公开(公告)号：US06855927B2

公开(公告)日：2005-02-15

申请号：US10435050

申请日：2003-05-12

申请人： Yoshifumi Taniguchi ,  Kazutoshi Kaji ,  Yasumitsu Ueki ,  Shigeto Isakozawa

发明人： Yoshifumi Taniguchi ,  Kazutoshi Kaji ,  Yasumitsu Ueki ,  Shigeto Isakozawa

IPC分类号： G01N23/08 ,  G01N23/02 ,  G01N23/04 ,  H01J37/05 ,  H01J37/26 ,  H01J37/28

CPC分类号： G01N23/02

摘要： There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.

摘要翻译： 提供了一种利用能够限制由样本的厚度或密度引起的伪影的核心损耗电子的元素分布观察方法和元件分布观察装置，或由衍射对比度引起的伪影的发生。 计算两个能量损失区域的三个不同能量损失区域中不含任何铁损损失电子和一个能量损失面积的电子束强度，以根据相应的三个能量损失面积获得元素分布， 电子束强度。

公开(公告)号：US06930306B2

公开(公告)日：2005-08-16

申请号：US10807116

申请日：2004-03-24

申请人： Kazutoshi Kaji ,  Yoshifumi Taniguchi ,  Shigeto Isakozawa

发明人： Kazutoshi Kaji ,  Yoshifumi Taniguchi ,  Shigeto Isakozawa

IPC分类号： H01J37/22 ,  H01J37/05 ,  H01J37/147 ,  H01J37/28 ,  H01J49/44 ,  H01J37/26

CPC分类号： H01J37/1471 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/2802

摘要： A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.

摘要翻译： 扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。 该电子显微镜还包括设置在磁性扇区的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量滤波器，偏转线圈用于校正 由磁扇形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。

公开(公告)号：US6150657A

公开(公告)日：2000-11-21

申请号：US138995

申请日：1998-08-25

申请人： Koji Kimoto ,  Yoshifumi Taniguchi ,  Shunroku Taya ,  Shigeto Isakozawa ,  Takashi Aoyama ,  Masakazu Saito ,  Tomoko Sekiguchi

发明人： Koji Kimoto ,  Yoshifumi Taniguchi ,  Shunroku Taya ,  Shigeto Isakozawa ,  Takashi Aoyama ,  Masakazu Saito ,  Tomoko Sekiguchi

IPC分类号： G01Q30/02 ,  H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H01J49/46

CPC分类号： H01J49/44 ,  H01J37/05 ,  H01J2237/24485 ,  H01J2237/28

摘要： An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.

摘要翻译： 能量滤波器具有多个偏转装置，并且通过使用多个偏转装置来构造，使得电子束的平均轨迹对称，并且对称平面的法线相对于电子束的入射方向倾斜。

公开(公告)号：US5981948A

公开(公告)日：1999-11-09

申请号：US30477

申请日：1998-02-25

申请人： Yoshifumi Taniguchi ,  Shigeto Isakozawa

发明人： Yoshifumi Taniguchi ,  Shigeto Isakozawa

IPC分类号： G01N23/04 ,  H01J37/22 ,  H01J37/26 ,  H01J37/153

CPC分类号： H01J37/26 ,  H01J2237/05

摘要： Letting core-loss energy of an objective element be E.sub.c, and width of the energy selection slit be .DELTA.E. Initially, a pre-edge image obtained by increasing an acceleration voltage of an electron gun by E.sub.c -.DELTA.E and a pre-pre-edge image obtained by increasing an acceleration voltage by E.sub.c -.DELTA.E are taken with the same exposure time, and an intensity ratio R of the pre-edge image to the pre-pre-edge image is calculated. Next, a post-edge image obtained by increasing an acceleration voltage by E.sub.c is taken with an exposure time t.sub.pre, and a pre-edge image is taken with an exposure time R.times.t.sub.pre. An element distribution image of the objective element can be obtained by simply performing image subtraction of the pre-edge image from the post-edge image in a computer.

摘要翻译： 使目标元素的核心损耗能量为Ec，能量选择狭缝的宽度为DELTA E.首先，通过用Ec-DELTA E增加电子枪的加速电压而获得的前缘图像和预先 以相同的曝光时间拍摄通过用Ec-DELTA E增加加速电压而获得的-edge图像，并且计算前缘图像与前前缘图像的强度比R. 接下来，利用曝光时间tpre拍摄通过用Ec增加加速电压而获得的后边缘图像，并且以曝光时间Rxtpre拍摄前边缘图像。 可以通过简单地从计算机中的后边缘图像执行预边缘图像的图像相减来获得目标元素的元素分布图像。

公开(公告)号：US20090242794A1

公开(公告)日：2009-10-01

申请号：US12081969

申请日：2008-04-24

申请人： Hiromi Inada ,  Hiroyuki Tanaka ,  Shun-ichi Watanabe ,  Shigeto Isakozawa ,  Mitsugu Sato ,  Atsushi Takane ,  Satoshi Yamaguchi

发明人： Hiromi Inada ,  Hiroyuki Tanaka ,  Shun-ichi Watanabe ,  Shigeto Isakozawa ,  Mitsugu Sato ,  Atsushi Takane ,  Satoshi Yamaguchi

IPC分类号： G21K5/10 ,  G01K1/08

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/15 ,  H01J2237/2487 ,  H01J2237/2826

摘要： Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.

