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公开(公告)号：US20170342547A1
公开(公告)日：2017-11-30
申请号：US15395274
申请日：2016-12-30
发明人： Seungho CHOI , Haeyoung YOO , Kanghee LEE
CPC分类号： C23C14/352 , H01F7/0273 , H01F7/20 , H01J37/32715 , H01J37/3405 , H01J37/3414 , H01J37/3438 , H01J37/3452 , H01J37/3464 , H01J37/3476
摘要： A sputtering apparatus includes a substrate holder, a first counterpart target area, a second counterpart target area, and a power supply. The first counterpart target area includes a first target and at least one first magnetic part and operates to form a magnetic field in a first plasma area adjacent to the first target. The second counterpart target area includes a second target and at least one second magnetic part and operates to form a magnetic field in a second plasma area adjacent to the second target. The power supply supplies a first power voltage to the first and second targets. A control anode faces the substrate holder in a second direction, with the first and second plasma areas therebetween, and receives a control voltage greater than the first power voltage.
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公开(公告)号：US20220165211A1
公开(公告)日：2022-05-26
申请号：US17463253
申请日：2021-08-31
发明人： Ara JO , Woo-Chul KIM , Inbok SONG , Kanghee LEE , Deok Jun CHOI
IPC分类号： G09G3/3225 , H01L27/32 , G06F3/041 , G06F3/044
摘要： A display device includes a display panel, an input sensor disposed on the display panel, a panel driving circuit which drives the display panel and generates a first driving voltage, and a readout circuit which controls the input sensor. The readout circuit receives the first driving voltage from the panel driving circuit and outputs transmit signals to control the input sensor.
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