公开(公告)号：US20170179668A1

公开(公告)日：2017-06-22

申请号：US15128715

申请日：2015-03-30

申请人： Alexander V. KRASNOV

发明人： Alexander V. KRASNOV

IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/223 ,  H01S3/041 ,  H01S3/0979 ,  H01S3/038 ,  H01S3/04

CPC分类号： H01S3/03 ,  H01S3/0071 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0405 ,  H01S3/041 ,  H01S3/0816 ,  H01S3/095 ,  H01S3/0979 ,  H01S3/2232 ,  H01S3/2308 ,  H01S3/2316

摘要： Apparatus and methods relating to a gas flow laser are disclosed herein. The gas flow laser includes an eccentrically aligned inner casing within a cylindrical or oval outer shell thereby creating a narrow gas flow path in which the speed of the gas flow may approach sonic or supersonic speeds. An optical resonator is within the narrow gas flow path, and one or more diffusers are located downstream of the optical resonator to improve operating efficiency of the gas flow laser.

公开(公告)号：US07190708B2

公开(公告)日：2007-03-13

申请号：US09742485

申请日：2000-12-20

申请人： Richard G. Morton

发明人： Richard G. Morton

IPC分类号： H01S3/00 ,  H01S3/097 ,  H01S3/03 ,  H01S3/038

CPC分类号： H01S3/038 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/041 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225

摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.

摘要翻译： 准激光激光器，激光腔包含含有氟和长寿命，退火的铜合金电极的循环激光气体。 电极寿命通过在电极加工后退火而增加。 该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。 加工后的退火也可以减少整个电极材料的应力。 在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。

公开(公告)号：US20050018737A1

公开(公告)日：2005-01-27

申请号：US10684016

申请日：2003-10-10

申请人： Richard Morton

发明人： Richard Morton

IPC分类号： H01S3/03 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC分类号： H01S3/225 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0388 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223

摘要： A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part having the general shape of a prior art anode with a trench shaped cavity at the top and a second part comprised of lead rich brass and disposed in the trench shape cavity.

摘要翻译： 一种气体放电激光器，其具有细长阴极和具有覆盖阳极放电表面的多孔绝缘层的细长阳极。 脉冲功率系统以至少1KHz的速率提供电脉冲。 鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。 在优选实施例中，阳极的至少一部分由铅构成，并且阳极表面的氟离子溅射产生大部分氟化铅所包含的绝缘层（在阳极的排放表面上）。 在特别优选的实施例中，阳极制造成两部分，第一部分具有现有技术阳极的一般形状，在顶部具有沟槽形空腔，第二部分由富含铅的黄铜组成并设置在沟槽形腔中。

公开(公告)号：US06690706B2

公开(公告)日：2004-02-10

申请号：US10104502

申请日：2002-03-22

申请人： Richard G. Morton ,  Timothy S. Dyer ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  Tom A. Watson ,  Bryan Moosman ,  Alex P. Ivaschenko

发明人： Richard G. Morton ,  Timothy S. Dyer ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  Tom A. Watson ,  Bryan Moosman ,  Alex P. Ivaschenko

IPC分类号： H01S3097

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0388 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225

摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

公开(公告)号：US06654403B2

公开(公告)日：2003-11-25

申请号：US09748317

申请日：2000-12-22

申请人： Richard C. Ujazdowski ,  Michael C. Cates ,  Richard G. Morton

发明人： Richard C. Ujazdowski ,  Michael C. Cates ,  Richard G. Morton

IPC分类号： H01S3097

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0979 ,  H01S3/223 ,  H01S3/225

摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and a set of long life electrode structures. At least one of the electrode structures has an erosion pad and a cross section shape designed to provide in conjunction with other chamber structure a gradual increasing flow cross section between the discharge region and the circulating tangential fan blade. In a preferred embodiment, electrode lifetime is increased by annealing the erosion rod after it is are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.

