公开(公告)号：US20240194464A1

公开(公告)日：2024-06-13

申请号：US18529106

申请日：2023-12-05

申请人： INTEVAC, INC.

发明人： Samuel D. Harkness, IV ,  Thomas P. Nolan ,  Stephen M. Daly

IPC分类号： H01J37/34

CPC分类号： H01J37/3438 ,  H01J37/3452 ,  H01J37/3461 ,  H01J37/3405 ,  H01J2237/3323

摘要： An anode for a plasma chamber, having an anode block having a front surface to face a plasma and a rear surface to face away from the plasma; a magnet positioned within the anode block and generating magnetic field lines extending outwardly from the front surface of the anode block; and an electron filter bar spaced apart and extending over the front surface of the anode block and intercepting at least part of the magnetic field lines.

公开(公告)号：US11851746B2

公开(公告)日：2023-12-26

申请号：US17430026

申请日：2020-02-10

申请人： Oerlikon Surface Solutions AG, Pfäffikon

发明人： Jukka Kolehmainen

IPC分类号： C23C14/32 ,  H01J37/32 ,  H01J37/34

CPC分类号： C23C14/325 ,  H01J37/32055 ,  H01J37/3438 ,  H01J2237/332

摘要： An assembly for cathodic arc deposition of a material onto an article. The assembly includes a chamber for receiving an article to be coated and a rotating target. The rotatable target has a surface from which a plasma material is ejected. An anode ring is positioned a first distance from the surface of the rotatable target. The anode ring has an opening with a central axis that is parallel to a rotational axis of the rotatable target and offset a second distance from the rotational axis. A spark device is disposed in the chamber for generating an arc on the surface of the rotatable target. The assembly configured to direct a stream of charged particles ejected from the surface of the target through the opening of the anode ring to the article to be coated.

公开(公告)号：US10056237B2

公开(公告)日：2018-08-21

申请号：US13840305

申请日：2013-03-15

申请人： Vapor Technologies, Inc.

发明人： Vladimir Gorokhovsky ,  William Grant ,  Edward Taylor ,  David Humenik

IPC分类号： H01J37/34 ,  C23C14/32 ,  C23C14/35 ,  H01J37/32

CPC分类号： H01J37/3438 ,  C23C14/32 ,  C23C14/325 ,  C23C14/35 ,  C23C14/355 ,  H01J37/32055 ,  H01J37/32357 ,  H01J37/34 ,  H01J37/3405 ,  H01J37/3417

摘要： A coating system includes a vacuum chamber and a coating assembly. The coating assembly includes a vapor source, a substrate holder, a remote anode electrically coupled to the cathode target, and a cathode chamber assembly. The cathode chamber assembly includes a cathode target, an optional primary anode and a shield which isolates the cathode target from the vacuum chamber. The shield defines an opening for transmitting an electron emission current of a remote arc discharge from the cathode target to the remote anode that streams along the target face long dimension. A primary power supply is connected between the cathode target and the primary anode while a secondary power supply is connected between the cathode target and the remote anode. Characteristically, a linear remote anode dimension and a vapor source short dimension are parallel to a dimension in which an arc spot is steered along the cathode target.

公开(公告)号：US20180218890A1

公开(公告)日：2018-08-02

申请号：US15746647

申请日：2016-07-18

申请人： HONEYWELL INTERNATIONAL INC.

发明人： John A. DUNLOP ,  Kevin T. HUBERT ,  Jacob C. RUZICKA ,  Andrew N.A. WRAGG ,  Michael D. BLONDELL ,  William P. JARDEE ,  Phillip F. JOHN ,  Edward P. LARA ,  Wayne D. MEYER ,  Adam P. DAUB ,  Scott A. BUCKHART ,  Travis C. JUNTTILA

IPC分类号： H01J37/34 ,  H01F7/06 ,  H01F27/28 ,  C23C14/35

CPC分类号： H01J37/3458 ,  C23C14/34 ,  C23C14/35 ,  H01F7/06 ,  H01F27/28 ,  H01F27/2847 ,  H01J37/00 ,  H01J37/3211 ,  H01J37/32871 ,  H01J37/3438 ,  H01J37/3488

摘要： A high surface area coil for use with a physical vapor deposition apparatus comprising a first surface. At least a portion of the first surface has a macrotexture with a surface roughness between about 15 μm and about 150 μm. At least a portion of the first surface has a microtexture with a surface roughness between about 2 μm and 15 μm.

