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公开(公告)号:US20230180641A1
公开(公告)日:2023-06-08
申请号:US18071740
申请日:2022-11-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Zhe WU , Taeguen KIM , Jeonghee PARK , Taehyeong KIM , Minji YU
CPC classification number: H01L45/06 , H01L45/1226 , H01L27/2472 , G11C13/0011 , G11C13/0026 , G11C13/0028
Abstract: A variable resistance memory device includes a substrate, a first conductive line on the substrate, the first conductive line extending in a first horizontal direction, a second conductive line extending on the first conductive line in a second horizontal direction perpendicular to the first horizontal direction, and a memory cell at an intersection between the first conductive line and the second conductive line, the memory cell having a selection element layer, an intermediate electrode layer, and a variable resistance layer, and the variable resistance layer having a shape of stairs with a concave center.
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公开(公告)号:US20170250222A1
公开(公告)日:2017-08-31
申请号:US15294873
申请日:2016-10-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Zhe WU , Soon-Oh PARK , Jeong-HEE PARK , Dong-Ho AHN , Hideki HORII
CPC classification number: H01L45/144 , H01L27/2409 , H01L27/2427 , H01L27/2463 , H01L27/2481 , H01L45/04 , H01L45/06 , H01L45/1233 , H01L45/1253 , H01L45/1675 , H01L45/1683
Abstract: A variable resistance memory device including a selection pattern; an intermediate electrode contacting a first surface of the selection pattern; a variable resistance pattern on an opposite side of the intermediate electrode relative to the selection pattern; and a first electrode contacting a second surface of the selection pattern and including a n-type semiconductor material, the second surface of the selection pattern being opposite the first surface thereof.
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公开(公告)号:US20220406844A1
公开(公告)日:2022-12-22
申请号:US17568866
申请日:2022-01-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Chungman KIM , Bonwon KOO , Dongho AHN , Kiyeon YANG , Zhe WU , Chang Seung LEE
Abstract: A resistive memory device including a resistive memory pattern; and a selection element pattern electrically connected to the resistive memory pattern, the selection element pattern including a chalcogenide switching material and at least one metallic material, the chalcogenide switching material including germanium, arsenic, and selenium, and the at least one metallic material including aluminum, strontium, or indium, wherein the selection element pattern includes an inhomogeneous material layer in which content of the at least one metallic material in the selection element pattern is variable according to a position within the selection element pattern.
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公开(公告)号:US20180040669A1
公开(公告)日:2018-02-08
申请号:US15485594
申请日:2017-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Zhe WU , Jeong Hee PARK , Dong Ho AHN , Jin Woo LEE , Hee Ju SHIN , Ja Bin LEE
CPC classification number: H01L27/2427 , H01L23/528 , H01L27/224 , H01L27/2481 , H01L43/02 , H01L43/08 , H01L43/10 , H01L45/06 , H01L45/08 , H01L45/1233 , H01L45/1246 , H01L45/1253 , H01L45/143 , H01L45/144 , H01L45/146 , H01L45/148
Abstract: There is provided a non-volatile memory device which can enhance the reliability of a memory device by using an ovonic threshold switch (OTS) selection element including a multilayer structure. The non-volatile memory device includes a first electrode and a second electrode spaced apart from each other, a selection element layer between the first electrode and the second electrode, which is closer to the second electrode rather than to the first electrode, and which includes a first chalcogenide layer, a second chalcogenide layer, and a material layer disposed between the first and second chalcogenide layers. The first chalcogenide layer including a first chalcogenide material, and the second chalcogenide layer including a second chalcogenide material. A memory layer between the first electrode and the selection element layer includes a third chalcogenide material which is different from the first and second chalcogenide materials.
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公开(公告)号:US20180019392A1
公开(公告)日:2018-01-18
申请号:US15451961
申请日:2017-03-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jinwoo LEE , Jeonghee PARK , Dongho AHN , Zhe WU , Heeju SHIN , Ja bin LEE
CPC classification number: H01L45/141 , H01L43/08 , H01L43/10 , H01L45/06 , H01L45/1233 , H01L45/1253 , H01L45/145 , H01L45/16
Abstract: A semiconductor memory device including first lines and second lines overlapping and intersecting each other, variable resistance memory elements disposed at intersections between the first lines and the second lines, and switching elements disposed between the variable resistance memory elements and the first lines. At least one of the switching elements includes first and second chalcogenide compound layers, and conductive nano-dots disposed between the first and second chalcogenide compound layers.
