公开(公告)号：US20140326878A1

公开(公告)日：2014-11-06

申请号：US14271828

申请日：2014-05-07

Applicant: FEI Company

Inventor： Bart Buijsse

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function. The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.

Abstract translation: 电子显微镜的方法使电子束通过相位板，特别是包含中心孔的Zernike型相位板，以及引起通过所述膜的电子的相移的薄膜。 该相移会导致对比度传递函数（CTF）从正弦函数变为余弦函数。 相板配备有由较薄的膜承载的环形形式的膜。 因此，仅在较小的空间频率范围（对于低频），相位发生变化（因而CTF），而对于其他空间频率，相移可忽略不计，因此CTF保持不变。 由于载体膜的厚度小得多，所以电子的散射也是可忽略的。

公开(公告)号：US12009176B2

公开(公告)日：2024-06-11

申请号：US18321442

申请日：2023-05-22

Applicant: FEI Company

Inventor： Bart Buijsse ,  Bart Jozef Janssen

IPC: H01J37/26 ,  H01J37/295

CPC classification number: H01J37/265 ,  H01J37/295 ,  H01J2237/04

Abstract: Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.

公开(公告)号：US11183364B1

公开(公告)日：2021-11-23

申请号：US16900749

申请日：2020-06-12

Applicant: FEI Company

Inventor： Yuchen Deng ,  Petrus Hubertus Franciscus Trompenaars ,  Bart Buijsse ,  Alexander Henstra

IPC: H01J37/30 ,  H01J37/21 ,  H01J37/28

Abstract: Methods for using a dual beam microscope system to simultaneously process a sample and image the processed portions of the sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, splitting the plurality of electrons into two electron beams, and then modifying the focal properties of at least one of the electron beams such that the two electron beams have different focal planes. Once the two beams have different focal planes, the first electron beam is focused such that it acts as a STEM beam. The STEM beam is then used to process a region of the sample to induce a physical change (e.g., perform milling, deposition, charge adjustment, phase change, etc.). The second electron beam is focused to act as a TEM beam to perform imaging of the region of the sample being processed.

公开(公告)号：US10651008B2

公开(公告)日：2020-05-12

申请号：US15998757

申请日：2018-08-16

Applicant: FEI Company

Inventor： Bart Buijsse ,  Maarten Kuijper

IPC: H01J37/00 ,  H01J37/22 ,  H01J37/26 ,  H01J37/147

Abstract: Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.

公开(公告)号：US20190057836A1

公开(公告)日：2019-02-21

申请号：US15998757

申请日：2018-08-16

Applicant: FEI Company

Inventor： Bart Buijsse ,  Kuijper Kuijper

IPC: H01J37/22 ,  H01J37/147 ,  H01J37/26

Abstract: Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.

公开(公告)号：US20180100815A1

公开(公告)日：2018-04-12

申请号：US15728252

申请日：2017-10-09

Applicant: FEI Company

Inventor： Pavel Stejskal ,  Marek Uncovský ,  Tomás Vystavel ,  Alan Frank de Jong ,  Bart Buijsse ,  Pierre Bleuet

IPC: G01N23/04

CPC classification number: G01N23/046 ,  G01N23/2251 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/309 ,  G01N2223/3306 ,  G01N2223/401 ,  G01N2223/417 ,  G01N2223/419 ,  G21K7/00 ,  H01J37/28 ,  H01J2237/2807

Abstract: A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.

公开(公告)号：US09583303B2

公开(公告)日：2017-02-28

申请号：US14878513

申请日：2015-10-08

Applicant: FEI Company

Inventor： Bart Buijsse ,  Gijs van Duinen

IPC: H01J37/26 ,  H01J37/02 ,  H01J37/153

CPC classification number: H01J37/023 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/024 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.

Abstract translation: 当准备无孔相板（HFPP）时，应该在TEM的衍射平面或与其共轭的平面上以高精度放置优选无特征薄膜。 描述了将薄膜准确地放置在所述平面中的两种方法。 当TEM处于成像模式时，一种方法使用薄膜的Ronchigram，并且调整Ronchigram的放大倍率，使得Ronchigram中间的放大倍率是无穷大的。 第二种方法是在TEM处于衍射模式时使用由薄膜散射的电子。 当薄膜与衍射平面不一致时，由薄膜散射的电子似乎源自与零光束交叉的另一位置。 这被观察为光环。 光晕的不存在证明薄膜与衍射平面重合。

公开(公告)号：US20150243474A1

公开(公告)日：2015-08-27

申请号：US14629387

申请日：2015-02-23

Applicant: FEI Company

Inventor： Ivan Lazic ,  Eric Gerardus Theodoor Bosch ,  Faysal Boughorbel ,  Bart Buijsse ,  Kasim Sader ,  Sorin Lazar

IPC: H01J37/244 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802

Abstract: Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.

Abstract translation: 在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

公开(公告)号：US09006652B2

公开(公告)日：2015-04-14

申请号：US14271828

申请日：2014-05-07

Applicant: FEI Company

Inventor： Bart Buijsse

IPC: H01J37/26 ,  G01K5/04

CPC classification number: H01J37/263 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function. The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.

Abstract translation: 电子显微镜的方法使电子束通过相位板，特别是包含中心孔的Zernike型相位板，以及引起通过所述膜的电子的相移的薄膜。 该相移会导致对比度传递函数（CTF）从正弦函数变为余弦函数。 相板配备有由较薄的膜承载的环形形式的膜。 因此，仅在较小的空间频率范围（对于低频），相位发生变化（因而CTF），而对于其他空间频率，相移可忽略不计，因此CTF保持不变。 由于载体膜的厚度小得多，所以电子的散射也是可忽略的。

公开(公告)号：US11988618B2

公开(公告)日：2024-05-21

申请号：US17219627

申请日：2021-03-31

Applicant: FEI Company

Inventor： Bart Buijsse ,  Hans Raaijmakers ,  Peter Christiaan Tiemeijer

IPC: G01N23/2055 ,  G01N23/20025 ,  G01N23/207

CPC classification number: G01N23/2055 ,  G01N23/20025 ,  G01N23/207 ,  G01N2223/0565 ,  G01N2223/102 ,  G01N2223/604

Abstract: Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.