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    Material characterization system
    2.
    发明授权
    Material characterization system 失效
    材料表征系统

    公开(公告)号：US06992286B2

    公开(公告)日：2006-01-31

    申请号：US10792781

    申请日：2004-03-05

    申请人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

    发明人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

    IPC分类号： G01N23/203

    CPC分类号： G01N23/2252 ,  G01N23/20 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28

    摘要： An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.

    摘要翻译： 电子束装置设有电子束衍射图像分析部，用于计算由用于观察电子束衍射图像的TV摄像机拍摄的衍射图像的晶格距离，用于获取材料成分的EDX分析部 ，用于材料表征检索的数据库，以及具有数据库检索功能的材料表征部分。 材料表征部分通过基于从电子束衍射图像分析部分传送的晶格距离数据和从EDX分析部分传送的元素数据来检索检索数据库来表征材料。

    Electron beam device and sample holding device for electron beam device
    4.
    发明授权
    Electron beam device and sample holding device for electron beam device 有权
    用于电子束装置的电子束装置和样品保持装置

    公开(公告)号：US08604429B2

    公开(公告)日：2013-12-10

    申请号：US13201820

    申请日：2010-01-20

    申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

    发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

    IPC分类号： H01J37/08 ,  H01J37/18

    CPC分类号： H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

    摘要： An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.

    摘要翻译： 本发明的目的是提供一种用于电子束装置的电子束装置和样品保持装置，其可以在通过使用薄隔膜保持气体气氛的同时以高分辨率观察样品和气体之间的反应。 为了解决上述问题之一，在具有分别排出光学柱的电子束照射部分，样品室和观察室的功能的电子束装置中，向样品供应气体的气体供给装置和 向样品保持装置提供用于排出气体的排气装置，在样品上方和下方设置隔膜以分离样品室的气体气氛和真空，并构成密封样品周围的气氛的单元，以及用于喷射的机构 气体被提供到隔膜的外部。 喷射在隔膜外部的气体具有低电子束散射性能，例如氢，氧或氮。 隔膜是由诸如碳膜，氧化膜和能够透射电子束的氮化物膜的光元件形成的非晶膜。

    Focused ion beam system and a method of sample preparation and observation
    5.
    发明申请
    Focused ion beam system and a method of sample preparation and observation 有权
    聚焦离子束系统及样品制备与观察方法

    公开(公告)号：US20070187597A1

    公开(公告)日：2007-08-16

    申请号：US11654685

    申请日：2007-01-18

    申请人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

    发明人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

    IPC分类号： G21K7/00

    CPC分类号： H01J37/3056 ,  H01J37/3005 ,  H01J2237/2516 ,  H01J2237/31745

    摘要： A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.

    摘要翻译： 一种聚焦离子束系统，能够从样品的同一视野同时获取关于样品的表面结构信息，内部结构信息和内部组成信息。 样品制备和观察的方法使用这种聚焦离子束系统基于从样品的多个方向获得的样品的结构和组成的信息来精确地设置样品处理位置，并且处理和观察样品。 为了同时获取样品结构和组成信息，该系统包括二次电子检测器，透射电子检测器和能量色散X射线分光镜或电子能量损失光谱仪，并且使用具有样品旋转的短截线和 倾斜功能。 该方法包括标记过程。

    Sample heating holder, method of observing a sample and charged particle beam apparatus
    6.
    发明授权
    Sample heating holder, method of observing a sample and charged particle beam apparatus 有权
    样品加热器，观察样品和带电粒子束装置的方法

    公开(公告)号：US06495838B1

    公开(公告)日：2002-12-17

    申请号：US09354633

    申请日：1999-07-16

    申请人： Toshie Yaguchi ,  Takeo Kamino ,  Masahiro Tomita ,  Kishio Hidaka

    发明人： Toshie Yaguchi ,  Takeo Kamino ,  Masahiro Tomita ,  Kishio Hidaka

    IPC分类号： H01J3720

    CPC分类号： H01J37/20 ,  H01J2237/2001

    摘要： High resolution observation of a sample at a high temperature above 1000° C. is accomplished by suppressing sample drift by heating over a short time and with small electric current. A heater envelope made of a ceramic having a carbon coating on the surface is attached around a heater surrounding the sample. The heater envelope is rotatable around pivot screws, and has an outer frame portion of a holder individually having slots capable of letting an FIB enter so that the sample mounting on the holder, as it is, may be milled with the FIB.

