- 专利标题: Ultrasonic wave sensor and ultrasonic wave device
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申请号: US16366296申请日: 2019-03-27
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公开(公告)号: US11233188B2公开(公告)日: 2022-01-25
- 发明人: Koji Ohashi , Chikara Kojima
- 申请人: Seiko Epson Corporation
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JPJP2018-061550 20180328
- 主分类号: G01N29/24
- IPC分类号: G01N29/24 ; H01L41/113 ; H01L41/047 ; B06B1/02 ; H01L41/04
摘要:
An ultrasonic wave sensor includes an oscillating plate including a plurality of oscillators, a wall portion provided on the oscillating plate and surrounding the oscillator, a first piezoelectric element provided in the predetermined number of oscillators among the plurality of oscillators, and a second piezoelectric element provided in the oscillator where the first piezoelectric element is not provided. An input and an output of a drive signal are possible to the first piezoelectric element, and the first piezoelectric element is connected to at least another first piezoelectric element in parallel. The second piezoelectric element is electrically insulated from the first piezoelectric element. The second piezoelectric element is disposed between the first piezoelectric elements adjacent in one direction.
公开/授权文献
- US20190305208A1 Ultrasonic Wave Sensor And Ultrasonic Wave Device 公开/授权日:2019-10-03
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