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1.发明申请公开(公告)号：US20180281402A1
公开(公告)日：2018-10-04
申请号：US15884186
申请日：2018-01-30
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Simon DODD
Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.
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公开(公告)号：US20200070511A1
公开(公告)日：2020-03-05
申请号：US16676070
申请日：2019-11-06
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Simon DODD
Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.
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公开(公告)号：US20220119246A1
公开(公告)日：2022-04-21
申请号：US17497538
申请日：2021-10-08
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Fabio QUAGLIA
IPC: B81B7/00 , H01L41/09 , H01L41/113 , B81B3/00 , B81C1/00
Abstract: A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.
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公开(公告)号：US20190329551A1
公开(公告)日：2019-10-31
申请号：US16392007
申请日：2019-04-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI
Abstract: A fluid ejection device, comprising: a chamber; a membrane, with a first side and a second side opposite to one another, where the first side faces the chamber; an actuator, of a piezoelectric type, which extends on the second side of the membrane and is operatively coupled to the membrane for causing, in use, a vibration of the membrane; a passivation layer, which extends only alongside, or partially on, the actuator; and a protection layer, which extends on the actuator at least in surface portions of the latter that are free from the passivation layer, and has a Young's modulus lower than the Young's modulus of the passivation layer.
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公开(公告)号：US20230166293A1
公开(公告)日：2023-06-01
申请号：US18053718
申请日：2022-11-08
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Lorenzo TENTORI
CPC classification number: B06B1/0681 , B06B1/0629 , B06B1/0651 , B06B1/0666 , G01S15/08
Abstract: MEMS ultrasonic transducer, MUT, device, comprising a semiconductor body with a first and a second main surface and including: a first chamber extending into the semiconductor body at a distance from the first main surface; a membrane formed by the semiconductor body between the first main surface and the first chamber; a piezoelectric element on the membrane; a second chamber extending into the semiconductor body between the first chamber and the second main surface; a central fluidic passage extending into the semiconductor body from the second main surface to the first chamber and traversing the second chamber; and one or more lateral fluidic passages extending into the semiconductor body from the second main surface to the second chamber. The one or more lateral fluidic passages, the central fluidic passage and the second chamber define a fluidic recirculation path that fluidically connects the first chamber with the outside of the semiconductor body.
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Patent Agency Ranking
公开(公告)号：US20210166726A1
公开(公告)日：2021-06-03
申请号：US17088394
申请日：2020-11-03
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA
Abstract: Various embodiments of the present disclosure provide a read/write device for a hard-disk memory system. The read/write device includes a fixed structure; a membrane region including a first and a second membrane, which are constrained to the fixed structure, and a central portion, interposed between the first and second membranes; a first and a second piezoelectric actuator, mechanically coupled, respectively, to the first and second membranes; and a read/write head, which is fixed to the central portion of the membrane region. The first and second piezoelectric actuators can be controlled so as to cause corresponding deformations of the first and second membranes, said deformations of the first and second membranes causing corresponding movements of the read/write head with respect to the fixed structure.
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公开(公告)号：US20210078331A1
公开(公告)日：2021-03-18
申请号：US17107683
申请日：2020-11-30
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Mauro CATTANEO , Andrea NOMELLINI
Abstract: A method for manufacturing a device for ejecting a fluid, including the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.
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公开(公告)号：US20240179475A1
公开(公告)日：2024-05-30
申请号：US18513248
申请日：2023-11-17
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Fabio QUAGLIA , Marco FERRERA , Carlo Luigi PRELINI , Alessandro Stuart SAVOIA
CPC classification number: H04R17/02 , H04R31/006 , H04R2201/003 , H04R2400/01
Abstract: MEMS device comprising: a signal processing assembly; a transduction module comprising a plurality of transducer devices; a stiffening structure at least partially surrounding each transducer device; one or more coupling pillars for each transducer device, extending on the stiffening structure and configured to physically and electrically couple the transduction module to the signal processing assembly, to carry control signals of the transducer devices. Each conductive coupling element has a section having a shape such as to maximize the overlapping surface with the stiffening structure around the respective transducer device. This shape includes hypocycloid with a number of cusps equal to or greater than three; triangular; quadrangular.
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公开(公告)号：US20220169497A1
公开(公告)日：2022-06-02
申请号：US17538845
申请日：2021-11-30
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Alessandro Stuart SAVOIA , Domenico GIUSTI , Marco FERRERA , Fabio QUAGLIA
IPC: B81B3/00 , H01L41/047 , H01L41/083
Abstract: A micromechanical device for transducing acoustic waves in a propagation medium, comprising: a body; a first electrode structure superimposed to the body and electrically insulated from the body, the first electrode structure and the body defining between them a first buried cavity; and a first piezoelectric element superimposed to the first electrode structure, wherein the body, the first electrode structure, and the buried cavity form a first capacitive ultrasonic transducer, and the first electrode structure and the first piezoelectric element form a first piezoelectric ultrasonic transducer.
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公开(公告)号：US20210347634A1
公开(公告)日：2021-11-11
申请号：US17240782
申请日：2021-04-26
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI
Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.
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