    摘要翻译： 在高于1000℃的高温下对样品的高分辨率观察是通过在短时间和小电流下加热来抑制样品漂移来实现的。 在表面附近具有碳涂层的陶瓷制成的加热器外壳附着在围绕样品的加热器周围。 加热器外壳可围绕枢轴螺钉旋转，并且具有一个保持器的外框架部分，其单独具有能够使FIB进入的槽，使得可以将保持器上安装在样品架上的样品与FIB一起研磨

    ELECTRON BEAM DEVICE AND SAMPLE HOLDING DEVICE FOR ELECTRON BEAM DEVICE
    7.
    发明申请
    ELECTRON BEAM DEVICE AND SAMPLE HOLDING DEVICE FOR ELECTRON BEAM DEVICE 有权
    电子束装置和电子束装置的样品保持装置

    公开(公告)号：US20110303845A1

    公开(公告)日：2011-12-15

    申请号：US13201820

    申请日：2010-01-20

    申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

    发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

    IPC分类号： H01J37/26

    CPC分类号： H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

    摘要： An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.

    摘要翻译： 本发明的目的是提供一种用于电子束装置的电子束装置和样品保持装置，其可以在通过使用薄隔膜保持气体气氛的同时以高分辨率观察样品和气体之间的反应。 为了解决上述问题之一，在具有分别排出光学柱的电子束照射部分，样品室和观察室的功能的电子束装置中，向样品供应气体的气体供给装置和 向样品保持装置提供用于排出气体的排气装置，在样品上方和下方设置隔膜以分离样品室的气体气氛和真空，并构成密封样品周围的气氛的单元，以及用于喷射的机构 气体被提供到隔膜的外部。 喷射在隔膜外部的气体具有低电子束散射性能，例如氢，氧或氮。 隔膜是由诸如碳膜，氧化膜和能够透射电子束的氮化物膜的光元件形成的非晶膜。

    Focused ion beam system and a method of sample preparation and observation
    8.
    发明授权
    Focused ion beam system and a method of sample preparation and observation 有权
    聚焦离子束系统及样品制备与观察方法

    公开(公告)号：US07612337B2

    公开(公告)日：2009-11-03

    申请号：US11654685

    申请日：2007-01-18

    申请人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

    发明人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

    IPC分类号： H01J37/26 ,  G01N23/22

    CPC分类号： H01J37/3056 ,  H01J37/3005 ,  H01J2237/2516 ,  H01J2237/31745

    摘要： A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.

    摘要翻译： 一种聚焦离子束系统，能够从样品的同一视野同时获取关于样品的表面结构信息，内部结构信息和内部组成信息。 样品制备和观察的方法使用这种聚焦离子束系统基于从样品的多个方向获得的样品的结构和组成的信息来精确地设置样品处理位置，并且处理和观察样品。 为了同时获取样品结构和组成信息，该系统包括二次电子检测器，透射电子检测器和能量色散X射线分光镜或电子能量损失光谱仪，并且使用具有样品旋转的短截线和 倾斜功能。 该方法包括标记过程。

    Electron microscope
    10.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US5898177A

    公开(公告)日：1999-04-27

    申请号：US900001

    申请日：1997-07-24

    申请人： Kishio Hidaka ,  Takeo Kamino ,  Toshie Yaguchi ,  Katsuhisa Usami ,  Takashi Aoyama ,  Shigeyoshi Nakamura ,  Ryo Hiraga ,  Masahiro Tomita

    发明人： Kishio Hidaka ,  Takeo Kamino ,  Toshie Yaguchi ,  Katsuhisa Usami ,  Takashi Aoyama ,  Shigeyoshi Nakamura ,  Ryo Hiraga ,  Masahiro Tomita

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20 ,  H01J2237/2001

    摘要： A method of operating an electron microscope under a high temperature and the electron microscope are provided. The electron microscope can stably set and efficiently heat a sample to observe and measure high temperature physical properties such as phase transformation, phase transition and the like required for development of a heat resistant material. In the method of operating the electron microscope and the electron microscope, a sample to be observed is set so as to position at a central hole of a double spiral flat filament, the detachable heating stage is fixed to the heating holder using screws of a pivot, and the heating stage is tilted by vertical movement of a crank-shaped arm. The heating stage and the arm are insulated from each other by an insulating body, and current from a power source is conducted by a conductor wire to heat the filament.

    摘要翻译： 提供了一种在高温和电子显微镜下操作电子显微镜的方法。 电子显微镜可以稳定地设定和有效地加热样品，以观察和测量耐热材料显影所需的相变，相变等高温物理性能。 在操作电子显微镜和电子显微镜的方法中，将待观察的样品设置为位于双螺旋扁平细丝的中​​心孔处，可拆卸加热台使用枢轴的螺钉固定到加热支架 并且通过曲柄形臂的垂直运动使加热台倾斜。 加热台和臂通过绝缘体彼此绝缘，并且来自电源的电流通过导线传导以加热灯丝。