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公开(公告)号：US11884558B2
公开(公告)日：2024-01-30
申请号：US17500264
申请日：2021-10-13
IPC分类号： C02F1/36 , B01D21/28 , C02F103/00 , C02F101/30
CPC分类号： C02F1/36 , B01D21/283 , C02F2101/30 , C02F2103/002
摘要： A fluid device includes: a flow main body including a side wall along a first axis and configured to flow a fluid from an inflow portion provided at one side of the first axis toward an outflow portion provided at the other side of the first axis; a plate provided at the other side of the first axis of the flow main body and having a first surface intersecting the first axis; a standing wall extending along the first axis from the first surface toward the one side of the first axis and having a length along the first axis shorter than the side wall; and an ultrasonic element disposed at an outer side of a collection region of the plate and configured to transmit an ultrasonic wave along the first axis when the standing wall and a region surrounded by the standing wall on the first surface are defined as the collection region.
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公开(公告)号：US11872592B2
公开(公告)日：2024-01-16
申请号：US16824830
申请日：2020-03-20
发明人： Chikara Kojima , Koji Ohashi , Eiji Osawa
CPC分类号： B06B1/0666 , B06B1/0215 , B06B3/00
摘要： An ultrasonic device includes a base material that has an opening, a vibration plate that is provided on the base material and closes the opening, and a piezoelectric element that is provided on the vibration plate, in which the vibration plate has a first layer provided on the base material, and a second layer that is disposed between the first layer and the piezoelectric element and that suppresses diffusion of a component contained in the piezoelectric element, and a bending rigidity of the second layer is equal to or larger than a bending rigidity of the first layer.
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公开(公告)号：US11453030B2
公开(公告)日：2022-09-27
申请号：US16690595
申请日：2019-11-21
发明人： Chikara Kojima , Koji Ohashi , Hironori Suzuki
摘要： An ultrasonic sensor includes an opening portion, vibrating plate covering the opening portion, piezoelectric element overlapping with the opening portion, and a coupling electrode coupled to the piezoelectric element, extended from a position overlapping the opening portion to a position not overlapping the opening portion, and having a line width smaller than a width of the piezoelectric element. The piezoelectric has a first and second line portion, and a corner portion coupling the first and second line portions, when an intersection point connects a center of gravity of the piezoelectric and the corner portion with a virtual circle inscribed in the outline of the piezoelectric is a first intersection point of a tangent line. The first intersection point with the first and second line portions are a second and third intersection points, the coupling electrode coupled to a corner portion from the second intersection point to the third intersection point.
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公开(公告)号：US11437564B2
公开(公告)日：2022-09-06
申请号：US16817754
申请日：2020-03-13
发明人： Chikara Kojima , Koji Ohashi , Hironori Suzuki
IPC分类号： H01L41/113 , H01L41/053 , H01L41/047
摘要： An ultrasonic device includes a base member including a first surface and a second surface different from the first surface, a vibration plate provided at the first surface of the base member, and a piezoelectric element provided at the vibration plate. The base member includes a hole formed from the first surface to the second surface, and a wall portion surrounding the hole. The vibration plate includes, when viewed in a direction from the first surface toward the second surface, a supporting portion overlapping the wall portion, and a blocking portion that overlaps the hole and blocks the hole. The piezoelectric element is laminated at the blocking portion. The supporting portion has a first Young's modulus. The blocking portion includes a first blocking portion having the first Young's modulus and a second blocking portion having a second Young's modulus smaller than the first Young's modulus.
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公开(公告)号：US20210402435A1
公开(公告)日：2021-12-30
申请号：US17356102
申请日：2021-06-23
发明人： Chikara Kojima
摘要： An ultrasonic device includes a substrate, a transmitter provided at the substrate and configured to transmit an ultrasonic wave to an object, and a receiver provided at a position different from the transmitter at the substrate and configured to receive an ultrasonic wave reflected by the object. A resonance frequency of the transmitter is higher than a resonance frequency of the receiver. An anti-resonance frequency of the receiver is included in a predetermined frequency band including the resonance frequency of the transmitter.
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公开(公告)号：US11085816B2
公开(公告)日：2021-08-10
申请号：US16366174
申请日：2019-03-27
发明人： Koji Ohashi , Chikara Kojima
IPC分类号： G01H11/08
摘要： An ultrasonic wave sensor includes an oscillating plate including a plurality of oscillators, a wall portion provided on the oscillating plate and surrounding the oscillator, and a piezoelectric element provided on each of the plurality of oscillators. In the oscillating plate, a plurality of piezoelectric elements are electrically connected in plan view as viewed from a thickness direction, and a first area where an input and an output of a drive signal to the piezoelectric element are possible and a second area which is provided on an outer side of the first area and where the piezoelectric element is electrically insulated from the piezoelectric element disposed in the first area are included. In the second area, a distance between the adjacent oscillators is reduced as separated from the first area.
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公开(公告)号：US10722214B2
公开(公告)日：2020-07-28
申请号：US15850799
申请日：2017-12-21
发明人： Eiji Osawa , Chikara Kojima
摘要： An ultrasonic device includes a substrate that is provided with an opening and a partition wall surrounding the opening, a vibration portion that closes one end side of the opening, and a piezoelectric element that is provided in the vibration portion, in which, in a case where an opening width dimension of the opening is indicated by W, and a thickness dimension of the substrate is indicated by H, a ratio W/H is 0.66 to 0.92.
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8.发明授权公开(公告)号：US10161916B2
公开(公告)日：2018-12-25
申请号：US15683296
申请日：2017-08-22
发明人： Chikara Kojima , Koji Ohashi
摘要： An ultrasonic sensor which includes a substrate where an opening section is formed, a vibration plate that is provided on the substrate so as to close the opening section, and a piezoelectric element that is layered on a surface of the vibration plate on an opposite side to the opening section and includes a first electrode, a piezoelectric element, and a second electrode, includes a reflection layer that is provided in a space around the piezoelectric element on the surface of the vibration plate on an opposite side to the opening section, to reflect other ultrasonic waves which are transmitted in a different direction from a transmitted ultrasonic wave transmitted to a measuring target side on an interface between the piezoelectric element and the reflection layer, and has a thickness so as to superimpose other ultrasonic waves on the transmitted ultrasonic wave.
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公开(公告)号：US12083558B2
公开(公告)日：2024-09-10
申请号：US17106433
申请日：2020-11-30
发明人： Chikara Kojima
IPC分类号： B06B1/06
CPC分类号： B06B1/0629
摘要： An ultrasonic device includes a substrate having a plurality of opening parts and a wall, a vibrating plate closing the opening parts, and vibrators provided to the vibrating plate, wherein the plurality of opening parts includes a first opening part, a second opening part adjacent to the first opening part via a first wall, and a third opening part adjacent to the first opening part via a second wall, a first vibrating section closing the first opening part and the vibrator constitute a first ultrasonic transmitter, a second vibrating section closing the second opening part and the vibrator constitute an ultrasonic receiver, a third vibrating section closing the third opening part and the vibrator constitute a second ultrasonic transmitter, and the wall width of the first wall is larger than the wall width of the second wall.
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公开(公告)号：US11594670B2
公开(公告)日：2023-02-28
申请号：US16823449
申请日：2020-03-19
发明人： Chikara Kojima , Eiji Osawa , Koji Ohashi , Kanechika Kiyose , Tomohiro Sayama , Hironori Suzuki , Katsuhiro Imai , Yasuyuki Matsumoto , Takahiro Kamijo
摘要： An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.
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