公开(公告)号：US12183805B2

公开(公告)日：2024-12-31

申请号：US17333676

申请日：2021-05-28

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Zhi-Qiang Wu ,  Kuo-An Liu ,  Chan-Lon Yang ,  Bharath Kumar Pulicherla ,  Li-Te Lin ,  Chung-Cheng Wu ,  Gwan-Sin Chang ,  Pinyen Lin

IPC: H01L29/66 ,  H01L21/311 ,  H01L21/3213 ,  H01L29/40 ,  H01L29/49 ,  H01L29/78

Abstract: A semiconductor device includes a substrate having a semiconductor fin. A gate structure is over the semiconductor fin, in which the gate structure has a tapered profile and comprises a gate dielectric. A work function metal layer is over the gate dielectric, and a filling metal is over the work function metal layer. A gate spacer is along a sidewall of the gate structure, in which the work function metal layer is in contact with the gate dielectric and a top portion of the gate spacer. An epitaxy structure is over the semiconductor fin.

公开(公告)号：US11145762B2

公开(公告)日：2021-10-12

申请号：US16016748

申请日：2018-06-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Huan-Sheng Wei ,  Hung-Li Chiang ,  Chia-Wen Liu ,  Yi-Ming Sheu ,  Zhiqiang Wu ,  Chung-Cheng Wu ,  Ying-Keung Leung

IPC: H01L29/78 ,  H01L29/786 ,  H01L21/02 ,  H01L21/306 ,  H01L21/311 ,  H01L29/06 ,  H01L29/08 ,  H01L29/165 ,  H01L29/423 ,  H01L29/66

Abstract: A multi-gate semiconductor device having a fin element, a gate structure over the fin element, an epitaxial source/drain feature adjacent the fin element; a dielectric spacer interposing the gate structure and the epitaxial source/drain feature.

公开(公告)号：US20190386061A1

公开(公告)日：2019-12-19

申请号：US16379901

申请日：2019-04-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Kuo-An Liu ,  Chung-Cheng Wu ,  Harry-Hak-Lay Chuang ,  Gwan-Sin Chang ,  Tien-Wei Chiang ,  Zhiqiang Wu ,  Chia-Hsiang Chen

IPC: H01L27/22 ,  H01L43/08 ,  H01L43/02

Abstract: In some embodiments, the present application provides a memory device. The memory device includes a chip that includes a magnetic random access memory (MRAM) cell. A magnetic-field-shielding structure comprised of conductive or magnetic material at least partially surrounds the chip. The magnetic-field-shielding structure comprises a sidewall region that laterally surrounds the chip, an upper region extending upward from the sidewall region, and a lower region extending downward from the sidewall region. At least one of the upper region and/or lower region terminate at an opening over the chip.

公开(公告)号：US20180337094A1

公开(公告)日：2018-11-22

申请号：US16048581

申请日：2018-07-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Hung-Li Chiang ,  Szu-Wei Huang ,  Huan-Sheng Wei ,  Jon-Hsu Ho ,  Chih Chieh Yeh ,  Wen-Hsing Hsieh ,  Chung-Cheng Wu ,  Yee-Chia Yeo

IPC: H01L21/8234 ,  H01L29/786 ,  H01L29/66 ,  H01L29/423 ,  H01L21/02 ,  H01L27/088 ,  H01L21/306 ,  H01L29/06

CPC classification number: H01L21/823412 ,  H01L21/02236 ,  H01L21/02532 ,  H01L21/02603 ,  H01L21/28123 ,  H01L21/30604 ,  H01L21/823456 ,  H01L27/088 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/4966 ,  H01L29/66545 ,  H01L29/78618 ,  H01L29/78651 ,  H01L29/78696

Abstract: A semiconductor structure includes a plurality of first semiconductor layers interleaved with a plurality of second semiconductor layers. The first and second semiconductor layers have different material compositions. A dummy gate stack is formed over an uppermost first semiconductor layer. A first etching process is performed to remove portions of the second semiconductor layer that are not disposed below the dummy gate stack, thereby forming a plurality of voids. The first etching process has an etching selectivity between the first semiconductor layer and the second semiconductor layer. Thereafter, a second etching process is performed to enlarge the voids.

公开(公告)号：US10134915B2

公开(公告)日：2018-11-20

申请号：US15615498

申请日：2017-06-06

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jean-Pierre Colinge ,  Chung-Cheng Wu ,  Carlos H. Diaz ,  Chih-Hao Wang ,  Ken-Ichi Goto ,  Ta-Pen Guo ,  Yee-Chia Yeo ,  Zhiqiang Wu ,  Yu-Ming Lin

IPC: H01L21/02 ,  H01L29/786 ,  H01L27/088 ,  H01L29/16 ,  H01L29/24 ,  H01L21/8256 ,  H01L21/8238 ,  H01L29/78

Abstract: Semiconductor structures including two-dimensional (2-D) materials and methods of manufacture thereof are described. By implementing 2-D materials in transistor gate architectures such as field-effect transistors (FETs), the semiconductor structures in accordance with this disclosure include vertical gate structures and incorporate 2-D materials such as graphene, transition metal dichalcogenides (TMDs), or phosphorene.