公开(公告)号：US20180197719A1

公开(公告)日：2018-07-12

申请号：US15606025

申请日：2017-05-26

申请人： Samsung Electronics Co., Ltd.

发明人： Yil-Hyung Lee ,  Yoo-Chul Kong ,  Jong-Kyu Kim ,  Seok-Woo Nam ,  Jong-Soon Park ,  Kyoung-Sub Shin

IPC分类号： H01J37/32 ,  H01J37/34 ,  C23C14/34 ,  C23C14/50

CPC分类号： H01J37/32412 ,  H01J37/32422 ,  H01J37/3435 ,  H01J37/3438 ,  H01J2237/083 ,  H01J2237/334

摘要： In an example embodiment a method of processing a substrate includes forming a plasma in a plasma chamber and using charged grids to form an ion beam and to thereby accelerate ions from the plasma chamber to a processing chamber. An auxiliary heater, which may be a radiant heater, may be used to pre-heat a grid to a saturation state to accelerate heating and concomitant distortion of the grid. A process recipe may pre-compensate for distortion of the grid.

公开(公告)号：US20170342547A1

公开(公告)日：2017-11-30

申请号：US15395274

申请日：2016-12-30

申请人： SAMSUNG DISPLAY CO., LTD.

发明人： Seungho CHOI ,  Haeyoung YOO ,  Kanghee LEE

IPC分类号： C23C14/35 ,  H01F7/02 ,  H01J37/32 ,  H01F7/20 ,  H01J37/34 ,  C23C14/34

CPC分类号： C23C14/352 ,  H01F7/0273 ,  H01F7/20 ,  H01J37/32715 ,  H01J37/3405 ,  H01J37/3414 ,  H01J37/3438 ,  H01J37/3452 ,  H01J37/3464 ,  H01J37/3476

摘要： A sputtering apparatus includes a substrate holder, a first counterpart target area, a second counterpart target area, and a power supply. The first counterpart target area includes a first target and at least one first magnetic part and operates to form a magnetic field in a first plasma area adjacent to the first target. The second counterpart target area includes a second target and at least one second magnetic part and operates to form a magnetic field in a second plasma area adjacent to the second target. The power supply supplies a first power voltage to the first and second targets. A control anode faces the substrate holder in a second direction, with the first and second plasma areas therebetween, and receives a control voltage greater than the first power voltage.

公开(公告)号：US20170316924A1

公开(公告)日：2017-11-02

申请号：US15432590

申请日：2017-02-14

申请人： Applied Materials, Inc.

发明人： Michael S. COX ,  Lara HAWRYLCHAK ,  Brian T. WEST

IPC分类号： H01J37/34 ,  H01J37/32 ,  C23C14/34 ,  H01L21/02

CPC分类号： H01J37/3438 ,  C23C14/34 ,  C23C14/564 ,  H01J37/32541 ,  H01J37/32568 ,  H01L21/02164 ,  H01L21/02266

摘要： Embodiments of the invention generally relate to an anode for a semiconductor processing chamber. More specifically, embodiments described herein relate to a process kit including a shield serving as an anode in a physical deposition chamber. The shield has a cylindrical band, the cylindrical band having a top and a bottom, the cylindrical band sized to encircle a sputtering surface of a sputtering target disposed adjacent the top and a substrate support disposed at the bottom, the cylindrical band having an interior surface. A texture is disposed on the interior surface. The texture has a plurality of features. A shaded area is disposed in the feature wherein the shaded area is not visible to the sputtering target. A small anode surface is disposed in the shaded area.

