Invention Application
- Patent Title: PIEZOELECTRICALLY ACTUATED MEMS OPTICAL DEVICE HAVING A PROTECTED CHAMBER AND MANUFACTURING PROCESS THEREOF
-
Application No.: US16746676Application Date: 2020-01-17
-
Publication No.: US20200235280A1Publication Date: 2020-07-23
- Inventor: Domenico GIUSTI , Irene MARTINI
- Applicant: STMICROELECTRONICS S.r.l.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75b8ac66
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B81B3/00 ; B81B7/00 ; B81B7/02

Abstract:
A MEMS optical device having an optically active portion and an actuation portion adjacent to each other. The MEMS optical device includes a body, a piezoelectric actuator, and a cap. The body is formed by a substrate, housing a cavity containing a fluid and by a deformable region fixed to the substrate, suspended over the cavity and forming a membrane. The piezoelectric actuator extends on the deformable region at the actuation portion and is protected by the cap, which is coupled to the body at the actuation portion and defines a chamber that houses the piezoelectric actuator.
Public/Granted literature
- US11818957B2 Piezoelectrically actuated MEMS optical device having a protected chamber and manufacturing process thereof Public/Granted day:2023-11-14
Information query
IPC分类: