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公开(公告)号:US20210040616A1
公开(公告)日:2021-02-11
申请号:US16891177
申请日:2020-06-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Junghwan PARK , Younghyun KIM , Sechung OH , Jungmin LEE , Kyungil HONG
IPC: C23C16/455 , B05B1/18 , C23C16/458 , C23C16/06 , H01L27/22 , H01L43/02 , H01L43/12
Abstract: A shower head for a substrate treating apparatus and a substrate treating apparatus including the shower head, the shower head including a central head at a central portion of the shower head, the central head having a plurality of central holes through which a first injection gas is injectable; and a peripheral head at a peripheral portion of the shower head to enclose the central head, the peripheral head having a plurality of peripheral holes through which a second injection gas is injectable, wherein a total hole area of the peripheral holes is smaller than a total hole area of the central holes.
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公开(公告)号:US20230189524A1
公开(公告)日:2023-06-15
申请号:US17884853
申请日:2022-08-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Min Gu KANG , Sang Don ZOO , Joon Sung KIM , Junghwan PARK , Seorim MOON , Seok Cheon BAEK , Cheol RYOU , Sun Young LEE , Cheol-Min LIM
IPC: H01L27/11582 , H01L23/535
CPC classification number: H01L27/11582 , H01L23/535
Abstract: A semiconductor memory device may include a substrate including a first and a second block region, and a stacked structure including insulating films and gate electrodes alternately stacked on the substrate. A vertical channel structure, a word line cut structure, and a block cut structure may penetrate the stacked structure. The word line cut structure may extend in a second direction. The block cut structure may extend in a first direction, connect to the word line cut structure, and define the first and second block regions. The block cut structure may include a first portion connected to the word line cut structure and a second portion connected to the first portion. From a planar viewpoint, the first portion may include at least a part not overlapping the second portion in the first direction and at least a region not overlapping the word line cut structure in the first direction.
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公开(公告)号:US20230186963A1
公开(公告)日:2023-06-15
申请号:US17970788
申请日:2022-10-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Younghyun KIM , Sechung OH , Heeju SHIN , Jaehoon KIM , Sanghwan PARK , Junghwan PARK
CPC classification number: G11C11/1673 , G11C11/1653 , H01L27/228 , H01L43/02 , H01L43/08 , H01L43/10
Abstract: A magnetoresistive random access memory device includes a pinned layer; a tunnel barrier layer on the pinned layer; a free layer structure on the tunnel barrier layer, the free layer structure including a plurality of magnetic layers and a plurality of metal insertion layers between the magnetic layers; and an upper oxide layer on the free layer structure, wherein each of the metal insertion layers includes a non-magnetic metal material doped with a magnetic material, and the metal insertion layers are spaced apart from each other.
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公开(公告)号:US20220068318A1
公开(公告)日:2022-03-03
申请号:US17215914
申请日:2021-03-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sangyun KIM , Kyungryun KIM , Junghwan PARK , Yeonkyu CHOI
Abstract: A memory device includes: a first circuit; a second circuit; and an adaptive body bias generator configured to receive frequency detection information or temperature detection information, to apply a first forward body bias or a first reverse body bias to the first circuit in response to the frequency detection information or the temperature detection information, and to apply a second forward body bias or a second reverse body bias to the second circuit in response to the frequency detection information or the temperature detection information.
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公开(公告)号:US20240090338A1
公开(公告)日:2024-03-14
申请号:US18308401
申请日:2023-04-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyungil HONG , Junghwan PARK , Gyuwon KIM , Yeonho CHOI
Abstract: A magnetic memory device may include a substrate, an data storage pattern disposed on the substrate, and a lower contact plug between the substrate and the data storage pattern, the lower contact plug may include a lower insulating pattern, a lower contact pattern on the lower insulating pattern, and a lower barrier pattern extending along a lower surface and a side surface of the lower insulating pattern and a side surface of the lower contact pattern.
