10807116
申请日：2004-03-24
CPC分类号： H01J37/1471 , H01J37/05 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.
摘要翻译： 扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。 该电子显微镜还包括设置在磁性扇区的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量滤波器，偏转线圈用于校正 由磁扇形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。
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公开(公告)号：USD636005S1
公开(公告)日：2011-04-12
申请号：US29363415
申请日：2010-06-09
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14.发明申请公开(公告)号：US20080073521A1
公开(公告)日：2008-03-27
申请号：US11717094
申请日：2007-03-13
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , B82Y15/00 , G01N2223/303 , G01N2223/3037 , H01J37/263 , H01J2237/2826 , H01J2237/31745
摘要： An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.
摘要翻译： 本发明的目的是提供一种用于带电粒子束的标准样品，其使得能够在图像上的亚微米至数十微米的尺寸上高精度地测量，并且使用标准样品。 为了达到上述目的，本发明提供一种包含两个不同的用于放大或测量校准的样品的带电粒子束的标准样品和使用该样品的带电粒子束装置。
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15.发明申请公开(公告)号：US20060076492A1
公开(公告)日：2006-04-13
申请号：US11245428
申请日：2005-10-07
IPC分类号： G21K7/00
CPC分类号： H01J37/26 , H01J37/224 , H01J37/265 , H01J2237/0216 , H01J2237/2025 , H01J2237/20292
摘要： Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is recorded, drift in the place out of the view field subjected to recording is measured from moment to moment by another TV camera or a position sensitive detector. Drift is corrected by the movement of the specimen due to a specimen holder or by the movement of the image due to an image shift coil.
摘要翻译： 在拍摄TEM图像时产生的漂移与拍摄同时被校正，从而拍摄TEM图像自由形成的漂移影响。 在记录TEM图像的同时，通过另一台电视摄像机或位置敏感探测器随时测量被记录的视场外的位置的漂移。 漂移由于样品夹持器的移动或由于图像移动线圈的图像的运动而被校正。
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公开(公告)号：US06992286B2
公开(公告)日：2006-01-31
申请号：US10792781
申请日：2004-03-05
IPC分类号： G01N23/203
CPC分类号： G01N23/2252 , G01N23/20 , H01J37/244 , H01J37/256 , H01J37/28
摘要： An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.
摘要翻译： 电子束装置设有电子束衍射图像分析部，用于计算由用于观察电子束衍射图像的TV摄像机拍摄的衍射图像的晶格距离，用于获取材料成分的EDX分析部 ，用于材料表征检索的数据库，以及具有数据库检索功能的材料表征部分。 材料表征部分通过基于从电子束衍射图像分析部分传送的晶格距离数据和从EDX分析部分传送的元素数据来检索检索数据库来表征材料。
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17.发明授权
公开(公告)号：US5981948A
公开(公告)日：1999-11-09
申请号：US30477
申请日：1998-02-25
IPC分类号： G01N23/04 , H01J37/22 , H01J37/26 , H01J37/153
CPC分类号： H01J37/26 , H01J2237/05
摘要： Letting core-loss energy of an objective element be E.sub.c, and width of the energy selection slit be .DELTA.E. Initially, a pre-edge image obtained by increasing an acceleration voltage of an electron gun by E.sub.c -.DELTA.E and a pre-pre-edge image obtained by increasing an acceleration voltage by E.sub.c -.DELTA.E are taken with the same exposure time, and an intensity ratio R of the pre-edge image to the pre-pre-edge image is calculated. Next, a post-edge image obtained by increasing an acceleration voltage by E.sub.c is taken with an exposure time t.sub.pre, and a pre-edge image is taken with an exposure time R.times.t.sub.pre. An element distribution image of the objective element can be obtained by simply performing image subtraction of the pre-edge image from the post-edge image in a computer.
