公开(公告)号：US09880233B2

公开(公告)日：2018-01-30

申请号：US13095279

申请日：2011-04-27

申请人： Abraham Ravid

发明人： Abraham Ravid

IPC分类号： G01R33/00 ,  G01B7/06 ,  G01N27/72 ,  G01N27/90

CPC分类号： G01R33/007 ,  G01B7/105 ,  G01N27/72 ,  G01N27/9033

摘要： A method and apparatus to determine a parameter of a metal-containing film are provided herein. In some embodiments, a method of determining a parameter of a metal-containing film may include generating a first magnetic field by flowing an alternating current through a coil disposed adjacent to and spaced apart from the metal-containing film, wherein the first magnetic field induces a second magnetic field proximate the metal-containing film; heating the metal-containing film from a first temperature to a second temperature; measuring a response of the first magnetic field to the second magnetic field as the metal-containing film is heated from the first temperature to the second temperature; and correlating the response with a rate of temperature change of the metal-containing film as the metal-containing film is heated from the first temperature to the second temperature to determine a parameter of the metal-containing film.

公开(公告)号：US20170226655A1

公开(公告)日：2017-08-10

申请号：US15495187

申请日：2017-04-24

申请人： Applied Materials, Inc.

发明人： Abraham Ravid ,  Dmitry A. Dzilno ,  Todd J. Egan ,  Robert O. Miller

IPC分类号： C25D17/00 ,  H01L21/66 ,  C25D21/12 ,  C25D7/12 ,  G01R31/265 ,  G01B7/06

CPC分类号： G01B7/105 ,  C25D7/123 ,  C25D17/001 ,  C25D17/12 ,  C25D21/12 ,  G01N27/20 ,  G01R31/2653 ,  G01R31/2656 ,  H01L22/20

摘要： A measurement tool for measuring an electrical parameter of a metal film deposited on a front side of a workpiece includes an electrical sensor connected to a workpiece contact point, an energy beam source with a beam impact location on the front side, a holder and a translation mechanism capable of translating the holder relative to the workpiece support, the beam source supported on the holder, and a computer programmed to sense a behavior of an electrical parameter sensed by the sensor.

公开(公告)号：US09605940B2

公开(公告)日：2017-03-28

申请号：US14119953

申请日：2012-05-24

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B7/06

CPC分类号： G01B7/10 ,  G01B7/105 ,  Y10T29/49071

摘要： The invention relates to a measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received in the housing at least slightly moveably along a longitudinal axis and which comprises at least one winding device, which is allocated to the longitudinal axis, having a spherical positioning cap facing the outer front face of the housing, said cap being arranged in the longitudinal axis, wherein the spherical positioning cap has a basic body that has a cylindrical core section and a pole cap arranged on a front face of the core section, wherein the winding device is allocated to the spherical positioning cap, said winding device being formed from a discoidal or annular carrier with at least one Archimedean coil arranged thereon and with the basic body consisting of a ferritic material and the pole cap consisting of a hard metal.

公开(公告)号：US09194687B1

公开(公告)日：2015-11-24

申请号：US13018562

申请日：2011-02-01

申请人： Feng Yu ,  Jay M. Amos

发明人： Feng Yu ,  Jay M. Amos

IPC分类号： G01B7/06

CPC分类号： G01B7/105 ,  G01B7/06 ,  G01B7/10

摘要： A nondestructive system and method for measuring non-conductive coating thickness is disclosed. The method includes providing a composite substrate, placing a conductive layer over a surface of the composite substrate, and depositing a plurality of non-conductive coating layers over the conductive layer. An eddy-current measuring coil formed on a printed circuit board is provided atop the coating layers. The coil has a driving trace with first and second driving electrodes, and a receiving trace having first and second receiving electrodes. The receiving and driving traces can be either coaxial or interwoven, are spaced apart, and share a common center. A load administered to the first and second driving electrodes using an eddyscope is measured across the first and second receiving electrodes to determine impedance; the measured impedance is used to determine a total thickness of the plurality of coating layers and whether an overall coating thickness is uniform.

摘要翻译： 公开了用于测量非导电涂层厚度的非破坏性系统和方法。 该方法包括提供复合衬底，将导电层放置在复合衬底的表面上，以及在导电层上沉积多个非导电涂层。 形成在印刷电路板上的涡流测量线圈设置在涂层的顶部。 线圈具有带有第一驱动电极和第二驱动电极的驱动迹线，以及具有第一和第二接收电极的接收迹线。 接收和驱动迹线可以是同轴的或交织的，间隔开的，并且共享共同的中心。 在第一和第二接收电极两端测量施加于第一驱动电极和第二驱动电极的载荷，以确定阻抗; 测量的阻抗用于确定多个涂层的总厚度以及整个涂层厚度是否均匀。

公开(公告)号：US20150323483A1

公开(公告)日：2015-11-12

申请号：US14496062

申请日：2014-09-25

申请人： Boe Technology Group Co., Ltd.

