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    COMPOSITE CHARGED PARTICLE BEAM APPARATUS
    3.
    发明申请
    COMPOSITE CHARGED PARTICLE BEAM APPARATUS 审中-公开
    复合充电颗粒光束装置

    公开(公告)号：US20160093464A1

    公开(公告)日：2016-03-31

    申请号：US14868526

    申请日：2015-09-29

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Hiroyuki SUZUKI ,  Shinya KITAYAMA

    IPC: H01J37/20 ,  H01J37/285

    CPC classification number: H01J37/20 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/31745

    Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first the charged particle beam of the thin sample with a second charged particle beam, and a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage.

    Abstract translation: 复合带电粒子束装置包括：用第一带电粒子束照射细样品的第一带电粒子束柱;第二带电粒子束柱，用第二带电粒子束柱照射薄样品的第一带电粒子束的照射位置， 带电粒子束和固定薄样品的样品保持器以及安装有样品架的样品台。 样品架能够在与样品台上的第一旋转轴线周围的薄样品的观察表面平行的表面内旋转薄样品。

    CHARGED PARTICLE BEAM APPARATUS
    4.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 审中-公开

    公开(公告)号：US20200251303A1

    公开(公告)日：2020-08-06

    申请号：US16495506

    申请日：2018-03-27

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Toshiaki FUJI ,  Satoshi TOMIMATSU ,  Hiroyuki SUZUKI

    IPC: H01J37/28 ,  H01J37/20 ,  H01J37/30

    Abstract: This charged particle beam apparatus is provided with: a charged particle beam lens-barrel for irradiating a sample with a charged particle beams; a tilting base that has a first sample holding portion capable of holding the sample and that holds the first sample holding portion to be turnable about a first axis; a tilting base that has a second sample holding portion capable of holding the sample and that holds the second sample holding portion to be turnable about a second axis parallel to the first axis; and a driving force supplier that supplies to the tilting bases with a driving force for turning the tilting bases in association with each other.

    COMPOSITE CHARGED PARTICLE BEAM APPARATUS
    5.
    发明申请
    COMPOSITE CHARGED PARTICLE BEAM APPARATUS 有权

    公开(公告)号：US20210151283A1

    公开(公告)日：2021-05-20

    申请号：US17129700

    申请日：2020-12-21

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Hiroyuki SUZUKI ,  Shinya KITAYAMA

    IPC: H01J37/20

    Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, and a second charged particle beam column that irradiates an irradiation position of the first charged particle beam on the thin sample with a second charged particle beam. A sample holder as a base stage disposed on a sample stage, a motor-driven rotation driving section, a rotation stand rotatable about a flip axis by the driving of the rotation driving section, and a TEM grid that holds the thin sample. The TEM grid is movable within a surface perpendicular to an observation surface of the thin sample together with the rotation stand by being reciprocally driven around the flip axis by the driving section.

    COMPOSITE CHARGED PARTICLE BEAM APPARATUS
    6.
    发明申请
    COMPOSITE CHARGED PARTICLE BEAM APPARATUS 审中-公开

    公开(公告)号：US20190259569A1

    公开(公告)日：2019-08-22

    申请号：US16400901

    申请日：2019-05-01

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Hiroyuki SUZUKI ,  Shinya KITAYAMA

    IPC: H01J37/20

    Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam, a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage.

    CHARGED PARTICLE BEAM APPARATUS, AND METHOD AND PROGRAM FOR LIMITING STAGE DRIVING RANGE THEREOF
    7.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS, AND METHOD AND PROGRAM FOR LIMITING STAGE DRIVING RANGE THEREOF 审中-公开

    公开(公告)号：US20190259568A1

    公开(公告)日：2019-08-22

    申请号：US16279646

    申请日：2019-02-19

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Hiroyuki SUZUKI

    IPC: H01J37/20 ,  H01J37/08 ,  H01J37/06 ,  H01J37/244 ,  H01J37/16

    Abstract: Disclosed is a charged particle beam apparatus including a stage supporting a sample holder; a stage driving mechanism; a sample chamber; a focused ion beam column; an electron beam column; a detector detecting secondary ions or secondary electrons generated from the sample; a reading unit reading identification information attached to the sample holder; a memory unit storing holder shape information indicating a correspondence relationship between the identification information and a shape of the sample holder, and design information that is shape information of an internal structure of the sample chamber; and a stage driving range limiting unit limiting a driving range of the stage supporting the sample holder on the basis of the shape of the sample holder that is acquired from the identification information read by the reading unit and the holder shape information, and on the basis of a shape of the internal structure.

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