摘要:
The present invention provides nanowires which are substantially straight and substantially free of nanoparticles and methods for making the same The nanowires can be made by seeded approaches, wherein nanocrystals bound to a substrate are used to promote growth of the nanowire. Nanocrystals in solution may also be used to make the nanowires of the present invention. Supercritical fluid reaction conditions can be used in a continuous or semi-batch process.
摘要:
Nanowires are formed using an approach that facilitates efficient and economical growth thereof. According to an example embodiment of the present invention, a gas including a semiconducting material (e.g., single-crystal germanium) is introduced to a conductive metal particle (e.g., gold) on an insulating substrate to grow a nanowire therefrom. In one implementation, an alloy is formed from the semiconducting material and the conductive metal particle, with the nanowire being grown from the alloy. In another implementation, a co-flow of hydrogen is used with the gas including the semiconducting material to facilitate the growth of the nanowire.
摘要:
A composite of germanium film for a semiconductor device and methods of making the same. The method comprises growing a graded germanium film on a semiconductor substrate in a deposition chamber while simultaneously decreasing a deposition temperature and decreasing a silicon source gas and increasing a germanium source gas over a predetermined amount of time. The graded germanium film comprises an ultra-thin silicon-germanium buffer layer and a germanium film.
摘要:
We provide a method of doping an Si or SiGe film with carbon or boron. By reducing the silicon precursor pressure, heavily-doped films may be obtained. A single dopant source may be used. The doped Si and SiGe films are of suitable quality for use in a transistor such as an HBT.
摘要:
The present invention broadly concerns layered structures of substantially-crystalline materials and processes for making such structures. More particularly, the invention concerns epitaxial growth of a substantially-crystalline layer of a first material on a substantially-crystalline second material different from the first material.
摘要:
There is provided an improved process of forming a functional epitaxial film by using two kinds of active species and chemically reacting them.One of the species is an activated substance which contains silicon atoms or germanium atoms and halogen atoms. The other species is one which is generated from a chemical substance capable of contributing to formation of a film and chemically reactive with the former active species.
摘要:
A method of depositing Ge on a Si substrate in a reaction chamber includes the steps of: precleaning the substrate; evacuating the chamber to a pressure below 10.sup.-7 Torr; heating the substrate to 300.degree.-600.degree. C.; and providing a GeH.sub.4 /B.sub.2 H.sub.6 /He mixture of gas with a GeH.sub.4 partial pressure of 2-50 mTorr and a B.sub.2 H.sub.6 partial pressure of 0.08 to 2 mTorr.
摘要:
A process and apparatus for separating scum from molten metal, particularly germanium, and the pulling of single crystals with the use of outer and inner crucibles. The metal is placed in the outer crucible and there melted. In the inner crucible is weighted with a ballast to ensure its penetration into the molten metal and to avoid its flotation on the molten metal. The outer crucible is then lifted and rotated to segregate the scum from the molten metal and to introduce the metal from the outer to the inner crucible through an orifice provided in the bottom of the inner crucible while the scum remains in the outer crucible. The outer crucible is then lowered to empty the inner crucible and again lifted and rotated to reintroduce scum-free metal from the outer to the inner crucible. The steps are repeated until all traces of the scum are separated from the molten metal, which is followed by growing a single crystal of metal from the scum-free metal in the inner crucible.
摘要:
A homogeneously doped silicon is produced by mixing in the liquid phase a halogen compound of silicon consisting of a silicon halide or or halosilane with a halide of a doping element of Group III or V of the Periodic System having a boiling point differing by not more than 50 DEG C. from that of the silicon halogen compound, evaporating the liquids by passing a carrier gas through them at such a rate that the ratio of silicon to doping element in the residual liquid remains constant and passing the gas mixture over the surface of a carrier of silicon heated to a temperature such that silicon and the doping element are deposited from the gas on to the surface of the carrier. The carrier may be silicon doped with the doping element and the ratio of silicon halogen compound to the doping element halide in the liquid is so adjusted, by determinations of the extent of doping of deposited silicon obtained with liquid mixtures of known concentrations, that the extent of doping of the deposited silicon e.g. as a monocrystal is the same as that of the carrier e.g. a monocrystal. The carrier gas may be hydrogen. The gaseous mixture e.g. SiCl4 or SiHCl3 may contain a hydrogen halide, e.g. HCl. The doping substance may be PCl3, POCl3, AsCl3 or BBr3. Specifications 795,191, 809,250, 812,818, 926,807 and 960,893 are referred to.ALSO:A homogeneously doped germanium or silicon is produced by mixing in the liquid phase a halogen compound of germanium or silicon consisting of a germanium halide or halogermane or a silicon halide or halosilicone with a halide of a doping element of Group III or V of the Periodic System having a boiling point differing by not more than 50 DEG C. from that of the germanium halogen compound, evaporating the liquids by passing a carrier gas through them at such a rate that the ratio of germanium to doping element in the residual liquid remains constant and passing the gas mixture over the surface of a carrier of germanium heated to a temperature such that germanium and the doping element are deposited from the gas on to the surface of the carrier. The carrier may be germanium doped with the doping element and the ratio of germanium halogen compound to the doping element halide in the liquid is so adjusted, by determinations of the extent of doping of deposited germanium obtained with liquid mixtures of known concentration, that the extent of doping of the deposited germanium e.g. as a monocrystal is the same as that of the carrier e.g. a monocrystal. The carrier gas may be hydrogen. The gaseous mixture e.g. GeCl4 or GeHCl3 may contain a hydrogen halide e.g. HCl. The doping substance may be PCl3, POCl3, AsCl3 or BBr3. Specifications 795,191, 809,250, 812,818, 926,807 and 960,893 are referred to.