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公开(公告)号:US20200227475A1
公开(公告)日:2020-07-16
申请号:US16567094
申请日:2019-09-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jeonghee PARK , Dongho AHN , Changyup PARK , Zhe WU
Abstract: A variable resistance memory device including insulating patterns sequentially stacked on a substrate; first conductive lines between adjacent ones of the insulating patterns and spaced apart from each other in a first direction; a second conductive line between the first conductive lines and penetrating the insulating patterns in a third direction perpendicular to a top surface of the substrate; a phase-change pattern between the second conductive line and each of the first conductive lines and between the adjacent ones of the insulating patterns to cover a top surface of a first adjacent insulating pattern and a bottom surface of a second adjacent insulating pattern; and a selection element between the phase-change pattern and the second conductive line and between the adjacent ones of the insulating patterns to cover the top surface of the first adjacent insulating pattern and the bottom surface of the second adjacent insulating pattern.
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公开(公告)号:US20220069011A1
公开(公告)日:2022-03-03
申请号:US17209660
申请日:2021-03-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dongho AHN , Segab KWON , Chungman KIM , Kwangmin PARK , Zhe WU , Seunggeun YU , Wonjun LEE , Jabin LEE , Jinwoo LEE
Abstract: A semiconductor device includes a semiconductor substrate, a peripheral device on the semiconductor substrate, a lower insulating structure on the semiconductor substrate and covering the peripheral device, a first conductive line on the lower insulating structure, a memory cell structure on the first conductive line, and a second conductive line on the memory cell structure. The memory cell structure may include an information storage material pattern and a selector material pattern on the lower insulating structure in a vertical direction. The selector material pattern may include a first selector material layer including a first material and a second selector material layer including a second material. The second selector material layer may have a threshold voltage drift higher than that of the first material. The second selector material layer may have a second width narrower than a first width of the first selector material layer.
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公开(公告)号:US20200152264A1
公开(公告)日:2020-05-14
申请号:US16530517
申请日:2019-08-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Zhe WU , Ja Bin LEE , Jin Woo LEE , Kyu Bong JUNG
Abstract: A memory device includes a word line, a bit line intersecting the word line, and a memory cell at an intersection of the word line and the bit line. The memory cell includes a first electrode connected to the word line; a second electrode connected to the bit line; and a selective element layer between the first electrode and the second electrode. The selective element layer includes one of Ge—Se—Te, Ge—Se—Te—As, and Ge—Se—Te—As—Si, and a composition ratio of arsenic (As) component of each of the Ge—Se—Te—As and the Ge—Se—Te—As—Si being greater than 0.01 and less than 0.17.
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公开(公告)号:US20250006636A1
公开(公告)日:2025-01-02
申请号:US18651142
申请日:2024-04-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Gwang Guk AN , Jun Ho SONG , Zhe WU , So Yeon CHOI
IPC: H01L23/528 , H10B63/00 , H10N70/00
Abstract: A semiconductor memory device comprising: a substrate extending in a first direction and a second direction; first conductive lines extending in the first direction on the substrate; first insulating structures that are alternately arranged with the first conductive lines in the second direction, wherein the first insulating structures extend in a third direction intersecting the first direction and the second direction; first information storage films on the first conductive lines and the first insulating structures; and second conductive lines extending in the second direction on the first information storage films, wherein the first information storage films include first regions that overlap the first conductive lines in the third direction and second regions that overlap the first insulating structures in the third direction, and a first height of upper surfaces of the first regions is different from a second height of upper surfaces of the second regions.
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公开(公告)号:US20240324246A1
公开(公告)日:2024-09-26
申请号:US18594355
申请日:2024-03-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiyeon YANG , Donggeon GU , Bonwon KOO , Jeonghee PARK , Hajun SUNG , Dongho AHN , Zhe WU , Changseung LEE , Minwoo CHOI
CPC classification number: H10B63/24 , H10B63/84 , H10N70/841 , H10N70/8825 , H10N70/8828
Abstract: Provided are a self-selecting memory device having polarity dependent threshold voltage shift characteristics and/or a memory apparatus including the self-selecting memory device. The memory device includes a first electrode, a second electrode apart from and facing the first electrode, and a memory layer between the first electrode and the second electrode. The memory layer has Ovonic threshold switching characteristics and is configured to have a threshold voltage of the memory layer be changed as a density of active traps in the memory layer is changed, the threshold voltage changing according to the polarity and the intensity of a bias voltage applied to the memory layer. Furthermore, an element composition distribution is configured to be maintained constant in the memory layer in response to the threshold voltage of the memory layer changing.
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