SILPHENYLENE-CONTAINING PHOTOCURABLE COMPOSITION, PATTERN FORMATION METHOD USING SAME, AND OPTICAL SEMICONDUCTOR ELEMENT OBTAINED USING THE METHOD
    6.
    发明申请
    SILPHENYLENE-CONTAINING PHOTOCURABLE COMPOSITION, PATTERN FORMATION METHOD USING SAME, AND OPTICAL SEMICONDUCTOR ELEMENT OBTAINED USING THE METHOD 有权
    含有苯甲烯的光致抗蚀剂组合物,使用其的图案形成方法和使用该方法获得的光学半导体元件

    公开(公告)号:US20140011126A1

    公开(公告)日:2014-01-09

    申请号:US14019910

    申请日:2013-09-06

    IPC分类号: G03F7/00

    摘要: Provided is a silphenylene-containing photocurable composition including: (A) a specific silphenylene having both terminals modified with alicyclic epoxy groups, and (C) a photoacid generator that generates acid upon irradiation with light having a wavelength of 240 to 500 nm. Also provided is a pattern formation method including: (i) forming a film of the photocurable composition on a substrate, (ii) exposing the film through a photomask with light having a wavelength of 240 to 500 nm, and if necessary, performing heating following the exposure, and (iii) developing the film in a developing liquid, and if necessary, performing post-curing at a temperature within a range from 120 to 300° C. following the developing. Further provided is an optical semiconductor element obtained by performing pattern formation using the method. The composition is capable of very fine pattern formation across a broad range of wavelengths, and following pattern formation, yields a film that exhibits a high degree of transparency and superior light resistance. The composition may also include: (B) a specific epoxy group-containing organosilicon compound.

    摘要翻译: 本发明提供一种含有亚苯基苯的光固化性组合物,其含有:(A)具有两个末端被脂环族环氧基改性的特定的硅亚苯基,(C)光照酸产生剂,其在波长240〜500nm的光照射下产生酸。 还提供了一种图案形成方法,包括:(i)在基板上形成光固化性组合物的膜,(ii)用波长为240〜500nm的光使膜通过光掩模曝光,如果需要,进行加热 曝光,和(iii)在显影液中显影该膜,如有必要,在显影后在120-300℃的温度下进行后固化。 还提供了通过使用该方法进行图案形成而获得的光学半导体元件。 组合物能够在宽波长范围内形成非常精细的图案,并且在图案形成之后,产生显示出高透明度和优异耐光性的膜。 组合物还可以包括:(B)特定的含环氧基的有机硅化合物。

    Semiconductor device, making method, and laminate

    公开(公告)号:US10297485B2

    公开(公告)日:2019-05-21

    申请号:US15928305

    申请日:2018-03-22

    摘要: A semiconductor device is provided comprising a support, an adhesive resin layer, an insulating layer, a redistribution layer, a chip layer, and a mold resin layer. The adhesive resin layer consists of a resin layer (A) comprising a photo-decomposable resin containing a fused ring in its main chain and a resin layer (B) comprising a non-silicone base thermoplastic resin and having a storage elastic modulus E′ of 1-500 MPa at 25° C. and a tensile break strength of 5-50 MPa. The semiconductor device is easy to fabricate and has thermal process resistance, the support is easily separated, and a semiconductor package is efficiently produced.