公开(公告)号：US08263936B2

公开(公告)日：2012-09-11

申请号：US12414883

申请日：2009-03-31

Applicant: Shohei Terada ,  Yoshifumi Taniguchi

Inventor： Shohei Terada ,  Yoshifumi Taniguchi

IPC: G01N23/00 ,  G21K7/00

CPC classification number: G01N23/04 ,  G01N2223/102 ,  G01N2223/3037

Abstract: A transmission electron microscope is capable of correcting, with high efficiency and high accuracy, an electron energy loss spectrum extracted from each of measured portions included in an electron energy loss spectral image with two axes representing the amount of an energy loss and positional information on a measured portion. The transmission electron microscope has an electron spectroscope and a spectrum correction system. The spectrum correction system corrects a spectrum extracted from each measured portion included in an electron energy loss spectral image acquired from a sample based on a difference between a spectrum extracted from a standard portion of a standard spectral image and a spectrum extracted from a portion different from the standard portion.

Abstract translation: 透射电子显微镜能够以高效率和高精度校正从包含在电子能量损失光谱图像中的每个测量部分提取的电子能量损失谱，其中两个轴表示能量损失量和位置信息 测量部分。 透射电子显微镜具有电子分光镜和光谱校正系统。 频谱校正系统基于从标准光谱图像的标准部分提取的光谱与从不同于标准光谱图像的部分提取的光谱之间的差异，从包含在从样本获取的电子能量损失光谱图像中的每个测量部分中提取的光谱 标准部分。

公开(公告)号：US07723682B2

公开(公告)日：2010-05-25

申请号：US12024357

申请日：2008-02-01

Applicant: Shohei Terada ,  Yoshifumi Taniguchi

Inventor： Shohei Terada ,  Yoshifumi Taniguchi

IPC: G01N23/02 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0453 ,  H01J2237/057 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802

Abstract: In order to correct measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis; a method for correcting magnification and position and a system for correcting magnification and position, both of which are capable of correcting measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis, are provided.

Abstract translation: 为了使用电子分光镜和透射电子显微镜，以能量损失轴和测量位置的两个正交轴形成的光谱图像，以高效率和高精度校正光谱图像的测量倍率和测量位置 信息轴; 用于校正放大率和位置的方法以及用于校正倍率和位置的系统，它们都能够使用电子分光镜和透射电子显微镜来高效率和高精度地校正光谱图像的测量倍率和测量位置 提供了在作为能量损失轴的量和测量位置信息轴的两个正交轴上形成的光谱图像。

公开(公告)号：US06855927B2

公开(公告)日：2005-02-15

申请号：US10435050

申请日：2003-05-12

Applicant: Yoshifumi Taniguchi ,  Kazutoshi Kaji ,  Yasumitsu Ueki ,  Shigeto Isakozawa

Inventor： Yoshifumi Taniguchi ,  Kazutoshi Kaji ,  Yasumitsu Ueki ,  Shigeto Isakozawa

IPC: G01N23/08 ,  G01N23/02 ,  G01N23/04 ,  H01J37/05 ,  H01J37/26 ,  H01J37/28

CPC classification number: G01N23/02

Abstract: There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.

Abstract translation: 提供了一种利用能够限制由样本的厚度或密度引起的伪影的核心损耗电子的元素分布观察方法和元件分布观察装置，或由衍射对比度引起的伪影的发生。 计算两个能量损失区域的三个不同能量损失区域中不含任何铁损损失电子和一个能量损失面积的电子束强度，以根据相应的三个能量损失面积获得元素分布， 电子束强度。

公开(公告)号：USD636005S1

公开(公告)日：2011-04-12

申请号：US29363415

申请日：2010-06-09

Applicant: Mitsuru Oonuma ,  Akira Omachi ,  Yoshifumi Taniguchi ,  Isao Nagaoki ,  Hiroshi Aoyagi

Designer： Mitsuru Oonuma ,  Akira Omachi ,  Yoshifumi Taniguchi ,  Isao Nagaoki ,  Hiroshi Aoyagi

公开(公告)号：US20080073521A1

公开(公告)日：2008-03-27

申请号：US11717094

申请日：2007-03-13

Applicant: Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

Inventor： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC: G01N23/00

CPC classification number: G01N23/04 ,  B82Y15/00 ,  G01N2223/303 ,  G01N2223/3037 ,  H01J37/263 ,  H01J2237/2826 ,  H01J2237/31745

Abstract: An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.

Abstract translation: 本发明的目的是提供一种用于带电粒子束的标准样品，其使得能够在图像上的亚微米至数十微米的尺寸上高精度地测量，并且使用标准样品。 为了达到上述目的，本发明提供一种包含两个不同的用于放大或测量校准的样品的带电粒子束的标准样品和使用该样品的带电粒子束装置。

公开(公告)号：US20060076492A1

公开(公告)日：2006-04-13

申请号：US11245428

申请日：2005-10-07

Applicant: Yoshifumi Taniguchi ,  Hisafumi Otsuka

Inventor： Yoshifumi Taniguchi ,  Hisafumi Otsuka

IPC: G21K7/00

CPC classification number: H01J37/26 ,  H01J37/224 ,  H01J37/265 ,  H01J2237/0216 ,  H01J2237/2025 ,  H01J2237/20292

Abstract: Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is recorded, drift in the place out of the view field subjected to recording is measured from moment to moment by another TV camera or a position sensitive detector. Drift is corrected by the movement of the specimen due to a specimen holder or by the movement of the image due to an image shift coil.

