-
公开(公告)号：US11594670B2
公开(公告)日：2023-02-28
申请号：US16823449
申请日：2020-03-19
发明人： Chikara Kojima , Eiji Osawa , Koji Ohashi , Kanechika Kiyose , Tomohiro Sayama , Hironori Suzuki , Katsuhiro Imai , Yasuyuki Matsumoto , Takahiro Kamijo
摘要： An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.
-
公开(公告)号：US11233188B2
公开(公告)日：2022-01-25
申请号：US16366296
申请日：2019-03-27
发明人： Koji Ohashi , Chikara Kojima
IPC分类号： G01N29/24 , H01L41/113 , H01L41/047 , B06B1/02 , H01L41/04
摘要： An ultrasonic wave sensor includes an oscillating plate including a plurality of oscillators, a wall portion provided on the oscillating plate and surrounding the oscillator, a first piezoelectric element provided in the predetermined number of oscillators among the plurality of oscillators, and a second piezoelectric element provided in the oscillator where the first piezoelectric element is not provided. An input and an output of a drive signal are possible to the first piezoelectric element, and the first piezoelectric element is connected to at least another first piezoelectric element in parallel. The second piezoelectric element is electrically insulated from the first piezoelectric element. The second piezoelectric element is disposed between the first piezoelectric elements adjacent in one direction.
-
公开(公告)号：US10818834B2
公开(公告)日：2020-10-27
申请号：US15674950
申请日：2017-08-11
发明人： Hironori Suzuki , Hiroshi Matsuda , Koji Ohashi
IPC分类号： H01L41/311 , H01L41/053 , B06B1/06 , B06B1/02 , H01L41/047 , H01L41/09 , H01L41/04
摘要： A mounting structure includes a first substrate which has a first surface on which a functional element is provided, a second substrate that has a second surface facing the first surface, a wiring portion that is provided at a position which is different from a position of the functional element on the first surface, has a third surface facing the second surface, and is electrically connected to the functional element, and a conduction portion that is provided on the second surface, protrudes toward the first surface, and is connected to the third surface so as to be electrically connected to the functional element, in which an area of the third surface is larger than an area of a first end section of the wiring portion on the first substrate side in a plan view which is viewed from a thickness direction of the first substrate and the second substrate.
-
公开(公告)号：US10319897B2
公开(公告)日：2019-06-11
申请号：US15078098
申请日：2016-03-23
发明人： Koji Ohashi
IPC分类号： H01L41/113 , B06B1/06 , H01L41/08 , H01L41/314 , H01L41/33
摘要： An ultrasonic sensor includes: when two orthogonal axes are referred to as an X axis and a Y axis and a plane formed by the X axis and the Y axis is referred to as an XY plane, a substrate disposed across the XY plane; a plurality of spaces formed in the substrate in at least one direction of an X-axis direction and a Y-axis direction; a vibrating plate that is provided on the substrate such that the spaces are closed and that has a first surface on the substrate side and a second surface facing the first surface; and a piezoelectric element that is provided at a portion on the second surface side of the vibrating plate that corresponds to the space, and that transmits/receives an ultrasonic wave. At least some of the spaces are arranged to form a zigzag shape.
-
公开(公告)号：US10203404B2
公开(公告)日：2019-02-12
申请号：US15076999
申请日：2016-03-22
发明人： Koji Ohashi , Chikara Kojima , Hikaru Iwai
摘要： An ultrasonic sensor includes: a substrate disposed across an XY plane; a plurality of spaces formed in the substrate in at least one direction of an X-axis direction and a Y-axis direction; a vibrating plate that is provided on the substrate such that the spaces are enclosed and that has a first surface on the substrate side and a second surface facing the first surface; a piezoelectric element that is provided at a portion on the second surface side of the vibrating plate that corresponds to the space and that transmits and/or receives an ultrasonic wave; a surrounding plate that is provided on the second surface side of the vibrating plate and surrounds a peripheral region of the piezoelectric element; and a support member provided at a position, at which the support member is not overlapped with the piezoelectric element, between a surface of the surrounding plate on the piezoelectric element side and the second surface of the vibrating plate.
-
6.发明授权公开(公告)号：US09772314B2
公开(公告)日：2017-09-26
申请号：US14573011
申请日：2014-12-17
发明人： Chikara Kojima , Koji Ohashi
CPC分类号： G01N29/2437 , B06B1/0674 , G01L9/08 , G01N29/221 , G01N2291/02872 , G10K11/28
摘要： An ultrasonic sensor which includes a substrate where an opening section is formed, a vibration plate that is provided on the substrate so as to close the opening section, and a piezoelectric element that is layered on a surface of the vibration plate on an opposite side to the opening section and includes a first electrode, a piezoelectric element, and a second electrode, includes a reflection layer that is provided in a space around the piezoelectric element on the surface of the vibration plate on an opposite side to the opening section, to reflect other ultrasonic waves which are transmitted in a different direction from a transmitted ultrasonic wave transmitted to a measuring target side on an interface between the piezoelectric element and the reflection layer, and has a thickness so as to superimpose other ultrasonic waves on the transmitted ultrasonic wave.
