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公开(公告)号:US20250005371A1
公开(公告)日:2025-01-02
申请号:US18217522
申请日:2023-06-30
Applicant: International Business Machines Corporation
Inventor: Arvind Kumar , Mudhakar Srivatsa , Raghu Kiran Ganti , Joshua M. Rubin
Abstract: A method for training and fine-tuning an artificial intelligence model is disclosed. In one embodiment, such a method distributes, across multiple chiplets of a package, functionality associated with a deep neural network. The method implements, within a first set of chiplets, frozen layers of the deep neural network. By contrast, the method implements, within a second set of chiplets, trainable layers of the deep neural network. The number of chiplets in the second set may be smaller than the number of chiplets in the first set and may consist of a single chiplet in some embodiments. In certain embodiments, the second set of chiplets has one or more of additional memory capacity and additional processing capacity compared to the first set of chiplets in order to train and fine tune the trainable layers. A corresponding apparatus is also disclosed.
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公开(公告)号:US20240250070A1
公开(公告)日:2024-07-25
申请号:US18159111
申请日:2023-01-25
Applicant: International Business Machines Corporation
Inventor: Kyu-hyoun Kim , Arvind Kumar , Joshua M. Rubin , John W. Golz , Mounir Meghelli
IPC: H01L25/065 , H01L23/00 , H01L23/528 , H01L23/60 , H01L27/02 , H10B80/00
CPC classification number: H01L25/0657 , H01L23/5286 , H01L23/60 , H01L24/16 , H01L24/48 , H01L27/0248 , H10B80/00 , H01L2224/48147 , H01L2225/06541 , H01L2924/15311
Abstract: Embodiments of the present invention are directed to processing methods and resulting structures for three-dimensional integrated circuits (3D ICs) having facilitator dies in a hierarchical configuration. In a non-limiting embodiment, a method includes forming a plurality of stacked dies. The plurality of stacked dies includes a bottom die having a first die type, a plurality of upper dies having a second die type different than the first die type, and a facilitator die having a third die type different than the first die type and the second die type. At least one of a signal connection and a power distribution line are formed hierarchically between the bottom die, the plurality of upper dies, and the facilitator die.
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公开(公告)号:US20240222223A1
公开(公告)日:2024-07-04
申请号:US18092136
申请日:2022-12-30
Applicant: International Business Machines Corporation
Inventor: Timothy J. Chainer , Todd Edward Takken , Joshua M. Rubin , Arvind Kumar
IPC: H01L23/46 , H01L23/367 , H01L23/433 , H01L25/065
CPC classification number: H01L23/46 , H01L23/3677 , H01L23/4332 , H01L25/0655
Abstract: An exemplary apparatus includes a substrate; a plurality of chips mounted onto the substrate; a plurality of cold plates corresponding to the plurality of chips; means for pressing each of the cold plates toward a corresponding one of the chips; means for delivering coolant flow to the cold plates; and means for adjusting the cooling power of the plurality of cold plates, responsive to at least one sensed parameter of the plurality of chips.
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公开(公告)号:US11133259B2
公开(公告)日:2021-09-28
申请号:US16712231
申请日:2019-12-12
Applicant: International Business Machines Corporation
Inventor: Joshua M. Rubin , Arvind Kumar , Lawrence A. Clevenger , Steven Lorenz Wright , Wiren Dale Becker , Xiao Hu Liu
IPC: H01L23/48 , H01L23/34 , H01L21/00 , H01L21/4763 , H01L23/538 , H01L25/18 , H01L21/48 , H01L23/00 , H01L23/498 , H01L25/065
Abstract: A multi-chip package structure includes a package substrate, an interconnect bridge device, first and second integrated circuit chips, and a connection structure. The first integrated circuit chip is flip-chip attached to at least the interconnect bridge device. The second integrated circuit chip is flip-chip attached to the interconnect bridge device and to the package substrate. The interconnect bridge device includes (i) wiring that is configured to provide chip-to-chip connections between the first and second integrated circuit chips and (ii) an embedded power distribution network that is configured to distribute at least one of a positive power supply voltage and a negative power supply voltage to at least one of the first and second integrated circuit chips attached to the interconnect bridge device. The connection structure (e.g., wire bond, injection molded solder, etc.) connects the embedded power distribution network to a power supply voltage contact of the package substrate.
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公开(公告)号:US11081424B2
公开(公告)日:2021-08-03
申请号:US16444383
申请日:2019-06-18
Applicant: International Business Machines Corporation
Inventor: Ravi K. Bonam , Kamal K. Sikka , Joshua M. Rubin , Iqbal Rashid Saraf , Fee Li Lie
IPC: H01L23/473 , H01L21/768 , F28F3/12
Abstract: Embodiments of the present invention are directed to microchannels having varied critical dimensions for efficient cooling of semiconductor integrated circuit chip packages. In a non-limiting embodiment of the invention, a patterning stack is formed over a substrate. The patterning stack includes a hard mask, an etch transfer layer on the hard mask, and a photoresist on the etch transfer layer. A manifold trench is formed in a first region of the substrate and is recessed below a surface of the etch transfer layer. A microchannel trench is formed in a second region of the substrate to expose the surface of the etch transfer layer. The manifold trench and the microchannel trench are recessed such that the manifold trench extends into the hard mask and the microchannel trench extends into the etch transfer layer. A manifold and a microchannel are formed in the substrate by pattern transfer.
