公开(公告)号：US20160211111A1

公开(公告)日：2016-07-21

申请号：US14969069

申请日：2015-12-15

Applicant: NuFlare Technology, Inc.

Inventor： Osamu IIZUKA ,  Kenji OHTOSHI

IPC: H01J37/22 ,  H01J37/317

CPC classification number: H01J37/3177 ,  H01J37/3045 ,  H01J2237/221

Abstract: According to one aspect of the present invention, a rotation angle measuring method of a multi-charged particle beam image includes two-dimensionally scanning a mark arranged on a stage in a multi-charged particle beam writing apparatus using, among multi-charged particle beams that can be used for exposure, a plurality of representative beams of which number is smaller than the number of beams constituting the multi-charged particle beams, creating a two-dimensional image of the plurality of representative beams based on signals obtained by two-dimensional scanning, and acquiring a rotation angle of the multi-charged particle beam image using the two-dimensional image.

Abstract translation: 根据本发明的一个方面，一种多电荷粒子束图像的旋转角度测量方法包括：使用多带电粒子束中的多带电粒子束书写装置，在二阶段扫描设置在舞台上的标记 其可以用于曝光，多个代表性的光束数量小于构成多电荷粒子束的光束的数量，基于通过二维获得的信号产生多个代表性光束的二维图像 使用二维图像扫描并获取多电荷粒子束图像的旋转角度。

公开(公告)号：US20160086764A1

公开(公告)日：2016-03-24

申请号：US14823015

申请日：2015-08-11

Applicant: NuFlare Technology, Inc.

Inventor： Osamu IIZUKA ,  Kenji OHTOSHI

IPC: H01J37/147 ,  H01J37/20 ,  H01J37/317

CPC classification number: H01J37/3177 ,  H01J37/3045 ,  H01J2237/30438 ,  H01J2237/3045

Abstract: A method of measuring beam positions of multi charged particle beams includes acquiring the number of beams of multi charged particle beams, needed for the measurement reproducibility of a current amount to be within the range of an allowable value, setting a plurality of measurement points depending on a desired dimensional accuracy value, in an irradiation region irradiated by the whole of the multi charged particle beams, setting, for each of a plurality of measurement points, a beam region, including a measurement point of a plurality of measurement points, irradiated by a plurality of beams whose number is the number of beams needed for the measurement reproducibility in the multi charged particle beams, and measuring, for each of a plurality of measurement points, the position of a measurement point concerned in a plurality of measurement points by using a plurality of beams of a corresponding beam region.

Abstract translation: 一种测量多带电粒子束的光束位置的方法包括获取当前量的测量再现性在允许值范围内所需的多带电粒子束的数量，设定多个测量点取决于 在由整个多带电粒子束照射的照射区域中的期望的尺寸精度值，对于多个测量点中的每一个，设置包括多个测量点的测量点的光束区域， 多个光束，其数量是多带电粒子束中的测量重现性所需的光束数，并且通过使用多个测量点中的多个测量点中的每个测量点的位置来测量多个测量点中的测量点的位置 多个光束对应的光束区域。

公开(公告)号：US20150228455A1

公开(公告)日：2015-08-13

申请号：US14607559

申请日：2015-01-28

Applicant: NuFlare Technology, Inc.

Inventor： Tomoo MOTOSUGI ,  Takayuki OHNISHI ,  Kaoru TSURUTA ,  Kenji OHTOSHI

IPC: H01J37/317 ,  H01J37/10 ,  H01J37/20 ,  H01J37/302 ,  H01J37/21

CPC classification number: H01J37/3174 ,  H01J37/10 ,  H01J37/20 ,  H01J37/21 ,  H01J37/3026 ,  H01J2237/006 ,  H01J2237/0492 ,  H01J2237/063 ,  H01J2237/103 ,  H01J2237/2007

Abstract: A charged particle beam writing apparatus includes an emission unit to emit a charged particle beam, a stage to mount thereon a target object to be written, an objective lens to focus the charged particle beam on a surface of the target object, a chamber to house the stage, a measurement unit to measure a partial pressure of a predetermined gas in the chamber in a state where a pressure inside the chamber is controlled to be lower than an atmospheric pressure, and an adjustment unit to adjust a focus position for focusing the charged particle beam on the target object, based on the partial pressure of the predetermined gas.

Abstract translation: 带电粒子束写入装置包括发射带电粒子束的发射单元，其上安装待写入的目标物体的载物台，将带电粒子束聚焦在目标物体的表面上的物镜， 该阶段是在室内的压力被控制为低于大气压力的状态下测量室内的预定气体的分压的测量单元，以及调节单元，用于调整聚焦位置以聚焦带电 基于预定气体的分压，靶物体上的粒子束。