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公开(公告)号:US20230216187A1
公开(公告)日:2023-07-06
申请号:US18120921
申请日:2023-03-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jangsun YOO , Kyungjae KIM , Minseok KIM , Junghwan PARK , Yongjoo SHIN , Myeonggil LEE , Gwanghyun JO , Gun LIM
CPC classification number: H01Q1/48 , H01Q1/2266 , H01Q5/307 , H01Q9/0457
Abstract: According to an embodiment, an electronic device includes a housing including a first surface and a second surface opposite to the first surface, and an antenna including a printed circuit board (PCB) positioned between the first surface and the second surface. The PCB includes a feed pattern including a first connector region, and a ground pattern including a first ground region in contact with a first portion of the first surface, a first coupling region connected to the first ground region, a second ground region connected to the first coupling region and including a second connector region, and a second coupling region connected to the second ground region and in contact with a second portion different from the first portion of the first surface.
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公开(公告)号:US20230005955A1
公开(公告)日:2023-01-05
申请号:US17742043
申请日:2022-05-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sanghun CHUN , Kwangyoung JUNG , Youngji NOH , Junghwan PARK , Jeehoon HAN
IPC: H01L27/11582 , H01L27/11556 , H01L27/11519 , H01L27/11524 , H01L27/1157 , H01L27/11565
Abstract: A semiconductor device includes a substrate, gate electrodes stacked and spaced apart from each other in a first direction perpendicular to an upper surface of the substrate, channel structures penetrating the gate electrodes, extending in the first direction, and each including a channel layer, separation regions penetrating the gate electrodes, extending in the first direction and a second direction perpendicular to the first direction, and spaced apart from each other in a third direction perpendicular to the first direction and the second direction, and crack prevention layers disposed on at least a portion of the separation regions, wherein each of the separation regions includes a lower region and upper regions spaced apart from each other in the second direction on the lower region and protruding upwardly from the lower region, and wherein the crack prevention layers are in contact with upper surfaces of the upper regions.
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公开(公告)号:US20210043828A1
公开(公告)日:2021-02-11
申请号:US16793336
申请日:2020-02-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyungil HONG , Younghyun KIM , Junghwan PARK , Sechung OH , Jungmin LEE
Abstract: A semiconductor device includes a plurality of magnetic tunnel junction (MTJ) structures in an interlayer insulating layer on a substrate. A blocking layer is on the interlayer insulating layer and the plurality of MTJ structures. An upper insulating layer is on the blocking layer. An upper interconnection is on the upper insulating layer. An upper plug is connected to the upper interconnection and a corresponding one of the plurality of MTJ structures and extends into the upper insulating layer and the blocking layer. The blocking layer includes a material having a higher absorbance constant than the upper insulating layer.
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公开(公告)号:US20200312852A1
公开(公告)日:2020-10-01
申请号:US16902338
申请日:2020-06-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Ho-In RYU , Taiheui CHO , Keunnam KIM , Kyehee YEOM , Junghwan PARK , Hyeon-Woo JANG
IPC: H01L27/105 , H01L27/108 , H01L29/423
Abstract: A semiconductor device includes a substrate including a cell region and a peripheral region, a cell gate electrode buried in a groove crossing a cell active portion of the cell region, a cell line pattern crossing over the cell gate electrode, the cell line pattern being connected to a first source/drain region in the cell active portion at a side of the cell gate electrode, a peripheral gate pattern crossing over a peripheral active portion of the peripheral region, a planarized interlayer insulating layer on the substrate around the peripheral gate pattern, and a capping insulating layer on the planarized interlayer insulating layer and a top surface of the peripheral gate pattern, the capping insulating layer including an insulating material having an etch selectivity with respect to the planarized interlayer insulating layer.
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公开(公告)号:US20220254994A1
公开(公告)日:2022-08-11
申请号:US17466246
申请日:2021-09-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyungil HONG , Jungmin LEE , Younghyun KIM , Junghwan PARK , Heeju SHIN , Se Chung OH
Abstract: A method of fabricating a magnetic memory device comprises forming, on a substrate, a data storage structure including a bottom electrode, a magnetic tunnel junction pattern, and a top electrode, forming a first capping dielectric layer conformally covering lateral and top surfaces of the data storage structure, and forming a second capping dielectric layer on the first capping dielectric layer. The forming the first capping dielectric layer is performed by PECVD in which a first source gas, a first reaction gas, and a first purging gas are supplied. The forming the second capping dielectric layer Is performed by PECVD in which a second source gas, a second reaction gas, and a second purging gas are supplied. The first and second reaction gases are different from each other. The first and second purging gases are different from each other.
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