摘要翻译： 带电粒子束设备具有用于校准放大的标本图像的尺寸值的处理单元和用于改变扫描带电粒子束的量的装置。 此外，试样架具有用于保持具有周期性结构的试样或同时具有周期性结构和非周期性结构的试样的机构，以及用于自动改变放大的试样图像的倍率并存储测量值的存储装置 在所有放大倍率。

公开(公告)号：US20070252091A1

公开(公告)日：2007-11-01

申请号：US11775894

申请日：2007-07-11

申请人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

发明人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

IPC分类号： G01N23/00

CPC分类号： H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

公开(公告)号：US5552602A

公开(公告)日：1996-09-03

申请号：US398684

申请日：1995-03-06

申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

IPC分类号： G01N23/04 ,  G01R31/305 ,  H01J37/26

CPC分类号： G01R31/305 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/226

摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.

摘要翻译： 通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。 为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。 光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。 因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

公开(公告)号：US5059859A

公开(公告)日：1991-10-22

申请号：US507798

申请日：1990-04-12

申请人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

发明人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

IPC分类号： H01J3/02 ,  H01J37/073

CPC分类号： H01J3/029 ,  H01J37/073

摘要： A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

摘要翻译： 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管，该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后，将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间，以分别对加速电极施加预定电位。

公开(公告)号：US4680469A

公开(公告)日：1987-07-14

申请号：US766272

申请日：1985-08-16

申请人： Setsuo Nomura ,  Shigeto Isakozawa

发明人： Setsuo Nomura ,  Shigeto Isakozawa

IPC分类号： H01J37/26

CPC分类号： H01J37/26

摘要： Focusing device for a transmission type electron microscope displaying an enlarged image on a television monitor, in which the incident angle of the electron beam on the sample is varied with a constant frequency and the focal length of the objective electron lens is so controlled that there is no change between the image observed before change of the incident angle of the electron beam and that observed thereafter, wherein timing for changing the incident angle is set during the blanking intervals of the vertical synchronizing signal of the television so that fluctuations of the image can be clearly detected.

摘要翻译： 在电视监视器上显示放大图像的透射型电子显微镜的聚焦装置，其中电子束在样品上的入射角以恒定频率变化，并且目标电子透镜的焦距被控制为存在 在电子束的入射角变化之前观察到的图像和其后观察到的图像之间没有变化，其中在电视机的垂直同步信号的消隐间隔期间设置用于改变入射角的定时，使得图像的波动可以 明确检测。

公开(公告)号：US07928376B2

公开(公告)日：2011-04-19

申请号：US11232964

申请日：2005-09-23

申请人： Kazutoshi Kaji ,  Kazuhiro Ueda ,  Koji Kimoto ,  Takashi Aoyama ,  Shunroku Taya ,  Shigeto Isakozawa

发明人： Kazutoshi Kaji ,  Kazuhiro Ueda ,  Koji Kimoto ,  Takashi Aoyama ,  Shunroku Taya ,  Shigeto Isakozawa

IPC分类号： H01J47/00

CPC分类号： H01J37/256

摘要： There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately. Besides, because every electron beam that enters into an energy filter passes through the object point, aberration strain in the electron spectrometer can be minimized and higher energy stability can be achieved. As a result, drift of the electron energy loss spectrum acquired by analyzing the electron beam into spectrum can be minimized and element distribution with higher accuracy can be acquired.

摘要翻译： 提供了能够非常容易地获取元素映射图像的元素映射单元，扫描透射电子显微镜和元件映射方法。 在扫描透射电子显微镜上，通过待分析物体传输的电子束进入元件映射单元。 电子束通过电子光谱仪将其能量分析成光谱，并获得电子能量损失光谱。 因为用于2窗口方法，3窗口方法或对比度调整方法的每个元素和窗口数据的加速电压数据已经存储在数据库中，因此即使当要分析的元素被改变为 另一方面，操作者可以立即确认二维元素分布图。 此外，由于进入能量过滤器的每个电子束通过物点，所以可以使电子光谱仪中的像差应变最小化并且可以实现更高的能量稳定性。 结果，可以将通过将电子束分析成光谱而获得的电子能量损耗光谱的漂移最小化，并且可以获得具有更高精度的元素分布。