-
公开(公告)号：US11858000B2
公开(公告)日：2024-01-02
申请号：US17248290
申请日：2021-01-19
发明人： Chikara Kojima , Koji Ohashi , Tomohiro Sayama , Seiji Izuo , Kanechika Kiyose
IPC分类号： B06B1/06
CPC分类号： B06B1/0622
摘要： Provided is an ultrasonic device including a substrate and a vibration plate provided on the substrate and having one or more vibrators configured to generate an ultrasonic wave by vibration. The vibration plate has a movable portion provided with the vibrator and configured to vibrate accompanying with the vibration of the vibrator, and a fixed portion fixed to the substrate. A vibration frequency of a reflected wave based on a wave transmitted from the movable portion and received by the movable portion is outside a vibration frequency band region of the vibrator.
-
公开(公告)号：US11800809B2
公开(公告)日：2023-10-24
申请号：US17183631
申请日：2021-02-24
发明人： Koji Ohashi
IPC分类号： H01L41/047 , H10N30/87 , B06B1/02 , B41J2/14 , A61B8/14 , A61B8/00 , B06B1/06 , B41J2/16 , A61B8/08 , A61B8/06 , H10N30/077 , H10N30/082 , H10N30/80 , H10N30/20 , G01N29/24 , H10N30/853
CPC分类号： H10N30/875 , A61B8/06 , A61B8/085 , A61B8/145 , A61B8/4281 , A61B8/4427 , A61B8/4444 , A61B8/4488 , A61B8/4494 , B06B1/0207 , B06B1/0622 , B06B1/0666 , B41J2/14233 , B41J2/14274 , B41J2/161 , B41J2/1628 , H10N30/077 , H10N30/082 , H10N30/2047 , H10N30/802 , H10N30/87 , B06B2201/76 , G01N29/2437 , H10N30/8554 , H10N30/877
摘要： A piezoelectric element includes a first electrode layer, a piezoelectric layer, and a second electrode layer. The first electrode layer, the piezoelectric layer, and the second electrode layer are stacked in sequence on one another. The first electrode layer has a first part overlapping the piezoelectric layer in a plan view, and a second part at least partially separated from the first part and not overlapping the piezoelectric layer in the plan view. The second electrode layer has a third part overlapping the piezoelectric layer in the plan view, and a fourth part separated from the third part. The fourth part is in contact with the first part and the second part.
-
公开(公告)号：US11690594B2
公开(公告)日：2023-07-04
申请号：US17454879
申请日：2021-11-15
发明人： Chikara Kojima , Koji Ohashi , Makoto Furuhata
CPC分类号： A61B8/4427 , A61B8/4483 , A61B8/4488 , A61B8/4494 , G01N29/2437 , H10N30/2047
摘要： A piezoelectric actuator includes: a vibrating plate including a first surface configured to close an opening provided in a substrate and also including a second surface including a plurality of piezoelectric elements; a suppressing portion configured to suppress vibration of the vibrating plate; and a plurality of walls sticking out into the opening from the first surface, in which, when an active portion of a piezoelectric element is set as a portion where a first electrode, a piezoelectric layer, and a second electrode overlap, the walls are provided between adjacent active portions in plan view from a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and a distance between adjacent walls is longer than a distance between adjacent active portions in a plane perpendicular to the stacking direction.
-
公开(公告)号：US11594671B2
公开(公告)日：2023-02-28
申请号：US16681980
申请日：2019-11-13
发明人： Koji Ohashi , Hironori Suzuki , Chikara Kojima
IPC分类号： H01L41/113 , B06B1/06 , H04R17/00 , G01H11/08 , G01S15/08 , G01S15/42 , G01S3/808 , H02N2/00
摘要： An ultrasonic device according to an aspect of the present disclosure includes a substrate in which an opening section piercing through the substrate in a thickness direction is provided, a vibration plate provided on the substrate to close the opening section, a piezoelectric element provided in a position corresponding to the opening section on a first surface at the opposite side of the substrate side of the vibration plate, and an elastic layer provided in contact with a second surface at the substrate side of the vibration plate at the inner side of the opening section of the substrate. The elastic layer includes a curved surface recessed to the vibration plate side at the opposite side of the vibration plate side.
-
-
-
-
-
-
-
-
-
搜索结果
37 条记录 (耗时 0.021 秒)
