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公开(公告)号：US20200070511A1
公开(公告)日：2020-03-05
申请号：US16676070
申请日：2019-11-06
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Simon DODD
Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.
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2.发明申请公开(公告)号：US20180281402A1
公开(公告)日：2018-10-04
申请号：US15884186
申请日：2018-01-30
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Simon DODD
Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.
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公开(公告)号：US20230166293A1
公开(公告)日：2023-06-01
申请号：US18053718
申请日：2022-11-08
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Lorenzo TENTORI
CPC classification number: B06B1/0681 , B06B1/0629 , B06B1/0651 , B06B1/0666 , G01S15/08
Abstract: MEMS ultrasonic transducer, MUT, device, comprising a semiconductor body with a first and a second main surface and including: a first chamber extending into the semiconductor body at a distance from the first main surface; a membrane formed by the semiconductor body between the first main surface and the first chamber; a piezoelectric element on the membrane; a second chamber extending into the semiconductor body between the first chamber and the second main surface; a central fluidic passage extending into the semiconductor body from the second main surface to the first chamber and traversing the second chamber; and one or more lateral fluidic passages extending into the semiconductor body from the second main surface to the second chamber. The one or more lateral fluidic passages, the central fluidic passage and the second chamber define a fluidic recirculation path that fluidically connects the first chamber with the outside of the semiconductor body.
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公开(公告)号：US20220410183A1
公开(公告)日：2022-12-29
申请号：US17845718
申请日：2022-06-21
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Gianluca GULLI' , Francesco FERRARIO , Davide MAERNA , Lorenzo TENTORI
Abstract: A microfluidic device has a chamber; a fluidic access channel in fluidic connection with the chamber; a plurality of nozzle apertures in fluidic connection with the chamber; and an actuator, operatively coupled to the fluid containment chamber and configured to cause ejection of drops of fluid through the nozzle apertures in an operating condition of the microfluidic device. The chamber has an elongated shape, with a length and a maximum width, wherein an aspect ratio between the length and the maximum width of the chamber is at least 3:1. The nozzle apertures are configured to generate, in use, a plurality of drops having a total drop volume, wherein a ratio total drop volume to a chamber volume is at least 15%.
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公开(公告)号：US20220126580A1
公开(公告)日：2022-04-28
申请号：US17572374
申请日：2022-01-10
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Carlo Luigi PRELINI , Lorenzo TENTORI
Abstract: Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.
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Patent Agency Ranking
公开(公告)号：US20210177061A1
公开(公告)日：2021-06-17
申请号：US17118452
申请日：2020-12-10
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Irene MARTINI
Abstract: A microfluidic dispensing device has a plurality of chambers arranged in sequence, each having an inlet receiving a liquid to be dispensed and a nozzle for emitting a drop of liquid. An actuator in each chamber receives an actuation quantity and causes a drop of liquid to be emitted by the nozzle of the respective chamber. A drop emission detection element in each chamber generates an actuation command upon detecting the emission of a drop of liquid. A sequential activation electric circuit includes a plurality of sequential activation elements, one for each chamber, each coupled to the drop emission detection element of the respective chamber and to an actuator associated with a subsequent chamber in the sequence of chambers. Each sequential activation element receives the actuation command from the drop emission detection element associated with the respective chamber and activates the actuator associated with the subsequent chamber in the sequence of chambers.
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公开(公告)号：US20210166726A1
公开(公告)日：2021-06-03
申请号：US17088394
申请日：2020-11-03
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA
Abstract: Various embodiments of the present disclosure provide a read/write device for a hard-disk memory system. The read/write device includes a fixed structure; a membrane region including a first and a second membrane, which are constrained to the fixed structure, and a central portion, interposed between the first and second membranes; a first and a second piezoelectric actuator, mechanically coupled, respectively, to the first and second membranes; and a read/write head, which is fixed to the central portion of the membrane region. The first and second piezoelectric actuators can be controlled so as to cause corresponding deformations of the first and second membranes, said deformations of the first and second membranes causing corresponding movements of the read/write head with respect to the fixed structure.
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公开(公告)号：US20210078331A1
公开(公告)日：2021-03-18
申请号：US17107683
申请日：2020-11-30
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Mauro CATTANEO , Andrea NOMELLINI
Abstract: A method for manufacturing a device for ejecting a fluid, including the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.
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9.发明申请公开(公告)号：US20200235280A1
公开(公告)日：2020-07-23
申请号：US16746676
申请日：2020-01-17
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Irene MARTINI
Abstract: A MEMS optical device having an optically active portion and an actuation portion adjacent to each other. The MEMS optical device includes a body, a piezoelectric actuator, and a cap. The body is formed by a substrate, housing a cavity containing a fluid and by a deformable region fixed to the substrate, suspended over the cavity and forming a membrane. The piezoelectric actuator extends on the deformable region at the actuation portion and is protected by the cap, which is coupled to the body at the actuation portion and defines a chamber that houses the piezoelectric actuator.
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10.发明公开公开(公告)号：US20230204974A1
公开(公告)日：2023-06-29
申请号：US18111073
申请日：2023-02-17
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Dario PACI
CPC classification number: G02B27/646 , B81B3/0021 , G03B5/06 , H02N2/22 , H02N2/028 , H10N30/01 , H10N30/2044 , B81B2201/032 , B81B2201/047 , B81B2203/053 , B81B2203/058 , G03B2205/0023
Abstract: A method of making a MEMS actuator with a monolithic body of semiconductor material includes forming a supporting portion of semiconductor material, orientable with respect to first and second rotation axes, the first rotation axis being transverse with respect to the second rotation axis, and forming a first frame of semiconductor material. The method further includes forming first deformable elements, of semiconductor material, coupled to the first frame, and configured to control a rotation of the supporting portion about the first rotation axis. The method also includes forming a second frame of semiconductor material, and forming second deformable elements, of semiconductor material, coupled to the first frame and to the second frame, and configured to control a rotation of the supporting portion about the second rotation axis. The first and second deformable elements are formed to carry respective first and second piezoelectric actuation elements.
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