摘要翻译： 具有激光室的准分子激光器，其包含含有氟的循环激光气体和一组长寿命的电极结构。 电极结构中的至少一个具有冲蚀焊盘和横截面形状，其设计成与其他腔室结构一起提供在放电区域和循环切向风扇叶片之间逐渐增加的流动横截面。 在优选的实施方案中，通过在侵蚀棒被加工之后对其进行退火来增加电极寿命。 该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。 加工后的退火也可以减少整个电极材料的应力。 在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。

公开(公告)号：US20020122453A1

公开(公告)日：2002-09-05

申请号：US09742485

申请日：2000-12-20

发明人： Richard G. Morton

IPC分类号： H01S003/223

CPC分类号： H01S3/038 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/041 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225

摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.

摘要翻译： 准激光激光器，激光腔包含含有氟和长寿命，退火的铜合金电极的循环激光气体。 电极寿命通过在电极加工后退火而增加。 该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。 加工后的退火也可以减少整个电极材料的应力。 在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。

公开(公告)号：US5682400A

公开(公告)日：1997-10-28

申请号：US534796

申请日：1995-09-27

申请人： Alexander V. Krasnov

发明人： Alexander V. Krasnov

IPC分类号： H01S3/0977 ,  H01S3/0975 ,  H01S3/0979 ,  H01S3/097

CPC分类号： H01S3/0975 ,  H01S3/0979 ,  Y10S372/701

摘要： Disclosed is a gas laser utilizing high frequency discharge excitation in the area of sonic or supersonic/subsonic transfer gas flow. The laser uses various types of gases and mixtures of gases as the active medium and provides for pre-ionization of the gaseous medium before using high frequency discharge excitation. The gas is supplied into a receiver, and has downstream therefrom a supersonic nozzle for acceleration of the active gaseous flow to high subsonic or supersonic speeds in order to provide intensive dynamic cooling of the active gas medium. The gas is excited using high frequency discharge excitation in the critical area of the supersonic nozzle or downstream therefrom. The high frequency discharge and excitation can also occur within the optical resonator region which is located within the supersonic area of the nozzle. The present invention provides compact, efficient and super-powerful continuous, quasi-continuous and pulse laser systems with wavelengths from 0.3 mkm to 10.6 mkm with a high quality output beam. The present laser device may be utilized in scientific, commercial, aerospace and free space applications.

摘要翻译： 公开了在声波或超音速/亚音速转印气体流动区域中利用高频放电激发的气体激光器。 激光使用各种类型的气体和气体混合物作为活性介质，并在使用高频放电激发之前提供气体介质的预电离。 气体被供应到接收器中，并且在其下游具有用于将活性气体流加速到高亚音速或超音速速度的超音速喷嘴，以便提供活性气体介质的强烈的动态冷却。 在超音速喷嘴的临界区域或其下游的高压放电激发下，气体被激发。 高频放电和激发也可以发生在位于喷嘴的超音速区域内的光学谐振器区域内。 本发明提供了具有0.3m至10.6mkm波长的紧凑，有效和超强的连续，准连续和脉冲激光系统，具有高质量的输出光束。 本激光装置可用于科学，商业，航天和自由空间应用。

公开(公告)号：US5206876A

公开(公告)日：1993-04-27

申请号：US751827

申请日：1991-08-30

申请人： Hartwig von Buelow ,  Eberhard Zeyfang ,  Wolfram Schock

发明人： Hartwig von Buelow ,  Eberhard Zeyfang ,  Wolfram Schock

IPC分类号： H01S3/041 ,  H01S3/0975 ,  H01S3/0979

CPC分类号： H01S3/0979 ,  H01S3/041 ,  H01S3/0975

摘要： In order to improve a gasdynamic CO laser comprising a gas supply means supplying a laser gas, an excitation region, in which the laser gas is excited, a supersonic nozzle arranged downstream of the excitation region and having the laser gas flowing therethrough and a laser-active region which is penetrated by a resonator beam path, such that it is possible to excite the laser gas in a more optimum manner, it is suggested that the laser gas be excited in the excitation region by means of a high-frequency discharge in a high-frequency discharge region and that the high-frequency discharge region end in front of the supersonic nozzle.

