- 专利标题: Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor
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申请号: US14573011申请日: 2014-12-17
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公开(公告)号: US09772314B2公开(公告)日: 2017-09-26
- 发明人: Chikara Kojima , Koji Ohashi
- 申请人: Seiko Epson Corporation
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2013-261849 20131218; JP2014-233351 20141118; JP2014-249384 20141209
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; G01L9/08 ; G01N29/22 ; G01K11/28 ; G01N29/24 ; G10K11/28
摘要:
An ultrasonic sensor which includes a substrate where an opening section is formed, a vibration plate that is provided on the substrate so as to close the opening section, and a piezoelectric element that is layered on a surface of the vibration plate on an opposite side to the opening section and includes a first electrode, a piezoelectric element, and a second electrode, includes a reflection layer that is provided in a space around the piezoelectric element on the surface of the vibration plate on an opposite side to the opening section, to reflect other ultrasonic waves which are transmitted in a different direction from a transmitted ultrasonic wave transmitted to a measuring target side on an interface between the piezoelectric element and the reflection layer, and has a thickness so as to superimpose other ultrasonic waves on the transmitted ultrasonic wave.
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