公开(公告)号：US08878144B2

公开(公告)日：2014-11-04

申请号：US13577751

申请日：2010-12-01

申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Akira Watabe

发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Akira Watabe

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/26 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

摘要： The electron beam apparatus sample holding means has a diaphragm which is placed on upper and lower sides of a sample to form a cell for separating a gas atmosphere and a vacuum atmosphere of a sample chamber and sealing an ambient atmosphere of the sample; a gas supply means for supplying gas to an inside of the cell; and exhaust means for exhausting gas. The exhaust means includes a gas exhaust pipe provided in the inside of the cell and an openable/closable exhaust hole provided in a sidewall of the sample holding means so as to pass through the cell. The diaphragm is an amorphous film made of light elements which can transmit an electron beam, such as carbon films, oxide films, and nitride films.

摘要翻译： 电子束装置样品保持装置具有隔膜，其被放置在样品的上侧和下侧，以形成用于分离气体气氛的单元和样品室的真空气氛并密封样品的周围空气; 气体供给装置，用于向所述电池内部供应气体; 以及用于排出气体的排气装置。 排气装置包括设置在电池内部的排气管和设置在样品保持装置的侧壁中以便通过电池的可打开/关闭的排气孔。 隔膜是由透光电子束如碳膜，氧化膜和氮化物膜的光元件制成的非晶膜。

公开(公告)号：US08588499B2

公开(公告)日：2013-11-19

申请号：US13810034

申请日：2011-07-14

申请人： Takashi Kubo ,  Takahito Hashimoto ,  Toshie Yaguchi ,  Norio Baba

发明人： Takashi Kubo ,  Takahito Hashimoto ,  Toshie Yaguchi ,  Norio Baba

IPC分类号： G06K9/00

CPC分类号： G06T11/003 ,  G01N23/046 ,  G01N2223/419 ,  G06T11/006 ,  G06T2211/424 ,  H01J37/20 ,  H01J37/222 ,  H01J37/26 ,  H01J2237/20207

摘要： Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions. An image processing device is provided with: a means, in an electron microscope having an imaging device and a tilting device that tilts an object to be observed, for tilting said object to be observed in an angle step, and storing the obtained tiled image; a means for aligning the position of said tilted images; a means for generating an initial reconstructed image based on said tilted images; a means for projecting said initial reconstructed image at arbitrarily-defined angles and generating a plurality of projected images; a means for calculating errors in the corresponding pixels between the tilted images and the projection images; a means for determining a processing priority from said errors; a means for calculating the density for each gradation level; a means for determining the processing priority from said densities; and a means for changing the density value of each pixel in the initial reconstructed image in each of the above-mentioned priorities.

摘要翻译： 公开了图像处理：显着减少重建图像中的假图像和丢失图像，提高重建精度; 并且可以应用于由多个部件组成的观察对象和具有未知数量的结构组成的样品。 一种图像处理装置具有：具有成像装置的电子显微镜和倾斜待观察物体的倾斜装置的装置，用于以角度步骤倾斜所述被观察物体，并存储所获得的平铺图像; 用于对准所述倾斜图像的位置的装置; 用于基于所述倾斜图像生成初始重建图像的装置; 用于以任意定义的角度投影所述初始重建图像并产生多个投影图像的装置; 用于计算倾斜图像和投影图像之间的对应像素中的误差的装置; 用于根据所述错误确定处理优先级的装置; 用于计算每个灰度级的密度的装置; 用于从所述密度确定处理优先级的装置; 以及用于在上述每个优先级中改变初始重构图像中的每个像素的浓度值的装置。

公开(公告)号：US20120305769A1

公开(公告)日：2012-12-06

申请号：US13577751

申请日：2010-12-01

申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Akira Watabe

发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Akira Watabe

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/26 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

摘要： The electron beam apparatus sample holding means has a diaphragm which is placed on upper and lower sides of a sample to form a cell for separating a gas atmosphere and a vacuum atmosphere of a sample chamber and sealing an ambient atmosphere of the sample; a gas supply means for supplying gas to an inside of the cell; and exhaust means for exhausting gas. The exhaust means includes a gas exhaust pipe provided in the inside of the cell and an openable/closable exhaust hole provided in a sidewall of the sample holding means so as to pass through the cell. The diaphragm is an amorphous film made of light elements which can transmit an electron beam, such as carbon films, oxide films, and nitride films.