摘要翻译： 使目标元素的核心损耗能量为Ec，能量选择狭缝的宽度为DELTA E.首先，通过用Ec-DELTA E增加电子枪的加速电压而获得的前缘图像和预先 以相同的曝光时间拍摄通过用Ec-DELTA E增加加速电压而获得的-edge图像，并且计算前缘图像与前前缘图像的强度比R. 接下来，利用曝光时间tpre拍摄通过用Ec增加加速电压而获得的后边缘图像，并且以曝光时间Rxtpre拍摄前边缘图像。 可以通过简单地从计算机中的后边缘图像执行预边缘图像的图像相减来获得目标元素的元素分布图像。
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18.发明授权
公开(公告)号：US5578823A
公开(公告)日：1996-11-26
申请号：US571060
申请日：1995-12-12
申请人： Yoshifumi Taniguchi
发明人： Yoshifumi Taniguchi
IPC分类号： H01J37/28 , H01J37/153
CPC分类号： H01J37/28 , H01J2237/05 , H01J2237/221 , H01J2237/24455
摘要： A transmission electron microscope system equipped with an energy filter and capable of displaying a two-dimensional distribution map of element of concern on a real time basis. A transmission electron microscope incorporating an energy filer is equipped with a television camera for recording two types of energy-loss images in separate frame memories, respectively. For effecting background processing for image data, intensity of an image to be stored in one frame memory is attenuated with a constant ratio by an intensity regulating mechanism. A signal indicative of difference between the image data stored in the respective frame memories is outputted to a monitor as a picture signal.
摘要翻译： 一种透射电子显微镜系统，配备有能量过滤器，能够实时显示关注元件的二维分布图。 并入能量滤波器的透射型电子显微镜配备有分别在分离的帧存储器中记录两种类型的能量损失图像的电视摄像机。 为了进行图像数据的背景处理，通过强度调节机构以一定比例衰减要存储在一帧存储器中的图像的强度。 指示存储在各个帧存储器中的图像数据之间的差异的信号作为图像信号输出到监视器。
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19.发明授权Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image 有权透射电子显微镜装置，包括电子分光镜，样品架，样品台，以及光谱图像获取方法公开(公告)号：US08530858B2
公开(公告)日：2013-09-10
申请号：US13000593
申请日：2009-06-11
申请人： Shohei Terada , Yoshifumi Taniguchi
发明人： Shohei Terada , Yoshifumi Taniguchi
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/20 , H01J37/244 , H01J2237/201 , H01J2237/20264 , H01J2237/2446 , H01J2237/24485 , H01J2237/2802
摘要： A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a plurality of samples and measure highly accurate chemical shifts from electron energy loss spectra extracted from the spectral images. A transmission electron microscope apparatus comprises an electron gun for emitting an electron beam, a condenser lens for converging the emitted electron beam, a plurality of sample stages radiated with a converged electron beam and adapted to mount samples, a sample movement control unit for moving the sample stages, image-forming lenses for forming an image of an electron beam having transmitted through the plural samples, an electron spectrometer adapted to perform spectrometry of the electron beam in accordance with energy amounts the image-formed electron beam has and deliver spectral images obtained at convergence positions which are different in energy dispersion axis direction and in a direction orthogonal to the energy dispersion axis direction to thereby acquire spectral images from the plural samples at a time, and an image display unit for displaying acquired spectral images.
摘要翻译： 提供透射电子显微镜装置，样品架和样品台以及用于获取光谱图像的方法，其可以从多个样品一次获得光谱图像，并且从提取的电子能量损失谱测量高精度的化学位移 光谱图像。 一种透射电子显微镜装置，包括用于发射电子束的电子枪，用于会聚发射的电子束的聚光透镜，用会聚的电子束辐射并适合安装样品的多个样品台，用于移动 样品级，用于形成透过多个样品的电子束的图像的成像透镜，适于根据图像形成的电子束的能量进行电子束的光谱测定的电子光谱仪，并且传送所获得的光谱图像 在能量色散轴方向和与能量色散轴方向正交的方向上不同的会聚位置，从而一次从多个样本获取光谱图像，以及用于显示所取得的光谱图像的图像显示单元。
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公开(公告)号：US08436301B2
公开(公告)日：2013-05-07
申请号：US13133653
申请日：2009-11-11
IPC分类号： H01J37/26
CPC分类号： H01J37/05 , H01J37/153 , H01J37/244 , H01J2237/2446
摘要： In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).
摘要翻译： 在由两个正交轴形成的光谱图像中，其中一个是能量损失量的轴，另一个是位置信息的轴，通过使用电子光谱仪和透射电子显微镜，在 通过比较从由两个正交轴形成的二维电子束位置图像计算的电子束位置（能量损失量的轴和能量损失的轴线），以高效率和高精度来校正要分析的样本的光谱图像 位置信息），以及基于电子束位置的差异计算失真量。 提供了以高效率和高精度校正光谱图像失真的方法和装置，该图像由两个正交轴（能量损失量的轴和位置信息的轴）形成。
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