公开(公告)号：US20190127847A1

公开(公告)日：2019-05-02

申请号：US16167910

申请日：2018-10-23

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Satoshi NAKAHASHI ,  Kaoru TSURUTA

IPC: C23C16/44 ,  H01J37/317 ,  H01J37/20 ,  H01J37/21 ,  H01J37/32

Abstract: A drawing apparatus includes: a drawing part; a cleaning-gas generator; a first valve between the cleaning-gas generator and the drawing part and adjusting a supply amount of gas to the drawing part; a first pressure gauge measuring a pressure in the drawing part; a compensation-gas introducing part introducing compensation-gas to be supplied between the cleaning-gas generator and the first valve; a second valve between the compensation-gas introducing part and the first valve and adjusting a supply amount of the compensation-gas;and a valve controller controlling the first and second valves, wherein the valve controller controls the first valve to supply the cleaning-gas at a predetermined flow rate to the drawing part and controls the second valve to cause a pressure in the drawing part to be a predetermined pressure when the first pressure gauge detects a pressure reduction due to a reduction in a supply flow rate of the cleaning-gas.

公开(公告)号：US20150228455A1

公开(公告)日：2015-08-13

申请号：US14607559

申请日：2015-01-28

Applicant: NuFlare Technology, Inc.

Inventor： Tomoo MOTOSUGI ,  Takayuki OHNISHI ,  Kaoru TSURUTA ,  Kenji OHTOSHI

IPC: H01J37/317 ,  H01J37/10 ,  H01J37/20 ,  H01J37/302 ,  H01J37/21

CPC classification number: H01J37/3174 ,  H01J37/10 ,  H01J37/20 ,  H01J37/21 ,  H01J37/3026 ,  H01J2237/006 ,  H01J2237/0492 ,  H01J2237/063 ,  H01J2237/103 ,  H01J2237/2007

Abstract: A charged particle beam writing apparatus includes an emission unit to emit a charged particle beam, a stage to mount thereon a target object to be written, an objective lens to focus the charged particle beam on a surface of the target object, a chamber to house the stage, a measurement unit to measure a partial pressure of a predetermined gas in the chamber in a state where a pressure inside the chamber is controlled to be lower than an atmospheric pressure, and an adjustment unit to adjust a focus position for focusing the charged particle beam on the target object, based on the partial pressure of the predetermined gas.

Abstract translation: 带电粒子束写入装置包括发射带电粒子束的发射单元，其上安装待写入的目标物体的载物台，将带电粒子束聚焦在目标物体的表面上的物镜， 该阶段是在室内的压力被控制为低于大气压力的状态下测量室内的预定气体的分压的测量单元，以及调节单元，用于调整聚焦位置以聚焦带电 基于预定气体的分压，靶物体上的粒子束。