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    Apparatus of Plural Charged-Particle Beams
    12.
    发明申请
    Apparatus of Plural Charged-Particle Beams 有权
    多次充电粒子束装置

    公开(公告)号：US20160336142A1

    公开(公告)日：2016-11-17

    申请号：US15150858

    申请日：2016-05-10

    Applicant: Hermes Microvision Inc.

    Inventor： Xuedong Liu ,  Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/147 ,  H01J37/20 ,  H01J37/06 ,  H01J37/10 ,  H01J37/28 ,  H01J37/22

    CPC classification number: H01J37/147 ,  H01J37/04 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/061 ,  H01J2237/083 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2817

    Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

    Abstract translation: 提出了一种改进的源转换单元和一种减少多光束装置中的库仑效应的方法。 在修改的源转换单元中，在图像形成功能使每个子束在局部变化之后进行像差补偿功能，因此避免了由于子束倾斜/移位引起的不期望的像差。 具有多个库仑效应还原开口的库仑效应降低装置放置在靠近设备的单个电子源的位置，因此可以尽可能早地切断未使用的电子。

    Energy filter for charged particle beam apparatus
    13.
    发明授权
    Energy filter for charged particle beam apparatus 有权
    带电粒子束装置的能量过滤器

    公开(公告)号：US09384936B2

    公开(公告)日：2016-07-05

    申请号：US14800098

    申请日：2015-07-15

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Joe Wang ,  Shuai Li ,  Zhongwei Chen

    IPC: G01T1/20 ,  H01J37/05 ,  H01J37/10 ,  H01J37/28 ,  H01J37/12 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

    Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.

    Abstract translation: 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，而第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。

    Method for improving performance of an energy filter
    15.
    发明授权
    Method for improving performance of an energy filter 有权
    改善能量过滤器性能的方法

    公开(公告)号：US09048062B1

    公开(公告)日：2015-06-02

    申请号：US14611741

    申请日：2015-02-02

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/12

    CPC classification number: H01J37/12 ,  H01J37/05 ,  H01J2237/04924 ,  H01J2237/0535 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/28

    Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

    Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

    Charged Particle Beam Apparatus
    19.
    发明申请
    Charged Particle Beam Apparatus 有权
    带电粒子束装置

    公开(公告)号：US20130277554A1

    公开(公告)日：2013-10-24

    申请号：US13848854

    申请日：2013-03-22

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Xiaoli Guo ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/26

    CPC classification number: H01J37/261 ,  H01J37/04 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/0492 ,  H01J2237/1538 ,  H01J2237/2449

    Abstract: The present invention provides a charged particle beam apparatus which employs LVSEM to inspect sample surface with a throughput much higher than the prior art. The high throughput is realized by providing a probe current and a FOV both several times of those of the prior art. Accordingly several means are proposed to avoid obvious degradation of image resolution due to the increases in Coulomb effect and geometric aberrations, and increase efficiency and uniformity of secondary charged particle collection.

    Abstract translation: 本发明提供了一种带电粒子束装置，其使用LVSEM来检查样品表面，其生产量远高于现有技术。 通过提供几倍于现有技术的探针电流和FOV来实现高通量。 因此，提出了几种方法来避免由于库仑效应和几何像差的增加而引起的图像分辨率的明显降低，并且提高了二次带电粒子收集的效率和均匀性。

    Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
    20.
    发明申请
    Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
    用于聚焦多个带电粒子束的多轴磁镜

    公开(公告)号：US20130181138A1

    公开(公告)日：2013-07-18

    申请号：US13741654

    申请日：2013-01-15

    Applicant: HERMES-MICROVISION, INC.

    Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuedong Liu

    IPC: H01J3/22 ,  H01F7/02 ,  H05K9/00 ,  H01J3/20

    CPC classification number: H01J3/22 ,  B82Y10/00 ,  B82Y40/00 ,  H01F7/0205 ,  H01J3/20 ,  H01J37/14 ,  H01J37/3177 ,  H01J2237/1415 ,  H05K9/00

    Abstract: A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.

    Abstract translation: 提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。 可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。 此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。

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