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公开(公告)号:US20190393269A1
公开(公告)日:2019-12-26
申请号:US16018384
申请日:2018-06-26
发明人: JUNTAO LI , Kangguo Cheng , TAKASHI ANDO , DEXIN KONG
摘要: Embodiments of the invention provide a semiconductor memory device. In some embodiments, the device includes a bottom electrode extending in a y-direction relative to top surface of a substrate and a top electrode extending in an x-direction relative to the top surface of the substrate. An active area is located at the cross-section between the bottom electrode and the top electrode and is located on vertical side walls extending in a z-direction of the semiconductor memory device with respect to the top surface of the substrate. An insulating layer is located in the active area in between the top electrode and the bottom electrode.
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公开(公告)号:US20230189496A1
公开(公告)日:2023-06-15
申请号:US17644076
申请日:2021-12-13
IPC分类号: H01L27/11 , H01L29/06 , H01L29/423 , H01L29/786
CPC分类号: H01L27/1108 , H01L29/0665 , H01L29/42392 , H01L29/0649 , H01L29/78696
摘要: A semiconductor device is provided. The semiconductor device includes a first device including a first nanosheet stack formed on a substrate, the first nanosheet stack including alternating layers of a first work function metal (WFM) gate layer and an active semiconductor layer, a second nanosheet stack formed on the substrate, the second nanosheet stack including alternating layers of a second WFM gate layer and the active semiconductor layer, a shallow trench isolation (STI) region formed in the substrate between the first nanosheet stack and the second nanosheet stack, and an STI divot formed in the STI region. The first WFM gate layer of the first nanosheet stack is formed in the STI divot.
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3.
公开(公告)号:US20200312912A1
公开(公告)日:2020-10-01
申请号:US16368065
申请日:2019-03-28
发明人: REINALDO VEGA , TAKASHI ANDO , HARI MALLELA , Li-Wen Hung
摘要: A stacked resistive random access memory (ReRAM) structure is provided. The stacked ReRAM structure includes a channel, a ReRAM cell sub-structure and a contact via sub-structure. The ReRAM cell structure includes ReRAM cell, drain, gate and source layers, which are insulated from one another and respectively disposed in operative contact with the channel. The contact via sub-structures includes first, second, third and fourth contact vias, which are separate from one another. The first contact via is disposed in exclusive operative contact with the ReRAM cell layer. The second contact via is disposed in exclusive operative contact with the drain layer. The third contact via is disposed in exclusive operative contact with the gate layer. The fourth contact via is disposed in exclusive operative contact with the source layer.
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公开(公告)号:US20190207110A1
公开(公告)日:2019-07-04
申请号:US16252774
申请日:2019-01-21
摘要: Embodiments of the invention are directed to a resistive switching device (RSD) that includes a first terminal, a second terminal, an active region having a switchable conduction state, and a protuberant contact communicatively coupled to the first terminal. The protuberant contact is configured to communicatively couple the first terminal through a first barrier liner to a first electrode line of a crossbar array. In embodiments of the invention, the protuberant contact is positioned with respect to the first barrier liner such that the first barrier liner does not impacting the switchable conduction state of the active region. In embodiments of the invention, the protuberant contact is positioned with respect to the first barrier liner such that the first barrier liner does not directly contact the first terminal.
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公开(公告)号:US20230263077A1
公开(公告)日:2023-08-17
申请号:US18164125
申请日:2023-02-03
发明人: TAKASHI ANDO , HIROYUKI MIYAZOE , EDUARD ALBERT CARTIER , BABAR KHAN , YOUNGSEOK KIM , DEXIN KONG , SOON-CHEON SEO , JOEL P. DE SOUZA
CPC分类号: H10N70/041 , H10B63/80 , H10N70/021 , H10N70/826 , H10N70/841 , H10N70/8833
摘要: Embodiments of the invention provide a resistive switching device that includes a metal interconnect electrode and a memory stack over the metal interconnect electrode. The memory stack includes a plurality of layers that includes a top electrode, a plasma-treated bottom electrode, and a dielectric layer between the top electrode and the plasma-treated bottom electrode. The plasma-treated bottom electrode includes a portion of a blanket bottom electrode layer. The plasma-treated bottom electrode further includes a current-conducting filament characteristic that results from a charge particle treatment applied to the blanket bottom electrode while a top surface of the blanket bottom electrode is exposed.
