Invention Grant
- Patent Title: Electron microscope and image acquisition method
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Application No.: US15620144Application Date: 2017-06-12
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Publication No.: US10361061B2Publication Date: 2019-07-23
- Inventor: Yukihito Kondo , Ryusuke Sagawa
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2016-118163 20160614
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/09 ; H01J37/04 ; H01J37/147 ; H01J37/28 ; H01J37/244

Abstract:
There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).
Public/Granted literature
- US20180130634A1 Electron Microscope and Image Acquisition Method Public/Granted day:2018-05-10
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