公开(公告)号：US20180337019A1

公开(公告)日：2018-11-22

申请号：US15824047

申请日：2017-11-28

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa

IPC: H01J37/28 ,  H01J37/26 ,  H01J37/147 ,  H01J37/10 ,  H01J37/244

CPC classification number: H01J37/28 ,  G01N23/20058 ,  G01N2223/0565 ,  G01N2223/102 ,  G01N2223/3302 ,  G01N2223/418 ,  H01J37/10 ,  H01J37/1475 ,  H01J37/1477 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/2446 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.

公开(公告)号：US20230026970A1

公开(公告)日：2023-01-26

申请号：US17869117

申请日：2022-07-20

Applicant: JEOL Ltd.

Inventor： Keito Aibara ,  Tomohiro Nakamichi ,  Shigeyuki Morishita ,  Motofumi Saito ,  Ryusuke Sagawa ,  Fuminori Uematsu

IPC: H01J37/153 ,  H01J37/244 ,  H01J37/28

Abstract: Prior to execution of primary correction, a first centering process, an in-advance correction of a particular aberration, and a second centering process are executed stepwise. In the first centering process and the second centering process, a ronchigram center is identified based on a ronchigram variation image, and is matched with an imaging center. In the in-advance correction and the post correction of the particular aberration, a particular aberration value is estimated based on a ronchigram, and the particular aberration is corrected based on the particular aberration value.

公开(公告)号：US11545337B2

公开(公告)日：2023-01-03

申请号：US17236074

申请日：2021-04-21

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa

IPC: H01J37/256 ,  H01J37/26 ,  H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/22

Abstract: A scanning transmission electron microscope that scans a specimen with an electron probe to acquire an image. The scanning transmission electron microscope includes: an optical system which includes a condenser lens and an objective lens; an imaging device which is arranged on a back focal plane or a plane conjugate to the back focal plane of the objective lens and which is capable of photographing a Ronchigram; and a control unit which performs adjustment of the optical system. The control unit is configured or programed to: acquire an image of a change in a Ronchigram that is attributable to a change in a relative positional relationship between the specimen and the electron probe; and determine a center of the Ronchigram based on the image of the change in the Ronchigram.

公开(公告)号：US10340118B2

公开(公告)日：2019-07-02

申请号：US15824047

申请日：2017-11-28

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa

IPC: H01J37/28 ,  G01N23/20058 ,  H01J37/244 ,  H01J37/10 ,  H01J37/147 ,  H01J37/26

Abstract: There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.

公开(公告)号：US20180130634A1

公开(公告)日：2018-05-10

申请号：US15620144

申请日：2017-06-12

Applicant: JEOL Ltd.

Inventor： Yukihito Kondo ,  Ryusuke Sagawa

IPC: H01J37/22 ,  H01J37/147 ,  H01J37/28 ,  H01J37/09 ,  H01J37/04

CPC classification number: H01J37/22 ,  H01J37/045 ,  H01J37/09 ,  H01J37/1474 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

公开(公告)号：US12255041B2

公开(公告)日：2025-03-18

申请号：US17869117

申请日：2022-07-20

Applicant: JEOL Ltd.

Inventor： Keito Aibara ,  Tomohiro Nakamichi ,  Shigeyuki Morishita ,  Motofumi Saito ,  Ryusuke Sagawa ,  Fuminori Uematsu

IPC: H01J37/153 ,  H01J37/244 ,  H01J37/28

Abstract: Prior to execution of primary correction, a first centering process, an in-advance correction of a particular aberration, and a second centering process are executed stepwise. In the first centering process and the second centering process, a ronchigram center is identified based on a ronchigram variation image, and is matched with an imaging center. In the in-advance correction and the post correction of the particular aberration, a particular aberration value is estimated based on a ronchigram, and the particular aberration is corrected based on the particular aberration value.

公开(公告)号：US20240274402A1

公开(公告)日：2024-08-15

申请号：US18434133

申请日：2024-02-06

Applicant: JEOL Ltd.

Inventor： Motofumi Saitoh ,  Ryusuke Sagawa

IPC: H01J37/26 ,  H01J37/153 ,  H01J37/22

CPC classification number: H01J37/265 ,  H01J37/153 ,  H01J37/222 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/221

Abstract: An electron microscope includes an electron optical system, and a control unit that controls the electron optical system. The control unit performs processing for determining a standard deviation of a brightness distribution of an electron microscope image; processing for determining an optimum value of a parameter of the electron optical system such that the standard deviation becomes the maximum, by Gaussian process regression; and processing for capturing the electron microscope image with setting a value of the parameter to the optimum value. The control unit repeats the processing for determining the standard deviation, the processing for determining the optimum value, and the processing for capturing the electron microscope image to determine a value of the parameter.

公开(公告)号：US11842880B2

公开(公告)日：2023-12-12

申请号：US17671896

申请日：2022-02-15

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa ,  Shigeyuki Morishita ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1534 ,  H01J2237/2487 ,  H01J2237/2802

Abstract: An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.

公开(公告)号：US20220262595A1

公开(公告)日：2022-08-18

申请号：US17671896

申请日：2022-02-15

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa ,  Shigeyuki Morishita ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/26

Abstract: An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.

公开(公告)号：US10361061B2

公开(公告)日：2019-07-23

申请号：US15620144

申请日：2017-06-12

Applicant: JEOL Ltd.

Inventor： Yukihito Kondo ,  Ryusuke Sagawa

IPC: H01J37/22 ,  H01J37/09 ,  H01J37/04 ,  H01J37/147 ,  H01J37/28 ,  H01J37/244

Abstract: There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).