发明申请
- 专利标题： POLISHING PAD WITH TWO-SECTION WINDOW HAVING RECESS
- 专利标题（中）： 具有两部分窗户的抛光垫
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申请号： US14485386申请日： 2014-09-12
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公开(公告)号： US20150004888A1公开(公告)日： 2015-01-01
- 发明人: Boguslaw A. Swedek , Manoocher Birang
- 申请人： Applied Materials, Inc.
- 主分类号： B24B37/26
- IPC分类号： B24B37/26
摘要：
A method of forming a polishing pad with a polishing layer having a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in the back surface of the polishing layer. A region on the polishing surface corresponding to the indentation in the back surface is free of grooves or has shallower grooves.
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