公开(公告)号：US10096597B1

公开(公告)日：2018-10-09

申请号：US15626204

申请日：2017-06-19

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Yu-Xuan Huang ,  Ching-Wei Tsai ,  Chih-Hao Wang ,  Chung-Cheng Wu ,  Guo-Yung Chen ,  Yi-Hsiung Lin ,  Shang-Wen Chang ,  Yi-Hsun Chiu

IPC: H01L27/088 ,  H01L21/8234

Abstract: A semiconductor device and a method for fabricating the semiconductor device are provided. The semiconductor device includes a semiconductor substrate, a gate structure including a gate dielectric layer and a first gate electrode layer, and a second gate electrode layer. In the method for fabricating the semiconductor device, at first, the semiconductor substrate is provided. The semiconductor substrate includes fin portions. Then, a gate dielectric layer is formed on the fin portions. Thereafter, a first gate electrode layer is formed on the gate dielectric layer. Then, the first gate electrode layer is etched. Thereafter, a second electrode layer is formed on the first gate electrode layer. Therefore, the gate electrode layer formed on the gate dielectric layer is regrown with easy control.

公开(公告)号：US20210296485A1

公开(公告)日：2021-09-23

申请号：US17341142

申请日：2021-06-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tzer-Min Shen ,  Zhiqiang Wu ,  Chung-Cheng Wu ,  Ching-Wei Tsai ,  Kuan-Lun Cheng ,  Chih-Hao Wang ,  Min Cao

IPC: H01L29/78 ,  H01L29/10

Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductor substrate having a first region and a second region; a first fin active region of a first semiconductor material disposed within the first region, oriented in a first direction, wherein the first fin active region has a crystalline direction along the first direction; and a second fin active region of a second semiconductor material disposed within the second region and oriented in the first direction, wherein the second fin active region has a crystalline direction along the first direction.

公开(公告)号：US11043423B2

公开(公告)日：2021-06-22

申请号：US16595007

申请日：2019-10-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Hung-Li Chiang ,  Szu-Wei Huang ,  Huan-Sheng Wei ,  Jon-Hsu Ho ,  Chih Chieh Yeh ,  Wen-Hsing Hsieh ,  Chung-Cheng Wu ,  Yee-Chia Yeo

IPC: H01L21/8234 ,  H01L29/49 ,  H01L29/786 ,  H01L21/02 ,  H01L21/306 ,  H01L27/088 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L21/28

Abstract: A semiconductor structure includes a plurality of first semiconductor layers interleaved with a plurality of second semiconductor layers. The first and second semiconductor layers have different material compositions. A dummy gate stack is formed over an uppermost first semiconductor layer. A first etching process is performed to remove portions of the second semiconductor layer that are not disposed below the dummy gate stack, thereby forming a plurality of voids. The first etching process has an etching selectivity between the first semiconductor layer and the second semiconductor layer. Thereafter, a second etching process is performed to enlarge the voids.

公开(公告)号：US11024721B2

公开(公告)日：2021-06-01

申请号：US16559369

申请日：2019-09-03

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Zhi-Qiang Wu ,  Kuo-An Liu ,  Chan-Lon Yang ,  Bharath Kumar Pulicherla ,  Li-Te Lin ,  Chung-Cheng Wu ,  Gwan-Sin Chang ,  Pinyen Lin

IPC: H01L21/311 ,  H01L29/66 ,  H01L21/3213 ,  H01L29/78 ,  H01L29/49 ,  H01L29/40

Abstract: A method includes forming a dummy gate over a substrate. A pair of gate spacers are formed on opposite sidewalls of the dummy gate. The dummy gate is removed to form a trench between the gate spacers. A first ion beam is directed to an upper portion of the trench, while leaving a lower portion of the trench substantially free from incidence of the first ion beam. The substrate is moved relative to the first ion beam during directing the first ion beam to the trench. A gate structure is formed in the trench.

公开(公告)号：US10510866B1

公开(公告)日：2019-12-17

申请号：US16007885

申请日：2018-06-13

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Kuo-An Liu ,  Chan-Lon Yang ,  Bharath Kumar Pulicherla ,  Zhi-Qiang Wu ,  Chung-Cheng Wu ,  Chih-Han Lin ,  Gwan-Sin Chang

IPC: H01L29/66 ,  H01L27/08 ,  H01L21/02 ,  H01L27/088 ,  H01L29/423 ,  H01L21/8234 ,  H01L21/3213 ,  H01L21/311

Abstract: A semiconductor structure is disclosed that includes the fin structure and the plurality of gates. The plurality of gates disposed with respect to the fin structure and including the first gate, the second gate, and the third gate. The spacing between the first gate and the second gate is smaller than the spacing between the second gate and the third gate. The second gate is disposed between the first gate and the third gate. The foot portion of the first gate, facing the second gate, and the first foot portion of the second gate, facing the first gate, have no lateral extension. The second foot portion of the second gate, facing the third gate, and the foot portion of the third gate, facing the second gate, have no lateral extension and/or cut.