摘要翻译： 电子束装置样品保持装置具有隔膜，其被放置在样品的上侧和下侧，以形成用于分离气体气氛的单元和样品室的真空气氛并密封样品的周围空气; 气体供给装置，用于向所述电池内部供应气体; 以及用于排出气体的排气装置。 排气装置包括设置在电池内部的排气管和设置在样品保持装置的侧壁中以便通过电池的可打开/关闭的排气孔。 隔膜是由透光电子束如碳膜，氧化膜和氮化物膜的光元件制成的非晶膜。

公开(公告)号：US20080073521A1

公开(公告)日：2008-03-27

申请号：US11717094

申请日：2007-03-13

申请人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

发明人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC分类号： G01N23/00

CPC分类号： G01N23/04 ,  B82Y15/00 ,  G01N2223/303 ,  G01N2223/3037 ,  H01J37/263 ,  H01J2237/2826 ,  H01J2237/31745

摘要： An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.

摘要翻译： 本发明的目的是提供一种用于带电粒子束的标准样品，其使得能够在图像上的亚微米至数十微米的尺寸上高精度地测量，并且使用标准样品。 为了达到上述目的，本发明提供一种包含两个不同的用于放大或测量校准的样品的带电粒子束的标准样品和使用该样品的带电粒子束装置。

公开(公告)号：US20070187597A1

公开(公告)日：2007-08-16

申请号：US11654685

申请日：2007-01-18

申请人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

发明人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

IPC分类号： G21K7/00

CPC分类号： H01J37/3056 ,  H01J37/3005 ,  H01J2237/2516 ,  H01J2237/31745

摘要： A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.

摘要翻译： 一种聚焦离子束系统，能够从样品的同一视野同时获取关于样品的表面结构信息，内部结构信息和内部组成信息。 样品制备和观察的方法使用这种聚焦离子束系统基于从样品的多个方向获得的样品的结构和组成的信息来精确地设置样品处理位置，并且处理和观察样品。 为了同时获取样品结构和组成信息，该系统包括二次电子检测器，透射电子检测器和能量色散X射线分光镜或电子能量损失光谱仪，并且使用具有样品旋转的短截线和 倾斜功能。 该方法包括标记过程。

公开(公告)号：US06992286B2

公开(公告)日：2006-01-31

申请号：US10792781

申请日：2004-03-05

申请人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

发明人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC分类号： G01N23/203

CPC分类号： G01N23/2252 ,  G01N23/20 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28

摘要： An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.

摘要翻译： 电子束装置设有电子束衍射图像分析部，用于计算由用于观察电子束衍射图像的TV摄像机拍摄的衍射图像的晶格距离，用于获取材料成分的EDX分析部 ，用于材料表征检索的数据库，以及具有数据库检索功能的材料表征部分。 材料表征部分通过基于从电子束衍射图像分析部分传送的晶格距离数据和从EDX分析部分传送的元素数据来检索检索数据库来表征材料。

公开(公告)号：US08835847B2

公开(公告)日：2014-09-16

申请号：US14114164

申请日：2012-04-20

申请人： Toshie Yaguchi ,  Akira Watabe ,  Yusuke Ominami

发明人： Toshie Yaguchi ,  Akira Watabe ,  Yusuke Ominami

IPC分类号： G01N23/00 ,  G21K7/00 ,  H01J37/20 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/2065

摘要： A sample holding apparatus for electron microscope includes: a sample holding assembly including an assembly of three components of an upper diaphragm holding part, a sample holding plate and a lower diaphragm holding part; and a holding part that holds the sample holding assembly replaceably. The sample holding assembly includes a cell defined between a diaphragm of the upper diaphragm holding part and a diaphragm of the lower diaphragm holding part, and a flow channel connected to the cell, in which a sample mounted at a protrusion of the sample holding plate is placed. The diaphragm of the upper diaphragm holding part, the sample and the diaphragm of the lower diaphragm holding part are disposed along an optical axis of an electron beam.

