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公开(公告)号：US11499232B2
公开(公告)日：2022-11-15
申请号：US16122755
申请日：2018-09-05
发明人： Choelmin Jang , Sunghun Key , Junggon Kim , Myungsoo Huh
IPC分类号： C23C16/54 , C23C16/455 , H01J37/32
摘要： A deposition apparatus and method of deposition are provided. The deposition apparatus includes a gas supply unit, including: a first process gas supply unit blowing a first process gas onto a deposition-target surface; a second process gas supply unit blowing a second process gas different from the first process gas onto the deposition-target surface of the substrate; and air curtain units blocking an area between an area where the process gas is blown and an area where the second process gas is blown, by blowing an inert gas.
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公开(公告)号：US10043998B2
公开(公告)日：2018-08-07
申请号：US15442095
申请日：2017-02-24
发明人： Myungsoo Huh , Sungmin Cho , Dongkyun Ko , Sungchul Kim , Inkyo Kim , Cheollae Roh , Sangjoon Seo , Seungwoo Seo , Choelmin Jang
IPC分类号： H01L51/50 , H01L51/52 , C23C16/455 , H01L51/56 , H01L27/32
摘要： A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
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公开(公告)号：US09722206B2
公开(公告)日：2017-08-01
申请号：US14811729
申请日：2015-07-28
发明人： Myungsoo Huh , Sunghun Key , Sungchul Kim , Cheollae Roh , Sukwon Jung , Hyunwoo Joo , Jaihyuk Choi
IPC分类号： H01L33/00 , H01L51/52 , H01J37/32 , C23C16/04 , C23C16/34 , C23C16/455 , C23C16/505
CPC分类号： H01L51/5256 , C23C16/042 , C23C16/345 , C23C16/45565 , C23C16/505 , H01J37/32091 , H01J37/3244
摘要： A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.
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4.发明申请APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS 审中-公开制造显示装置的装置和制造显示装置的方法公开(公告)号：US20160226031A1
公开(公告)日：2016-08-04
申请号：US14929159
申请日：2015-10-30
发明人： Choelmin Jang , Dongkyun Ko , Inkyo Kim , Sukwon Jung , Nam Ha , Myungsoo Huh
CPC分类号： H01L51/56 , C23C16/4412 , C23C16/45551 , C23C16/45563 , C23C16/54 , H01L51/0097 , H01L51/5253 , H01L51/5256
摘要： An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.
摘要翻译： 一种显示装置的制造装置和方法，包括：室; 在所述腔室处的第一喷嘴单元，所述第一喷嘴单元被配置为在基板上沉积有机层或无机层; 所述第二喷嘴单元被配置为将所述有机层或所述无机层沉积在基板上，并且所述第二喷嘴单元在所述第一方向上与所述第一喷嘴单元线性对准; 以及在所述第一喷嘴单元和所述第二喷嘴单元之间的喷嘴单元，所述喷射喷嘴单元被配置为将所述室中的第一气体朝向所述基板喷射。
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5.发明申请公开(公告)号：US20160204364A1
公开(公告)日：2016-07-14
申请号：US14730126
申请日：2015-06-03
发明人： Hyunwoo Joo , Sungwoo Ryu , Jaewon Shim , Whanchae Yong , Sukwon Jung , Myungsoo Huh
CPC分类号： H01L51/0096 , B05B7/00 , B05D1/02 , C23C4/134 , C25D5/08 , H01L27/3244 , H01L51/003 , H01L51/5237 , H01L51/56 , H01L2227/323 , H01L2227/326
摘要： Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.
摘要翻译： 提供一种显示装置及其制造方法。 用于制造显示装置的装置包括：干洗单元，其构造成从母基板的表面去除杂质; 电解质处理单元，连接到所述干洗单元并且被配置为用电解质处理所述母基板的表面; 以及剥离层形成单元，连接到所述电解质处理单元并且被配置为在所述母体基板上形成剥离层。
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公开(公告)号：US20210358791A1
公开(公告)日：2021-11-18
申请号：US17172056
申请日：2021-02-09
发明人： Juhee Lee , Cheollae Roh , Soo Beom Jo , Myungsoo Huh , Voronov Alexander , Jiwon Yeon , Haeyoung Yoo , Yongmun Chang
IPC分类号： H01L21/683 , H02N13/00 , B23Q3/15
摘要： An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.
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公开(公告)号：US10991913B2
公开(公告)日：2021-04-27
申请号：US16199848
申请日：2018-11-26
发明人： Choelmin Jang , Sunghun Key , Junggon Kim , Myungsoo Huh
摘要： Provided are an encapsulating structure, an organic light-emitting display device including the encapsulating structure, and a method of manufacturing the same. The encapsulating structure includes a first barrier layer including a first inorganic layer having a first thickness; a plasma polymer layer on the first inorganic layer, the plasma polymer layer having a second thickness smaller than or equal to the first thickness; and a second barrier layer including at least one second inorganic layer on the plasma polymer layer. The at least one second inorganic layer has a third thickness, and the third thickness is smaller than or equal to the second thickness.
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公开(公告)号：US10908648B2
公开(公告)日：2021-02-02
申请号：US16882391
申请日：2020-05-22
发明人： Jaihyuk Choi , Sukwon Jung , Myungsoo Huh
摘要： Disclosed is a foldable display apparatus in which a crack prevention layer is disposed on a surface of a display panel. The crack prevention layer includes thin film pattern portions disposed along a folding axis of the foldable display apparatus.
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公开(公告)号：US10664015B2
公开(公告)日：2020-05-26
申请号：US15869481
申请日：2018-01-12
发明人： Jaihyuk Choi , Sukwon Jung , Myungsoo Huh
摘要： Disclosed is a foldable display apparatus in which a crack prevention layer is disposed on a surface of a display panel. The crack prevention layer includes thin film pattern portions disposed along a folding axis of the foldable display apparatus.
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公开(公告)号：US20190341277A1
公开(公告)日：2019-11-07
申请号：US16173950
申请日：2018-10-29
发明人： Haeyoung Yoo , Taejong Kim , Juhee Lee , Myungsoo Huh , Jaekyu Park , Hyunwoo Joo
IPC分类号： H01L21/67 , H01J37/32 , H01L27/12 , H01L21/311 , H01L27/32 , H01L21/027
摘要： Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.
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