发明申请
- 专利标题： APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS
- 专利标题（中）： 制造显示装置的装置和制造显示装置的方法
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申请号： US14929159申请日： 2015-10-30
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公开(公告)号： US20160226031A1公开(公告)日： 2016-08-04
- 发明人: Choelmin Jang , Dongkyun Ko , Inkyo Kim , Sukwon Jung , Nam Ha , Myungsoo Huh
- 申请人： Samsung Display Co., Ltd.
- 优先权： KR10-2015-0014589 20150129
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; H01L51/00 ; H01L51/52
摘要：
An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.
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