摘要翻译： 用于电子显微镜的样品保持装置包括：样品保持组件，其包括上隔膜保持部，样品保持板和下隔膜保持部的三个部件的组件; 以及可替换地保持样品保持组件的保持部。 样品保持组件包括限定在上隔膜保持部的隔膜和下隔膜保持部的隔膜之间的单元，以及连接到电池的流路，其中安装在样品保持板的突起处的样品为 放置 上隔膜保持部的隔膜，下隔膜保持部的检体和隔膜沿电子束的光轴配置。

公开(公告)号：US20140042318A1

公开(公告)日：2014-02-13

申请号：US14114164

申请日：2012-04-20

申请人： Toshie Yaguchi ,  Akira Watabe ,  Yusuke Ominami

发明人： Toshie Yaguchi ,  Akira Watabe ,  Yusuke Ominami

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/2065

摘要： A sample holding apparatus for electron microscope includes: a sample holding assembly including an assembly of three components of an upper diaphragm holding part, a sample holding plate and a lower diaphragm holding part; and a holding part that holds the sample holding assembly replaceably. The sample holding assembly includes a cell defined between a diaphragm of the upper diaphragm holding part and a diaphragm of the lower diaphragm holding part, and a flow channel connected to the cell, in which a sample mounted at a protrusion of the sample holding plate is placed. The diaphragm of the upper diaphragm holding part, the sample and the diaphragm of the lower diaphragm holding part are disposed along an optical axis of an electron beam.

摘要翻译： 用于电子显微镜的样品保持装置包括：样品保持组件，其包括上隔膜保持部，样品保持板和下隔膜保持部的三个部件的组件; 以及可替换地保持样品保持组件的保持部。 样品保持组件包括限定在上隔膜保持部的隔膜和下隔膜保持部的隔膜之间的单元，以及连接到电池的流路，其中安装在样品保持板的突起处的样品为 放置 上隔膜保持部的隔膜，下隔膜保持部的检体和隔膜沿电子束的光轴配置。

公开(公告)号：US08604429B2

公开(公告)日：2013-12-10

申请号：US13201820

申请日：2010-01-20

申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

IPC分类号： H01J37/08 ,  H01J37/18

CPC分类号： H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

摘要： An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.

摘要翻译： 本发明的目的是提供一种用于电子束装置的电子束装置和样品保持装置，其可以在通过使用薄隔膜保持气体气氛的同时以高分辨率观察样品和气体之间的反应。 为了解决上述问题之一，在具有分别排出光学柱的电子束照射部分，样品室和观察室的功能的电子束装置中，向样品供应气体的气体供给装置和 向样品保持装置提供用于排出气体的排气装置，在样品上方和下方设置隔膜以分离样品室的气体气氛和真空，并构成密封样品周围的气氛的单元，以及用于喷射的机构 气体被提供到隔膜的外部。 喷射在隔膜外部的气体具有低电子束散射性能，例如氢，氧或氮。 隔膜是由诸如碳膜，氧化膜和能够透射电子束的氮化物膜的光元件形成的非晶膜。

公开(公告)号：US20120212583A1

公开(公告)日：2012-08-23

申请号：US13503976

申请日：2010-10-22

申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Junzo Azuma ,  Akira Watabe

发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Junzo Azuma ,  Akira Watabe

IPC分类号： H04N13/04 ,  H04N13/02

CPC分类号： H01J37/26 ,  G01N23/2204 ,  G01N23/2251 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/2003 ,  H01J2237/24578 ,  H01J2237/2608 ,  H01J2237/2611

摘要： Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.

摘要翻译： 公开了一种带电粒子辐射装置，其能够在不将样品暴露在大气中的情况下捕获由气体气氛，光照射，加热等引起的样品变化。 本发明涉及一种样品架，其具有可围绕垂直于电子束照射方向旋转的轴线旋转的样品台，该样品架能够在样品台周围形成气密室。 允许样品在任何气氛中发生化学反应，并进行反应的三维分析。 可以在不将样品暴露在大气中的情况下进行三维分析。