知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

7 records (took 0.013 seconds)

    Charged Particle Beam Device
    2.
    发明申请
    Charged Particle Beam Device 有权
    带电粒子束装置

    公开(公告)号：US20160240348A1

    公开(公告)日：2016-08-18

    申请号：US15023936

    申请日：2014-06-11

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

    IPC: H01J37/28

    CPC classification number: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J2237/2803 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/3045

    Abstract: The scanning charged particle beam microscope according to the present invention is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

    Abstract translation: 根据本发明的扫描带电粒子束显微镜的特征在于，在获取FOV（视场）的图像时，设置间隔射束照射点，然后控制偏转器，使得带电粒子束扫描 当带电粒子束照射到每个照射点之间的样品上的位置时，比相对于每个照射点的样品照射样品上的位置（对应于每个像素检测的样品上的位置）更快地执行 一个信号）。 这允许减轻或控制在FOV内发生的微域带电的影响。

    Charged Particle Beam Device
    4.
    发明申请
    Charged Particle Beam Device 审中-公开

    公开(公告)号：US20190103250A1

    公开(公告)日：2019-04-04

    申请号：US16136534

    申请日：2018-09-20

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO

    IPC: H01J37/28 ,  H01J37/26

    Abstract: There is proposed a charged particle beam device that generates a first signal waveform on the basis of scanning, the number of scanning lines of which is one or more, the scanning intersecting an edge of a pattern on a sample, generates a second signal waveform for a first area that is wider than the one scanning line on the basis of scanning, the number of scanning lines of which is larger than that of scanning for generating the first signal waveform, then determines a deviation between the generated first and second signal waveforms, and thereby determines, from the deviation, correction data used at the time of dimensional measurement.

    Charged Particle Beam Device
    7.
    发明申请
    Charged Particle Beam Device 有权
    带电粒子束装置

    公开(公告)号：US20150357154A1

    公开(公告)日：2015-12-10

    申请号：US14762621

    申请日：2014-02-05

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI

    IPC: H01J37/147 ,  H01J37/28

    CPC classification number: H01J37/1474 ,  H01J37/147 ,  H01J37/22 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2817

    Abstract: An object of the invention is to provide a charged particle beam apparatus capable of performing high-precision measurement even on a pattern in which a width of edges is narrow and inherent peaks of the edges cannot be easily detected. In order to achieve the above object, there is proposed a charged particle beam apparatus including an opening portion forming member having a passage opening of a charged particle beam and a detector for detecting charged particles emitted from a sample or charged particles generated by causing the charged particles to collide with the opening portion forming member, the charged particle beam apparatus including: a deflector for deflecting the charged particles emitted from the sample; and a control device for controlling the deflector, the control device performing pattern measurement with the use of a first detected signal in which a signal of one edge is emphasized relatively more than a signal of another edge among a plurality of edges on the sample and a second detected signal in which the signal of the another edge is emphasized relatively more than the signal of the one edge among the plurality of edges.

    Abstract translation: 本发明的目的是提供一种即使在边缘宽度窄的图案上也能够进行高精度测量的带电粒子束装置，不能容易地检测到边缘的固有峰值。 为了实现上述目的，提出了一种带电粒子束装置，其包括具有带电粒子束的通道开口的开口部分形成部件和用于检测从样品发射的带电粒子或通过使带电粒子产生的带电粒子的检测器 粒子与开口部形成部件碰撞，带电粒子束装置包括：偏转器，用于偏转从样品发射的带电粒子; 以及用于控制偏转器的控制装置，所述控制装置使用第一检测信号执行图案测量，其中一个边缘的信号被相对地比样本上的多个边缘中的另一边缘的信号强调，并且 第二检测信号，其中另一边缘的信号比多个边缘中的一个边缘的信号相对地强调。

Patent Agency Ranking