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公开(公告)号：US5587620A
公开(公告)日：1996-12-24
申请号：US171227
申请日：1993-12-21
Applicant: Richard C. Ruby , Paul P. Merchant
Inventor： Richard C. Ruby , Paul P. Merchant
CPC classification number: H03H9/174 , H03H3/04 , H03H9/02133 , H03H9/02236 , H03H9/583 , H03H9/588 , H03H2009/02181 , Y10T29/42
Abstract: An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si.sub.3 N.sub.4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment of the present invention, the electrodes are deposited by a method that minimizes the stress in the electrodes.
Abstract translation: 包括夹着PZ层的顶部和底部电极的声学谐振器。 可以通过利用声谐振器中包含的加热元件和/或通过调节调谐层的厚度来调整声学谐振器的共振频率。 在本发明的优选实施例中，电极包括Mo层。 本发明的一个实施方案构造在Si 3 N 4膜上。 本发明的第二实施例构造成使得其悬挂在金属柱上的基板上。 在本发明的优选实施例中，通过使电极中的应力最小化的方法来沉积电极。
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公开(公告)号：US09479139B2
公开(公告)日：2016-10-25
申请号：US12769791
申请日：2010-04-29
Applicant: Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
Inventor： Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
CPC classification number: H03H9/131 , H03H3/04 , H03H9/02102 , H03H9/173 , H03H9/175
Abstract: An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
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公开(公告)号：US09154103B2
公开(公告)日：2015-10-06
申请号：US13361724
申请日：2012-01-30
Applicant: Richard C. Ruby
Inventor： Richard C. Ruby
CPC classification number: H03H9/172 , H03H3/02 , H03H9/02102 , H03H9/08 , H03H9/54
Abstract: An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.
Abstract translation: 声谐振器装置包括环形声谐振器，加热器线圈和热传感器。 环形声谐振器位于形成在声谐振器装置的衬底中的沟槽之上。 加热器线圈围绕环形声谐振器的周边设置，加热器线圈包括被配置为接收加热器电流的电阻器。 热传感器被配置为响应于加热器线圈的温度来调节加热器电流。
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4.发明授权公开(公告)号：US07714684B2
公开(公告)日：2010-05-11
申请号：US12115666
申请日：2008-05-06
Applicant: Richard C. Ruby , Ronald S. Fazzio , Hongjun Feng , Paul D. Bradley
Inventor： Richard C. Ruby , Ronald S. Fazzio , Hongjun Feng , Paul D. Bradley
CPC classification number: H03H9/02086 , H03H3/02 , H03H9/02149 , H03H9/13 , H03H9/132 , H03H9/173 , H03H2003/0428
Abstract: Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
Abstract translation: 公开了一种包括基板，第一电极，压电材料层，第二电极和交替框架区域的声共振器。 第一电极与衬底相邻，并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层，第二电极具有外周。 交替的框架区域在第一和第二电极之一上。
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公开(公告)号：US20090079514A1
公开(公告)日：2009-03-26
申请号：US11860107
申请日：2007-09-24
Applicant: Tiberiu Jamneala , Martha Small , Richard C. Ruby
Inventor： Tiberiu Jamneala , Martha Small , Richard C. Ruby
Abstract: A hybrid acoustic resonator filter and a communication device with a hybrid acoustic resonator filter is described.
Abstract translation: 描述了一种混合声学谐振滤波器和具有混合声谐振滤波器的通信装置。
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Patent Agency Ranking
6.发明授权Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method 有权通过减去实施该方法的方法和装置在同一基板上制造具有不同频率的薄膜体声共振器（FBAR）的方法公开(公告)号：US06874211B2
公开(公告)日：2005-04-05
申请号：US09799205
申请日：2001-03-05
Applicant: Paul D. Bradley , John D. Larson, III , Richard C. Ruby
Inventor： Paul D. Bradley , John D. Larson, III , Richard C. Ruby
CPC classification number: H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10T29/42
Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by reducing mass from a top electrode layer. For a substrate having multiple resonators, mass is reduced from only selected resonator to provide resonators having different resonance frequencies on the same substrate.
Abstract translation: 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过减少从顶部电极层的质量而在衬底上制造FBAR。 对于具有多个谐振器的衬底，仅从所选择的谐振器减小质量，以在同一衬底上提供具有不同谐振频率的谐振器。
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公开(公告)号：US06483229B2
公开(公告)日：2002-11-19
申请号：US09799149
申请日：2001-03-05
Applicant: John D. Larson, III , Paul D. Bradley , Richard C. Ruby
Inventor： John D. Larson, III , Paul D. Bradley , Richard C. Ruby
IPC: H01L4104
CPC classification number: H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471
Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.