发明人： Xiaowei Liu ,  Yao Liu ,  Xiangqian Ding ,  Jinchao Bai

IPC分类号： G01N27/22 ,  C23C16/44 ,  C23C16/455

CPC分类号： C23C16/52 ,  C23C2/14 ,  C23C14/545 ,  C23C14/564 ,  C23C16/4401 ,  C23C16/45589 ,  C23C16/45591 ,  G01B7/085 ,  G01B7/105 ,  G01N27/228 ,  G01R27/26 ,  H01J37/32568 ,  H01L21/67253

摘要： A detection device includes a chamber for vacuum coating, a capacitance measurement device and a baffle mechanism located in the chamber. The baffle mechanism is a closed structure encompassed by a number of baffle walls, wherein at least one baffle wall includes a fixed baffle plate and a moveable baffle plate. The moveable baffle plate is pivotable about the fixed baffle plate. The moveable baffle plate, after pivoting, may get parallel with an adjacent baffle wall. The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device, and the capacitance measurement device is used to measure the capacitance between the adjacent baffle wall and the moveable baffle plate. The detection device may accurately detect the service life of the baffle mechanism and achieve precise management of the apparatus.

摘要翻译： 检测装置包括用于真空涂覆的室，电容测量装置和位于室中的挡板机构。 挡板机构是由多个挡板包围的封闭结构，其中至少一个挡板壁包括固定挡板和可移动挡板。 可移动挡板可围绕固定挡板枢转。 可移动挡板在枢转之后可能与相邻的挡板平行。 相邻的挡板壁和可动挡板分别连接到电容测量装置，并且电容测量装置用于测量相邻挡板壁和可移动挡板之间的电容。 检测装置可以准确地检测挡板机构的使用寿命，实现设备的精确管理。

公开(公告)号：US20150111314A1

公开(公告)日：2015-04-23

申请号：US14589988

申请日：2015-01-05

申请人： EBARA CORPORATION

发明人： Takeshi IIZUMI ,  Katsuhide WATANABE ,  Yoichi KOBAYASHI

IPC分类号： H01L21/321 ,  B24B49/12 ,  H01L21/67 ,  B24B37/013 ,  H01L21/66 ,  H01L21/3105

CPC分类号： H01L21/3212 ,  B24B37/013 ,  B24B37/042 ,  B24B49/12 ,  G01B7/105 ,  G01B11/0625 ,  G01B11/0683 ,  H01L21/30625 ,  H01L21/31053 ,  H01L21/31055 ,  H01L21/67075 ,  H01L21/67092 ,  H01L21/67253 ,  H01L21/76224 ,  H01L21/76819 ,  H01L21/7684 ,  H01L22/12 ,  H01L22/20

摘要： A method of polishing a substrate having a film is provided. The method includes: performing polishing of the substrate in a polishing section; transporting the polished substrate to a wet-type film thickness measuring device prior to cleaning and drying of the substrate; measuring a thickness of the film by the wet-type film thickness measuring device; comparing the thickness with a predetermined target value; and if the thickness has not reached the predetermined target value, performing re-polishing of the substrate in the polishing section prior to cleaning and drying of the substrate.

摘要翻译： 提供了抛光具有膜的基板的方法。 该方法包括：对抛光部分中的基板进行抛光; 在清洗和干燥基板之前将抛光的基板运送到湿式膜厚测量装置; 通过湿式膜厚测量装置测量膜的厚度; 将厚度与预定目标值进行比较; 并且如果厚度未达到预定目标值，则在清洁和干燥基板之前对抛光部分中的基板进行再抛光。

公开(公告)号：US20150004888A1

公开(公告)日：2015-01-01

申请号：US14485386

申请日：2014-09-12

申请人： Applied Materials, Inc.

发明人： Boguslaw A. Swedek ,  Manoocher Birang

IPC分类号： B24B37/26

CPC分类号： B24B37/26 ,  B24B37/013 ,  B24B37/205 ,  B24B49/02 ,  B24B49/10 ,  B24B49/105 ,  B24B49/12 ,  B24D11/02 ,  G01B7/105

摘要： A method of forming a polishing pad with a polishing layer having a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.

