公开(公告)号：US20160204364A1

公开(公告)日：2016-07-14

申请号：US14730126

申请日：2015-06-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hyunwoo Joo ,  Sungwoo Ryu ,  Jaewon Shim ,  Whanchae Yong ,  Sukwon Jung ,  Myungsoo Huh

IPC: H01L51/00 ,  B05D1/02 ,  H01L51/52 ,  H01L27/32 ,  H01L51/56 ,  B05B7/00 ,  C23C4/134

CPC classification number: H01L51/0096 ,  B05B7/00 ,  B05D1/02 ,  C23C4/134 ,  C25D5/08 ,  H01L27/3244 ,  H01L51/003 ,  H01L51/5237 ,  H01L51/56 ,  H01L2227/323 ,  H01L2227/326

Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.

Abstract translation: 提供一种显示装置及其制造方法。 用于制造显示装置的装置包括：干洗单元，其构造成从母基板的表面去除杂质; 电解质处理单元，连接到所述干洗单元并且被配置为用电解质处理所述母基板的表面; 以及剥离层形成单元，连接到所述电解质处理单元并且被配置为在所述母体基板上形成剥离层。

公开(公告)号：US09735379B2

公开(公告)日：2017-08-15

申请号：US14730126

申请日：2015-06-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hyunwoo Joo ,  Sungwoo Ryu ,  Jaewon Shim ,  Whanchae Yong ,  Sukwon Jung ,  Myungsoo Huh

IPC: H01L51/00 ,  C23C4/134 ,  B05B7/00 ,  B05D1/02 ,  H01L27/32 ,  H01L51/52 ,  H01L51/56 ,  C25D5/08

CPC classification number: H01L51/0096 ,  B05B7/00 ,  B05D1/02 ,  C23C4/134 ,  C25D5/08 ,  H01L27/3244 ,  H01L51/003 ,  H01L51/5237 ,  H01L51/56 ,  H01L2227/323 ,  H01L2227/326

Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.