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8.发明授权Method of mass loading of thin film bulk acoustic resonators (FBAR) for creating resonators of different frequencies and apparatus embodying the method 有权用于产生不同频率的谐振器的薄膜体声共振器（FBAR）的质量加载方法和体现该方法的装置公开(公告)号：US06469597B2
公开(公告)日：2002-10-22
申请号：US09799204
申请日：2001-03-05
Applicant: Richard C. Ruby , Paul D. Bradley , John D. Larson, III
Inventor： Richard C. Ruby , Paul D. Bradley , John D. Larson, III
IPC: H03H956
CPC classification number: H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10T29/42
Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by introducing a mass loading electrode to a bottom electrode layer. For a substrate having multiple resonators, mass loading bottom electrode is introduced for only selected resonator to provide resonators having different resonance frequencies on the same substrate.
Abstract translation: 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过向底部电极层引入质量负载电极，在基板上制造FBAR。 对于具有多个谐振器的基板，仅为所选择的谐振器引入质量负载底部电极，以在同一基板上提供具有不同谐振频率的谐振器。
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9.发明授权Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator 有权衬底安装的体声波谐振器的腔体跨越底部电极公开(公告)号：US06384697B1
公开(公告)日：2002-05-07
申请号：US09566868
申请日：2000-05-08
Applicant: Richard C. Ruby
Inventor： Richard C. Ruby
IPC: H03H900
Abstract: A filter formed of acoustic resonators, where each resonator has its own cavity and a bottom electrode that spans the entirety of the cavity, so that the bottom electrode has an unsupported interior region surrounded by supported peripheral regions. In the preferred embodiment, the cavity is formed by etching a depression into the substrate, filling the depression with a sacrificial material, depositing the piezoelectric and electrode layers that define an FBAR or SBAR, and then removing the sacrificial material from the depression. Also in the preferred embodiment, the sacrificial material is removed via release holes that are limited to the periphery of the depression. Preferably, the bottom electrode is the only electrode that spans the cavity, thereby limiting the formation of parasitic FBARs or SBARs. In one embodiment, the bottom electrode includes a serpentine edge that leaves a portion of one side of the cavity free of overlap by the bottom electrode, so that a top electrode may overlap this portion. Thus, the top and bottom electrodes can overlap the same side without sandwiching the piezoelectric layer outside of the unsupported interior region.
Abstract translation: 由声谐振器形成的滤波器，其中每个谐振器具有其自身的空腔和跨越整个空腔的底部电极，使得底部电极具有被支撑的周边区域包围的无支撑的内部区域。 在优选实施例中，通过将凹陷蚀刻到基板中，用牺牲材料填充凹陷，沉积限定FBAR或SBAR的压电层和电极层，然后从凹陷中去除牺牲材料来形成空腔。 同样在优选实施例中，通过限制在凹陷周边的释放孔去除牺牲材料。 优选地，底部电极是跨越空腔的唯一电极，从而限制寄生FBAR或SBAR的形成。 在一个实施例中，底部电极包括使空腔的一侧的一部分离开由底部电极重叠的蛇形边缘，使得顶部电极可能与该部分重叠。 因此，顶部和底部电极可以重叠在同一侧，而不将压电层夹在未支撑的内部区域之外。
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公开(公告)号：US5071826A
公开(公告)日：1991-12-10
申请号：US423511
申请日：1989-10-13
Applicant: John T. Anderson , V. K. Nagesh , Richard C. Ruby
Inventor： John T. Anderson , V. K. Nagesh , Richard C. Ruby
CPC classification number: H01L39/2419 , C01G3/006 , C04B35/45 , H01L39/2429 , C01P2004/61 , C01P2004/80 , Y10S505/734 , Y10S505/785 , Y10T428/12354
Abstract: A method for making metal/ceramic superconductor thick film structures including the steps of preparing a silver/superconductor ink, applying the ink to a substrate, evaporating the ink's binder, decomposing a silver compound in the residue to coat the superconductor grains, sintering the coated superconductor grains, and oxygenating the superconductor grains through the silver coating. The resultant inter-granular silver increases the critical current and mechanical strength of the superconductor.
Abstract translation: 一种制造金属/陶瓷超导体厚膜结构的方法，包括以下步骤：制备银/超导体油墨，将油墨施加到基材上，蒸发油墨粘合剂，分解残留物中的银化合物以涂覆超导体颗粒，烧结涂覆 超导体晶粒，并通过银涂层对超导体晶粒进行氧化。 所产生的颗粒间银增加了超导体的临界电流和机械强度。
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