摘要翻译： 一种用具有研磨面和背面的研磨层形成研磨垫的方法。 在研磨面上形成有多个凹槽，在研磨层的背面形成有凹部。 与后表面的凹部对应的研磨面上的区域没有凹槽或具有较浅的凹槽。

公开(公告)号：US20140367265A1

公开(公告)日：2014-12-18

申请号：US14066005

申请日：2013-10-29

申请人： APPLIED MATERIALS, INC.

发明人： Abraham Ravid ,  Dmitry A. Dzilno ,  Todd J. Egan ,  Robert O. Miller

IPC分类号： G01N27/20 ,  C25D21/12

CPC分类号： G01B7/105 ,  C25D7/123 ,  C25D17/001 ,  C25D17/12 ,  C25D21/12 ,  G01N27/20

摘要： A measurement tool for measuring an electrical parameter of a metal film deposited on a front side of a workpiece includes an electrical sensor connected to a workpiece contact point, an energy beam source with a beam impact location on the front side, a holder and a translation mechanism capable of translating the holder relative to the workpiece support, the beam source supported on the holder, and a computer programmed to sense a behavior of an electrical parameter sensed by the sensor.

摘要翻译： 用于测量沉积在工件前侧上的金属膜的电参数的测量工具包括连接到工件接触点的电传感器，在前侧具有梁冲击位置的能量束源，保持器和平移 能够相对于工件支撑件平移保持器的机构，支撑在保持器上的梁源和被编程为感测由传感器感测的电参数的行为的计算机。

公开(公告)号：US08692564B2

公开(公告)日：2014-04-08

申请号：US13021328

申请日：2011-02-04

申请人： Atanu Saha ,  Krishnamurthy Anand ,  Hari Nadathur Seshadri ,  Karthick Vilapakkam Gourishankar ,  Filippo Cappuccini

发明人： Atanu Saha ,  Krishnamurthy Anand ,  Hari Nadathur Seshadri ,  Karthick Vilapakkam Gourishankar ,  Filippo Cappuccini

IPC分类号： G01R27/32

CPC分类号： G01B7/105

摘要： A method for use in determining the thickness of a layer of interest in a multi-layer structure. A first electrode is positioned in contact with a first surface of the multi-layer structure, and a second electrode is positioned in contact with a second surface of the multi-layer structure. The second surface is substantially opposite the first surface. The first electrode is pressed against the multi-layer structure at a predetermined sampling pressure, and the structure is optionally adjusted to a predetermined sampling temperature. The electrical impedance between the first electrode and the second electrode is measured.

摘要翻译： 一种用于确定多层结构中感兴趣层的厚度的方法。 第一电极定位成与多层结构的第一表面接触，并且第二电极定位成与多层结构的第二表面接触。 第二表面基本上与第一表面相对。 第一电极以预定的采样压力压在多层结构上，并且可选地将结构调整到预定的取样温度。 测量第一电极和第二电极之间的电阻抗。

公开(公告)号：US20140039830A1

公开(公告)日：2014-02-06

申请号：US13939615

申请日：2013-07-11

申请人： HON HAI PRECISION INDUSTRY CO., LTD. ,  Fu Tai Hua Industry (Shenzhen) Co., Ltd.

发明人： SHI-YUN HUANG

IPC分类号： G01B7/06

CPC分类号： G01B7/105 ,  G01B7/06

摘要： A test device includes a test port, a storage unit, and a processing unit. The test port connects to a test line including a test probe. The storage unit stores a relationship table defining relationships between various thicknesses of coatings and readings from the test probe. The processing unit includes a detection module, a power control module, and a result analysis module. The detection module detects a test signal to start a test and continue for a period of time. The power control module provides power to the test port for the test period. The test probe produces a stimulus signal when receiving the power from the test port, and produces a feedback signal containing a reading when the power voltage is cut off. The result analysis module obtains the particular reading and determines the thickness of the coating according to the relationship table.

摘要翻译： 测试装置包括测试端口，存储单元和处理单元。 测试端口连接到包括测试探头的测试线。 存储单元存储关系表，其中定义了来自测试探针的涂层和读数的各种厚度之间的关系。 处理单元包括检测模块，功率控制模块和结果分析模块。 检测模块检测测试信号开始测试并持续一段时间。 电源控制模块在测试期间为测试端口提供电源。 当从测试端口接收电源时，测试探针产生一个激励信号，当电源电压被切断时产生一个含有读数的反馈信号。 结果分析模块根据关系表获得特定的读数并确定涂层的厚度。