Abstract translation: 在拍摄TEM图像时产生的漂移与拍摄同时被校正，从而拍摄TEM图像自由形成的漂移影响。 在记录TEM图像的同时，通过另一台电视摄像机或位置敏感探测器随时测量被记录的视场外的位置的漂移。 漂移由于样品夹持器的移动或由于图像移动线圈的图像的运动而被校正。

公开(公告)号：US06992286B2

公开(公告)日：2006-01-31

申请号：US10792781

申请日：2004-03-05

Applicant: Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

Inventor： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC: G01N23/203

CPC classification number: G01N23/2252 ,  G01N23/20 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28

Abstract: An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.

Abstract translation: 电子束装置设有电子束衍射图像分析部，用于计算由用于观察电子束衍射图像的TV摄像机拍摄的衍射图像的晶格距离，用于获取材料成分的EDX分析部 ，用于材料表征检索的数据库，以及具有数据库检索功能的材料表征部分。 材料表征部分通过基于从电子束衍射图像分析部分传送的晶格距离数据和从EDX分析部分传送的元素数据来检索检索数据库来表征材料。

公开(公告)号：US5981948A

公开(公告)日：1999-11-09

申请号：US30477

申请日：1998-02-25

Applicant: Yoshifumi Taniguchi ,  Shigeto Isakozawa

Inventor： Yoshifumi Taniguchi ,  Shigeto Isakozawa

IPC: G01N23/04 ,  H01J37/22 ,  H01J37/26 ,  H01J37/153

CPC classification number: H01J37/26 ,  H01J2237/05

Abstract: Letting core-loss energy of an objective element be E.sub.c, and width of the energy selection slit be .DELTA.E. Initially, a pre-edge image obtained by increasing an acceleration voltage of an electron gun by E.sub.c -.DELTA.E and a pre-pre-edge image obtained by increasing an acceleration voltage by E.sub.c -.DELTA.E are taken with the same exposure time, and an intensity ratio R of the pre-edge image to the pre-pre-edge image is calculated. Next, a post-edge image obtained by increasing an acceleration voltage by E.sub.c is taken with an exposure time t.sub.pre, and a pre-edge image is taken with an exposure time R.times.t.sub.pre. An element distribution image of the objective element can be obtained by simply performing image subtraction of the pre-edge image from the post-edge image in a computer.

Abstract translation: 使目标元素的核心损耗能量为Ec，能量选择狭缝的宽度为DELTA E.首先，通过用Ec-DELTA E增加电子枪的加速电压而获得的前缘图像和预先 以相同的曝光时间拍摄通过用Ec-DELTA E增加加速电压而获得的-edge图像，并且计算前缘图像与前前缘图像的强度比R. 接下来，利用曝光时间tpre拍摄通过用Ec增加加速电压而获得的后边缘图像，并且以曝光时间Rxtpre拍摄前边缘图像。 可以通过简单地从计算机中的后边缘图像执行预边缘图像的图像相减来获得目标元素的元素分布图像。

公开(公告)号：US5578823A

公开(公告)日：1996-11-26

申请号：US571060

申请日：1995-12-12

Applicant: Yoshifumi Taniguchi

Inventor： Yoshifumi Taniguchi

IPC: H01J37/28 ,  H01J37/153

CPC classification number: H01J37/28 ,  H01J2237/05 ,  H01J2237/221 ,  H01J2237/24455

Abstract: A transmission electron microscope system equipped with an energy filter and capable of displaying a two-dimensional distribution map of element of concern on a real time basis. A transmission electron microscope incorporating an energy filer is equipped with a television camera for recording two types of energy-loss images in separate frame memories, respectively. For effecting background processing for image data, intensity of an image to be stored in one frame memory is attenuated with a constant ratio by an intensity regulating mechanism. A signal indicative of difference between the image data stored in the respective frame memories is outputted to a monitor as a picture signal.

Abstract translation: 一种透射电子显微镜系统，配备有能量过滤器，能够实时显示关注元件的二维分布图。 并入能量滤波器的透射型电子显微镜配备有分别在分离的帧存储器中记录两种类型的能量损失图像的电视摄像机。 为了进行图像数据的背景处理，通过强度调节机构以一定比例衰减要存储在一帧存储器中的图像的强度。 指示存储在各个帧存储器中的图像数据之间的差异的信号作为图像信号输出到监视器。

公开(公告)号：US20110240854A1

公开(公告)日：2011-10-06

申请号：US13133653

申请日：2009-11-11

Applicant: Shohei Terada ,  Yoshifumi Taniguchi ,  Tatsumi Hirano

Inventor： Shohei Terada ,  Yoshifumi Taniguchi ,  Tatsumi Hirano

IPC: G01N23/00 ,  H01J37/153

CPC classification number: H01J37/05 ,  H01J37/153 ,  H01J37/244 ,  H01J2237/2446

Abstract: In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).

Abstract translation: 在由两个正交轴形成的光谱图像中，其中一个是能量损失量的轴，另一个是位置信息的轴，通过使用电子光谱仪和透射电子显微镜，在 通过比较从由两个正交轴形成的二维电子束位置图像计算的电子束位置（能量损失量的轴和能量损失的轴线），以高效率和高精度来校正要分析的样本的光谱图像 位置信息），以及基于电子束位置的差异计算失真量。 提供了以高效率和高精度校正光谱图像失真的方法和装置，该图像由两个正交轴（能量损失量的轴和位置信息的轴）形成。