公开(公告)号：US20210078331A1

公开(公告)日：2021-03-18

申请号：US17107683

申请日：2020-11-30

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Marco FERRERA ,  Carlo Luigi PRELINI ,  Mauro CATTANEO ,  Andrea NOMELLINI

IPC: B41J2/16 ,  B81C1/00 ,  B41J2/14

Abstract: A method for manufacturing a device for ejecting a fluid, including the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.

公开(公告)号：US20190217618A1

公开(公告)日：2019-07-18

申请号：US16249752

申请日：2019-01-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Marco FERRERA ,  Carlo Luigi PRELINI ,  Mauro CATTANEO ,  Andrea NOMELLINI

IPC: B41J2/16 ,  B41J2/14 ,  B81C1/00

CPC classification number: B41J2/1626 ,  B41J2/14201 ,  B41J2/1606 ,  B41J2/1607 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/14241 ,  B81C1/00087

Abstract: A method for manufacturing a device for ejecting a fluid, comprising the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.

公开(公告)号：US20200290355A1

公开(公告)日：2020-09-17

申请号：US16885908

申请日：2020-05-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Mauro CATTANEO ,  Carlo Luigi PRELINI

IPC: B41J2/14 ,  B41J2/16

Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

公开(公告)号：US20190023014A1

公开(公告)日：2019-01-24

申请号：US16030630

申请日：2018-07-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Mauro CATTANEO ,  Carlo Luigi PRELINI

IPC: B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/1437

Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.