Substrate processing apparatus
    4.
    发明授权

    公开(公告)号:US12097541B2

    公开(公告)日:2024-09-24

    申请号:US17469876

    申请日:2021-09-09

    摘要: A substrate processing apparatus according to an embodiment of the present disclosure includes a stage having a substantially disc-shaped form and including a hole in a center thereof; a roller that contacts a side surface of the stage and rotates the stage; a first liquid nozzle that supplies a first liquid to a first surface of the substrate; a first driver that moves a position of the first liquid nozzle; a second liquid nozzle that supplies a second liquid from the hole of the stage to a second surface of the substrate; a second driver that moves a position of the second liquid nozzle; a cooling nozzle that supplies a cooling gas from the hole of the stage to the second surface; a third driver that moves a position of the cooling nozzle; and a controller that controls the first driver, the second driver, and the third driver.

    LIQUID CHEMICAL TANK MODULE AND LIQUID CHEMICAL SUPPLY APPARATUS INCLUDING THE SAME

    公开(公告)号:US20240091822A1

    公开(公告)日:2024-03-21

    申请号:US18239503

    申请日:2023-08-29

    申请人: SEMES CO., LTD.

    摘要: Provided are a liquid chemical tank module and a liquid chemical supply apparatus, the liquid chemical tank module including a tank body having a storage space capable of storing a liquid chemical, a gas ejector for ejecting an inert gas into the liquid chemical to reduce dissolved oxygen in the liquid chemical of the tank body, and a controller for applying a control signal to the gas ejector to control a flow rate of the inert gas, wherein the gas ejector includes a gas pipe extending into the storage space and at least partially dipped in the liquid chemical to supply the inert gas from outside of the tank body into the storage space, and a plurality of ejection nozzles along the extension direction of the gas pipe to eject the inert gas into the storage space or the liquid chemical in the storage space.

    WASHING MACHINE FOR WASHING OBJECTS FOR ANIMAL STALLING

    公开(公告)号:US20230415203A1

    公开(公告)日:2023-12-28

    申请号:US18321440

    申请日:2023-05-22

    申请人: IWT SRL

    IPC分类号: B08B3/02 B08B3/10

    摘要: Washing machine for washing objects for animal stalling including a sealed washing chamber defining a containment volume and including a walkable floor and side walls. The walkable floor defines, externally to the washing chamber, a rest surface of the washing machine.
    A recirculation system includes a recirculation line and a transfer pump positioned between the walkable floor and washing devices of the washing chamber to transport, through the recirculation line, the water present in the washing chamber.
    The walkable floor defines a collection surface for the waste washing fluid and at least one of the side walls includes a suction slot delimited at the bottom by the walkable floor. The suction slot places the washing chamber and the transfer pump in fluid communication.