公开(公告)号：US09536714B2

公开(公告)日：2017-01-03

申请号：US14783168

申请日：2014-04-07

申请人： Oerlikon Surface Solutions AG, Trübbach

发明人： Siegfried Krassnitzer ,  Juerg Hagmann ,  Joerg Kerschbaumer

IPC分类号： C23C14/34 ,  H01J37/34

CPC分类号： H01J37/3435 ,  C23C14/3407 ,  H01J37/3438 ,  H01J37/3467 ,  H01J37/3497

摘要： A plate-centering system that has a plate with a holder, in which the plate is centered in the holder both at room temperature and at higher temperatures, independently of the thermal expansion of the plate and the holder, and the plate can freely expand in the holder at higher temperatures. The invention relates in particular to a target having a frame-shaped target mount, which is very well suited for use in a coating source for high power pulsed magnetron sputtering of the target.

摘要翻译： 板对中系统，其具有带有保持器的板，其中板在室温和较高温度下在保持器中居中，独立于板和保持器的热膨胀，并且板可自由地膨胀 持有人在较高的温度。 本发明具体涉及一种具有框架状目标安装座的靶，其非常适合用于靶材的大功率脉冲磁控溅射用涂层源。

公开(公告)号：US09508532B2

公开(公告)日：2016-11-29

申请号：US14206197

申请日：2014-03-12

申请人： BB PLASMA DESIGN AB

发明人： Ladislav Bardos ,  Hana Barankova

IPC分类号： C23C14/00 ,  H01J37/34 ,  H01J37/32 ,  C23C14/35

CPC分类号： H01J37/3405 ,  C23C14/3407 ,  C23C14/35 ,  C23C14/352 ,  H01J37/32596 ,  H01J37/3402 ,  H01J37/342 ,  H01J37/3423 ,  H01J37/3438 ,  H01J37/345

摘要： A magnetron plasma apparatus boosted by hollow cathode plasma includes at least one electrically connected pair of a first hollow cathode plate and a second hollow cathode plate placed opposite to each other at a separation distance of at least 0.1 mm and having an opening following an outer edge of a sputter erosion zone on a magnetron target so that a magnetron magnetic field forms a perpendicular magnetic component inside a hollow cathode slit between plates and, wherein the plates and are connected to a first electric power generator together with the magnetron target to generate a magnetically enhanced hollow cathode plasma in at least one of a first working gas distributed in the hollow cathode slit and a second working gas admitted outside the slit in contact with a magnetron plasma generated in at least one of the first working gas and the second working gas.

摘要翻译： 由空心阴极等离子体增强的磁控管等离子体装置包括至少一个电连接的一对第一中空阴极板和第二中空阴极板，该第一空心阴极板和第二中空阴极板以至少0.1mm的间隔距离彼此相对放置， 在磁控管靶上形成溅射侵蚀区，使得磁控管磁场在板之间的中空阴极狭缝内形成垂直的磁性部件，并且其中板与磁控管靶一起连接到第一发电机，以产生磁性 分散在中空阴极狭缝中的第一工作气体中的至少一个中的增强的空心阴极等离子体以及与在第一工作气体和第二工作气体中的至少一个中产生的磁控管等离子体接触的狭缝外部的第二工作气体。

公开(公告)号：US20160300700A1

公开(公告)日：2016-10-13

申请号：US15073552

申请日：2016-03-17

申请人： Vision Ease, LP

发明人： Michael Marshall ,  Jeff Brown

IPC分类号： H01J37/34

CPC分类号： H01J37/3441 ,  H01J37/32477 ,  H01J37/32871 ,  H01J37/34 ,  H01J37/3438 ,  H01J37/3447 ,  H01J37/345 ,  H01J2237/026 ,  H01J2237/3323

摘要： A sputter system and an anode and anode shield assembly that provide for improved grounding for extended sputter cycles.

摘要翻译： 溅射系统和阳极和阳极屏蔽组件，其提供用于延长溅射循环的改进的接地。