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公开(公告)号:US20210391536A1
公开(公告)日:2021-12-16
申请号:US16898527
申请日:2020-06-11
发明人: TAKASHI ANDO , HIROYUKI MIYAZOE , EDUARD ALBERT CARTIER , BABAR KHAN , YOUNGSEOK KIM , DEXIN KONG , SOON-CHEON SEO , JOEL P. DE SOUZA
摘要: Provided are embodiments for a semiconductor device. The semiconductor device includes a bottom electrode, wherein the bottom electrode is formed on a metal interconnect electrode, and a dielectric layer on a surface of the bottom electrode. The semiconductor device also includes a top electrode formed on a surface of the dielectric layer, wherein at least one of the top electrode or the bottom electrode is a plasma treated top electrode or plasma treated bottom electrode. Also provided are embodiments for a method of fabricating a resistive switching device where at least one of the plurality of layers of the memory stack is processed with a charge particle treatment.
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公开(公告)号:US20210020780A1
公开(公告)日:2021-01-21
申请号:US16513871
申请日:2019-07-17
IPC分类号: H01L29/786 , H01L29/24 , G06N3/063
摘要: A neuromorphic device includes a metal-oxide channel layer that has a variable-resistance between a first terminal and a second terminal. The neuromorphic device further includes a metal-oxide charge transfer layer over the metal-oxide channel layer that causes the metal-oxide channel layer to vary in resistance based on charge exchange between the metal-oxide charge transfer layer and the metal-oxide channel layer in accordance with an applied input signal. The neuromorphic device further includes a third terminal that applies the signal to the metal-oxide charge transfer layer and the metal-oxide channel layer.
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公开(公告)号:US20200091245A1
公开(公告)日:2020-03-19
申请号:US16691724
申请日:2019-11-22
发明人: JUNTAO LI , Kangguo Cheng , TAKASHI ANDO , DEXIN KONG
摘要: Embodiments of the invention provide a semiconductor memory device. In some embodiments, the device includes a bottom electrode extending in a y-direction relative to top surface of a substrate and a top electrode extending in an x-direction relative to the top surface of the substrate. An active area is located at the cross-section between the bottom electrode and the top electrode and is located on vertical side walls extending in a z-direction of the semiconductor memory device with respect to the top surface of the substrate. An insulating layer is located in the active area in between the top electrode and the bottom electrode.
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9.
公开(公告)号:US20190341314A1
公开(公告)日:2019-11-07
申请号:US15969252
申请日:2018-05-02
发明人: TAKASHI ANDO , CHOONGHYUN LEE , JINGYUN ZHANG , POUYA HASHEMI
IPC分类号: H01L21/8238 , H01L21/28 , H01L27/092 , H01L29/49 , H01L29/51 , H01L29/78
摘要: A method of fabricating a semiconductor device includes providing a high-k dielectric layer arranged on a channel region including a first transistor area and a second transistor area. The method further includes depositing a multivalent oxide layer directly on the high-k dielectric layer of the first transistor area. The method includes depositing a first work function metal on the multivalent oxide layer of the first transistor area and directly on the high-k dielectric layer of the second transistor area.
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公开(公告)号:US20170005179A1
公开(公告)日:2017-01-05
申请号:US15267887
申请日:2016-09-16
发明人: TAKASHI ANDO , EDUARD A. CARTIER , KISIK CHOI , VIJAY NARAYANAN
IPC分类号: H01L29/66 , H01L21/321 , H01L21/3205 , H01L21/28
CPC分类号: H01L29/66545 , H01L21/02532 , H01L21/02592 , H01L21/02595 , H01L21/28017 , H01L21/28088 , H01L21/32055 , H01L21/321 , H01L21/324 , H01L29/4232 , H01L29/66 , H01L29/66795 , H01L29/6681
摘要: A method of fabricating a replacement gate stack for a semiconductor device includes the following steps after removal of a dummy gate: growing a high-k dielectric layer over the area vacated by the dummy gate; depositing a thin metal layer over the high-k dielectric layer; depositing a sacrificial layer over the thin metal layer; performing a first rapid thermal anneal; removing the sacrificial layer; and depositing a metal layer of low resistivity metal for gap fill.
摘要翻译: 一种制造用于半导体器件的替代栅极堆叠的方法包括在去除伪栅极之后的以下步骤:在由虚拟栅极腾出的区域上生长高k电介质层; 在高k电介质层上沉积薄金属层; 在所述薄金属层上沉积牺牲层; 执行第一快速热退火; 去除牺牲层; 以及沉积用于间隙填充的低电阻率金属的金属层。
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