公开(公告)号：US5059859A

公开(公告)日：1991-10-22

申请号：US507798

申请日：1990-04-12

申请人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

发明人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

IPC分类号： H01J3/02 ,  H01J37/073

CPC分类号： H01J3/029 ,  H01J37/073

摘要： A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

摘要翻译： 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管，该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后，将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间，以分别对加速电极施加预定电位。