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公开(公告)号:US20210159211A1
公开(公告)日:2021-05-27
申请号:US16697682
申请日:2019-11-27
Applicant: International Business Machines Corporation
Inventor: Joshua M. Rubin , Steven Lorenz Wright , Lawrence A. Clevenger
Abstract: Techniques are provided for constructing multi-chip package structures using pre-positioned interconnect bridge devices that are fabricated on a bridge wafer. For example, integrated circuit chips are mounted to a bridge wafer which is formed to have a plurality of pre-positioned interconnect bridge devices, wherein at least two integrated circuit chips are joined to each interconnect bridge device, and wherein each interconnect bridge device includes wiring to provide chip-to-chip connections between the integrated circuit chips connected to the interconnect bridge device. A wafer-level molding layer is formed on the bridge wafer to encapsulate the integrated circuit chips mounted to the bridge wafer. The interconnect bridge devices are released from the bridge wafer. The wafer-level molding layer is then diced to form a plurality of individual multi-chip modules.
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公开(公告)号:US20210020529A1
公开(公告)日:2021-01-21
申请号:US16517568
申请日:2019-07-20
Applicant: International Business Machines Corporation
Inventor: Dale Curtis McHerron , Kamal K. Sikka , Joshua M. Rubin , Ravi K. Bonam , Ramachandra Divakaruni , William J. Starke , Maryse Courmoyer
IPC: H01L23/13 , H01L23/538 , H01L23/532 , H01L27/24
Abstract: The present invention includes a bridge connector with one or more semiconductor layers in a bridge connector shape. The shape has one or more edges, one or more bridge connector contacts on a surface of the shape, and one or more bridge connectors. The bridge connectors run through one or more of the semiconductor layers and connect two or more of the bridge connector contacts. The bridge connector contacts are with a tolerance distance from one of the edges. In some embodiments the bridge connector is a central bridge connector that connects two or more chips disposed on the substrate of a multi-chip module (MCM). The chips have chip contacts that are on an interior corner of the chip. The interior corners face one another. The central bridge connector overlaps the interior corners so that each of one or more of the bridge contacts is in electrical contact with each of one or more of the chip contacts. In some embodiments, overlap is minimized to permit more access to the surface of the chips. Arrays of MCMs and methods of making bridge connects are disclosed. Bridge connector shapes include: rectangular, window pane, plus-shaped, circular shaped, and polygonal-shaped.
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公开(公告)号:US10755985B2
公开(公告)日:2020-08-25
申请号:US16010449
申请日:2018-06-16
Applicant: International Business Machines Corporation
Inventor: Shogo Mochizuki , Alexander Reznicek , Joshua M. Rubin , Junli Wang
IPC: H01L21/8238 , H01L29/06 , H01L29/423 , H01L29/786 , H01L29/49 , B82Y10/00 , H01L29/40 , H01L29/775 , H01L27/092
Abstract: Gate metal patterning techniques enable the incorporation of different work function metals in CMOS devices such as nanosheet transistor devices, vertical FETs, and FinFETs. Such techniques facilitate removal of gate metal from one region of a device without damage from over-etching to an adjacent region. The fabrication of CMOS devices with adjoining nFET/pFET gate structures and having very tight gate pitch is also facilitated. The techniques further enable the fabrication of CMOS devices with adjoining gate structures that require relatively long etch times for removal of gate metal therefrom, such as nanosheet transistors. A nanosheet transistor device including dual metal gates as fabricated allows tight integration.
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9.
公开(公告)号:US10714420B1
公开(公告)日:2020-07-14
申请号:US16237958
申请日:2019-01-02
Applicant: International Business Machines Corporation
Inventor: Joshua M. Rubin , Joel A. Silberman , Robert Groves
IPC: H01L21/02 , H01L23/522 , H01L23/528 , H01L21/768 , H01L49/02 , H01L23/66
Abstract: Devices and methods are provided for fabricating a metal-insulator-metal capacitor within an interconnect structure (e.g., back-end-of-line interconnect structure) to provide capacitive decoupling between positive and negative power supply voltage lines of a power distribution network. Various via contact configurations including interlevel via contacts and truncated via contacts are utilized to connect the metal-insulator-metal capacitor electrodes to power supply voltage lines of the power distribution network to provide an array of high-density, low resistance via contact connections at various locations across the capacitor electrodes to reduce the resistance of the metal-insulator-metal capacitor and, thus, enhance the transient response time and increase the cutoff frequency of the metal-insulator-metal capacitor. The truncated via contacts allow for higher density via contact connections to the capacitor electrodes in regions which have a dense array of wiring of a single polarity, where interlevel via contacts cannot be utilized to provide contacts to the capacitor electrodes.
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10.
公开(公告)号:US20200126987A1
公开(公告)日:2020-04-23
申请号:US16166996
申请日:2018-10-22
Applicant: International Business Machines Corporation
Inventor: Joshua M. Rubin , Nicolas Loubet , Terence B. Hook
IPC: H01L27/092 , H01L29/08 , H01L29/66 , H01L29/06 , H01L29/78 , H01L29/49 , H01L21/768 , H01L23/522 , H01L21/8238
Abstract: Devices and methods are provided for fabricating metallic interlayer via contacts within source/drain regions of field-effect transistor devices of a monolithic three-dimensional semiconductor integrated circuit device. For example, a semiconductor integrated circuit device includes a first device layer and a second device layer disposed on the first device layer. The first device layer includes a metallic interconnect structure formed in an insulating layer. The second device layer includes first and second field-effect transistor devices having respective first and second gate structures. A metallic interlayer via contact is disposed between the first and second gate structures in contact with the metallic interconnect structure of the first device layer, wherein a width of the metallic interlayer via contact is defined by a spacing between adjacent sidewalls of the first and second gate structures. Epitaxial source/drain layers for the first and second field-effect transistor devices are embedded within the metallic interlayer via contact.
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