METHOD FOR IMPROVING ENDURANCE PERFORMANCE OF 3D INTEGRATED RESISTIVE SWITCHING MEMORY

    公开(公告)号:US20190006584A1

    公开(公告)日:2019-01-03

    申请号:US16064120

    申请日:2016-08-12

    IPC分类号: H01L45/00

    摘要: A method for improving endurance of 3D integrated resistive switching memory, comprising: Step 1: Calculating the temperature distribution in the integrated array by the 3D Fourier heat conduction equation; Step 2, selecting heat transfer mode; Step 3: selecting an appropriate array structure; Step 4: analyzing the influence of integration degree on temperature in the array; Step 5: evaluating the endurance performance in the array; and Step 6: changing the array parameters according to the evaluation result to improve the endurance performance. According to the method of the present invention, based on the thermal transmission mode in the 3D integrated resistive switching device, a suitable 3D integrated array is selected to analyze the influence of the integration degree on the device temperature so as to evaluate and improve the endurance of the 3D integrated resistive switching device.

    METHOD FOR OBTAINING A CONTACT RESISTANCE OF A PLANAR DEVICE

    公开(公告)号:US20210165027A1

    公开(公告)日:2021-06-03

    申请号:US16065582

    申请日:2015-12-25

    IPC分类号: G01R27/20 G01R27/08

    摘要: A method for obtaining a contact resistance of a planar device includes: obtaining a contact resistance of a planar device by using a potential measurement method, in the measurement of the surface potential distribution, the planar device is in a state of current flowing, a certain voltage drop is formed at a junction area of the device; extracting the voltage drop measured through the Kelvin microscope by using a linear fitting method; and dividing the measured voltage drop by the current flowing through the device, thereby accurately calculating the magnitude of the contact resistance at the junction area of the planar device. With the present invention, the contact resistance of the planar device can be precisely measured, which is suitable for the contact resistance measurement experiments of devices such as thin film transistors and diodes. The invention has the advantages of reasonable theory, accurate result, simple and easy operation, and is favorable for optimizing the device performance and establishing a complete electrical model of the device.