公开(公告)号：US20170005053A1

公开(公告)日：2017-01-05

申请号：US15255588

申请日：2016-09-02

申请人： International Business Machines Corporation

发明人： Akihiro HORIBE ,  Keiji MATSUMOTO ,  Keishi OKAMOTO ,  Kazushige TORIYAMA

IPC分类号： H01L23/00

CPC分类号： H01L24/13 ,  B23K3/0623 ,  H01L21/4867 ,  H01L21/76802 ,  H01L21/76877 ,  H01L23/34 ,  H01L23/345 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49816 ,  H01L23/49894 ,  H01L23/5226 ,  H01L24/08 ,  H01L24/11 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/73 ,  H01L24/742 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05027 ,  H01L2224/11013 ,  H01L2224/1131 ,  H01L2224/11312 ,  H01L2224/11416 ,  H01L2224/1148 ,  H01L2224/11618 ,  H01L2224/13013 ,  H01L2224/13014 ,  H01L2224/13015 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/14051 ,  H01L2224/16111 ,  H01L2224/16145 ,  H01L2224/16227 ,  H01L2224/16238 ,  H01L2224/17519 ,  H01L2224/27 ,  H01L2224/27416 ,  H01L2224/27515 ,  H01L2224/27618 ,  H01L2224/29011 ,  H01L2224/29012 ,  H01L2224/29076 ,  H01L2224/29109 ,  H01L2224/29111 ,  H01L2224/2919 ,  H01L2224/73104 ,  H01L2224/73204 ,  H01L2224/81 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81801 ,  H01L2224/81815 ,  H01L2224/83 ,  H01L2224/83203 ,  H01L2224/83204 ,  H01L2224/9211 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2225/06568 ,  H01L2924/00 ,  H01L2924/014 ,  H01L2924/06 ,  H01L2924/12042 ,  H01L2924/3512 ,  H01L2924/37001 ,  H01L2924/3841 ,  H01L2224/11 ,  H01L2924/00014 ,  H01L2924/0103 ,  H01L2924/01083 ,  H01L2924/01049 ,  H01L2924/01051 ,  H01L2924/01028 ,  H01L2924/01027 ,  H01L2924/01032 ,  H01L2924/01026 ,  H01L2924/01047 ,  H01L2924/01029 ,  H01L2924/00013 ,  H01L2924/00012

摘要： Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.

摘要翻译： 通过使用具有能够减小施加在倒装芯片连接的芯片上的应力的形状的基板来实现高度可靠的芯片安装，使得施加在芯片上的应力减小，并且具有低的层间绝缘层的分离 介电常数（low-k）最小。 具体地，在芯片安装结构中，示出了具有低介电常数（低-k）的层间绝缘层的芯片通过凸块倒装芯片连接到基板。 在芯片安装结构中，基板具有这样的形状，使得由于热应力而在芯片的角部施加在层间绝缘层上的机械应力减小，由于热膨胀系数之间的差异导致的热应力 芯片和基板。

公开(公告)号：US20180076162A1

公开(公告)日：2018-03-15

申请号：US15804478

申请日：2017-11-06

申请人： International Business Machines Corporation

发明人： Akihiro HORIBE ,  Keiji MATSUMOTO ,  Keishi OKAMOTO ,  Kazushige TORIYAMA

IPC分类号： H01L23/00 ,  H01L25/00 ,  B23K3/06 ,  H01L23/522 ,  H01L23/498 ,  H01L23/34 ,  H01L21/768 ,  H01L21/48 ,  H01L25/065 ,  H01L23/488 ,  H01L23/48

CPC分类号： H01L24/13 ,  B23K3/0623 ,  H01L21/4867 ,  H01L21/76802 ,  H01L21/76877 ,  H01L23/34 ,  H01L23/345 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49816 ,  H01L23/49894 ,  H01L23/5226 ,  H01L24/08 ,  H01L24/11 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/73 ,  H01L24/742 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05027 ,  H01L2224/11013 ,  H01L2224/1131 ,  H01L2224/11312 ,  H01L2224/11416 ,  H01L2224/1148 ,  H01L2224/11618 ,  H01L2224/13013 ,  H01L2224/13014 ,  H01L2224/13015 ,  H01L2224/13109 ,  H01L2224/13111 ,  H01L2224/14051 ,  H01L2224/16111 ,  H01L2224/16145 ,  H01L2224/16227 ,  H01L2224/16238 ,  H01L2224/17519 ,  H01L2224/27 ,  H01L2224/27416 ,  H01L2224/27515 ,  H01L2224/27618 ,  H01L2224/29011 ,  H01L2224/29012 ,  H01L2224/29076 ,  H01L2224/29109 ,  H01L2224/29111 ,  H01L2224/2919 ,  H01L2224/73104 ,  H01L2224/73204 ,  H01L2224/81 ,  H01L2224/81191 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81801 ,  H01L2224/81815 ,  H01L2224/83 ,  H01L2224/83203 ,  H01L2224/83204 ,  H01L2224/9211 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2225/06568 ,  H01L2924/00 ,  H01L2924/014 ,  H01L2924/06 ,  H01L2924/12042 ,  H01L2924/3512 ,  H01L2924/37001 ,  H01L2924/3841 ,  H01L2224/11 ,  H01L2924/00014 ,  H01L2924/0103 ,  H01L2924/01083 ,  H01L2924/01049 ,  H01L2924/01051 ,  H01L2924/01028 ,  H01L2924/01027 ,  H01L2924/01032 ,  H01L2924/01026 ,  H01L2924/01047 ,  H01L2924/01029 ,  H01L2924/00013 ,  H01L2924/00012

摘要： Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.