HORTICULTURAL NUTRIENT CONTROL SYSTEM AND METHOD FOR USING SAME

    公开(公告)号:US20170208757A1

    公开(公告)日:2017-07-27

    申请号:US15004729

    申请日:2016-01-22

    摘要: The present invention relates generally to a horticultural nutrient control system and method for using same. The invention relates to an apparatus, and related methods, for automatically formulating, storing, and dispensing a nutrient solution to one or more horticultural crop, comprising: a) a reservoir unit for receiving a nutrient solution, mixing said nutrient solution, and dispensing said nutrient solution to a corresponding horticultural crop, wherein said reservoir unit comprises: i) a vertical cylindrical tank terminating at a cone-shaped bottom outlet; ii) a plurality of vertical baffles extending from the interior surface of the reservoir unit; and iii) a plurality of fluid eductors positioned along the length of each baffle, said fluid eductors adapted to deliver said nutrient solution in combination with oxygen to said reservoir unit; b) a nutrient delivery assembly fluidly connecting a water source and a plurality of nutritional component sources to said reservoir unit, said nutrient delivery assembly adapted to controllably deliver said water and nutritional components to said reservoir unit through said plurality of fluid eductors; c) controller coupled to said nutrient delivery assembly and adapted to direct the delivery of said water and nutritional components to the reservoir unit; and d) a storage-control unit for housing at least a central processing unit, said nutrient delivery assembly, and said plurality of nutritional component sources, wherein said central processing unit is operably coupled to said controller.

    LIQUID CHEMICAL SUPPLYING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD
    9.
    发明申请
    LIQUID CHEMICAL SUPPLYING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD 审中-公开
    液体化学供应系统,基板处理系统和基板处理方法

    公开(公告)号:US20160368030A1

    公开(公告)日:2016-12-22

    申请号:US15142298

    申请日:2016-04-29

    摘要: Disclosed is a substrate processing system including a nozzle to supply a chemical solution containing a mixture of first and second solutions onto a substrate loaded on a supporter of a process chamber, a chemical solution supplying system to supply the chemical solution to the nozzle, and a controller to control the chemical solution supplying system. The chemical solution supplying system may include a mixing tank mixing a plurality of chemicals to produce the first solution, a supply tank receiving the first solution from the mixing tank and producing the chemical solution, a connection line to connect the mixing tank to the supply tank, and a valve and a pump on the connection line. The pump is controlled to allow the first solution to be supplied into the supply tank at a predetermined supply amount per stroke.

    摘要翻译: 公开了一种基板处理系统,其包括:喷嘴,其将含有第一和第二溶液的混合物的化学溶液供应到负载在处理室的支撑体上的基板上;将化学溶液供给到喷嘴的化学溶液供给系统;以及 控制器控制化学溶液供应系统。 化学溶液供给系统可以包括混合多种化学品以制备第一溶液的混合罐,从混合罐接收第一溶液并产生化学溶液的供应罐,将混合罐连接到供应罐的连接管线 ,以及连接线上的阀和泵。 控制泵以允许第一溶液以每冲程以预定的供给量供应到供应罐中。

    OZONE WATER SUPPLY METHOD AND OZONE WATER SUPPLY DEVICE
    10.
    发明申请
    OZONE WATER SUPPLY METHOD AND OZONE WATER SUPPLY DEVICE 审中-公开
    臭氧水供应方式和臭氧水供应装置

    公开(公告)号:US20160361693A1

    公开(公告)日:2016-12-15

    申请号:US15118992

    申请日:2015-01-06

    摘要: An ozonated water supply method includes: feeding dissolving water contained in a circulation tank to an ozonation device at a given feed rate while feeding ultrapure water to the circulation tank, and returning ozonated water that has not been used at a use point to the circulation tank, dissolving ozone in the dissolving water using the ozonation device to obtain ozonated water, and feeding the ozonated water to the use point; feeding oxygen gas having a nitrogen gas content of 0.01 vol % or less to a discharge-type ozone gas-producer, and feeding the resulting ozone-containing gas to the ozonation device; adjusting the feed rate of the ultrapure water to the circulation tank; and adjusting the dissolved ozone concentration in the ozonated water. The method can reduce or suppress the accumulation of nitric acid in the recirculation system when a discharge-type ozone gas-producer is used as the ozone gas-producer.

    摘要翻译: 臭氧水供给方法包括:以给定的进料速率将包含在循环罐中的溶解水加入到臭氧装置中,同时向循环罐供给超纯水,并将循环罐中未使用的臭氧水返回到循环罐 使用臭氧化装置将臭氧溶解在溶解水中,得到臭氧化水,将臭氧水供给到使用点; 向放电型臭氧气体生产器供给氮气含量为0.01体积%以下的氧气,并将得到的含臭氧气体供给到臭氧化装置中; 调节超纯水进入循环罐的进料速度; 并调节臭氧水中溶解的臭氧浓度。 当使用排放型臭氧气体生产者作为臭氧气体生产者时,该方法可以减少或抑制再循环系统中硝酸的积聚。