Invention Grant
- Patent Title: Piezoelectric actuator, ultrasonic element, ultrasonic probe, ultrasonic device, and electronic device
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Application No.: US17454879Application Date: 2021-11-15
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Publication No.: US11690594B2Publication Date: 2023-07-04
- Inventor: Chikara Kojima , Koji Ohashi , Makoto Furuhata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 20190124 2020.11.16
- Main IPC: A61B8/00
- IPC: A61B8/00 ; G01N29/24 ; H10N30/20

Abstract:
A piezoelectric actuator includes: a vibrating plate including a first surface configured to close an opening provided in a substrate and also including a second surface including a plurality of piezoelectric elements; a suppressing portion configured to suppress vibration of the vibrating plate; and a plurality of walls sticking out into the opening from the first surface, in which, when an active portion of a piezoelectric element is set as a portion where a first electrode, a piezoelectric layer, and a second electrode overlap, the walls are provided between adjacent active portions in plan view from a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and a distance between adjacent walls is longer than a distance between adjacent active portions in a plane perpendicular to the stacking direction.
Public/Granted literature
- US20220151590A1 Piezoelectric Actuator, Ultrasonic Element, Ultrasonic Probe, Ultrasonic Device, and Electronic Device Public/Granted day:2022-05-19
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