摘要翻译： 为了改进包括供给激光气体的气体供给装置的气体动力学CO激光器，激发气体被激发的激发区域，布置在激发区域下游并且具有流过激光气体的激光区域的超音速喷嘴， 有源区域被谐振器光束路径穿透，使得可以以更优化的方式激发激光气体，建议激光气体通过高频放电在激发区域中被激发 高频放电区域，高频放电区域在超音速喷嘴前方结束。

公开(公告)号：US4604752A

公开(公告)日：1986-08-05

申请号：US283181

申请日：1981-07-14

申请人： Herb J. J. Sequin ,  Kyong H. Nam ,  Clarence E. Capjack

发明人： Herb J. J. Sequin ,  Kyong H. Nam ,  Clarence E. Capjack

IPC分类号： H01S3/041 ,  H01S3/0979 ,  H01S3/134 ,  H01S3/13

CPC分类号： H01S3/041 ,  H01S3/0979 ,  H01S3/134

摘要： The invention provides a novel means of stabilizing a glow discharge device against electrothermal instabilities and electrode induced instabilities comprising imposing a magnetic field on the discharge current to create a sheared flow system within the discharge volume. There is further provided an apparatus for producing a stable high power glow discharge comprising an anode and a cathode adapted to be connected to an electric power source and, when so connected, to establish an electric field and a glow discharge between said anode and cathode and an electromagnet adapted to be connected to an electric power source and, when so connected, to establish a magnetic field across said electric field. This application relates to high power glow discharge devices and to a means of stabilizing such devices against electro-thermal instabilities and electrode induced instabilities.

摘要翻译： 本发明提供了一种稳定辉光放电装置以抵抗电热不稳定性和电极引起的不稳定性的新颖方法，包括在放电电流上施加磁场，以在放电容积内产生剪切流动系统。 还提供了一种用于产生稳定的高功率辉光放电的装置，其包括适于连接到电源的阳极和阴极，并且当连接时，在所述阳极和阴极之间建立电场和辉光放电， 适于连接到电源的电磁体，当连接时，形成跨越所述电场的磁场。 本申请涉及高功率辉光放电装置和稳定这些装置以抵抗电热不稳定性和电极引起的不稳定性的手段。

公开(公告)号：US4547884A

公开(公告)日：1985-10-15

申请号：US366743

申请日：1982-04-08

申请人： Nelson E. Jones

发明人： Nelson E. Jones

IPC分类号： H01S3/036 ,  H01S3/0979 ,  H01S3/22

CPC分类号： H01S3/0979 ,  H01S3/036 ,  Y10S372/701

摘要： A sonic flow plate assembly for controlling the mass flow rate of gases by use of the sonic choking phenomenon. Identical gas flow control plate portions, each containing a plurality of nozzles formed by the smooth internal surface of vertical passageways in the plates, are connected end-to-end to form a unified gas flow control plate. Each of the nozzle passageways is in the shape of a hollow inverted truncated cone with bases in communication with hollow cylinders. Each plate portion, including the passageways therein, are molded from a fiberglass composite. The connected plate portions are secured in place by transversely positioned tension rods.

摘要翻译： 用于通过使用声音阻塞现象来控制气体质量流量的声流板组件。 相同的气体流量控制板部分，每个包含由板中的垂直通道的平滑内表面形成的多个喷嘴，端对端连接以形成统一的气流控制板。 每个喷嘴通道为具有与中空圆筒连通的基座的中空倒立圆锥体的形状。 包括其中的通道的每个板部分由玻璃纤维复合材料模制。 连接的板部分通过横向定位的拉杆固定就位。