公开(公告)号：US20140077097A1

公开(公告)日：2014-03-20

申请号：US14025985

申请日：2013-09-13

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN ,  Toshiaki FUJII

IPC: G01N23/203

CPC classification number: G01N23/203

Abstract: A crystal analysis apparatus includes: a measurement data storage configured to store electron back-scattering pattern (EBSP) data measured at electron beam irradiation points on a plurality of cross-sections of a sample formed substantially in parallel at prescribed intervals; a crystal orientation database configured to accumulate therein information of crystal orientations corresponding to EBSPs; and a map constructing unit that constructs a three-dimensional crystal orientation map based on distribution of crystal orientations in normal directions of a plurality of faces of a polyhedral image having the cross-sections arranged at the prescribed intervals by reading out the crystal orientations in the normal directions of the faces from the crystal orientation database on the basis of the EBSP data stored in the measurement data storage.

Abstract translation: 晶体分析装置包括：测量数据存储器，被配置为存储在电子束照射点处测量的电子后向散射图案（EBSP）数据，所述数据基本上以规定间隔平行形成的样品的多个横截面; 晶体取向数据库，其被配置为在其中累积与EBSP对应的晶体取向的信息; 以及地图构造单元，其基于通过读出所述三维晶体取向图中的晶体取向，以基于以规定间隔布置的多面体图像的多个面的多个面的正交方向的分布来构造三维晶体取向图 根据存储在测量数据存储器中的EBSP数据，从晶体取向数据库的面的法线方向。

公开(公告)号：US20160247662A1

公开(公告)日：2016-08-25

申请号：US15048073

申请日：2016-02-19

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiaki FUJII ,  Hiroyuki SUZUKI

IPC: H01J37/22 ,  H01J37/285 ,  H01J37/305

CPC classification number: H01J37/222 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J37/305 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/2062 ,  H01J2237/221 ,  H01J2237/2611 ,  H01J2237/31749

Abstract: A sample processing evaluation apparatus includes a charged particle beam column that irradiates a sample with charged particle beam, a sample holder that holds both ends of the sample, and a sample stage on which the sample holder is placed, in which the sample holder is configured to rotate the sample about a rotation axis between the sample stage and the charged particle beam column.

Abstract translation: 样品处理评价装置包括：带有带电粒子束照射样品的带电粒子束柱，保持样品两端的样品保持器和放置有样品架的样品台，其中样品架配置 以使样品围绕样品台和带电粒子束柱之间的旋转轴线旋转。

公开(公告)号：US20150226684A1

公开(公告)日：2015-08-13

申请号：US14696852

申请日：2015-04-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN ,  Toshiaki FUJII

IPC: G01N23/203

CPC classification number: G01N23/203

Abstract: A crystal analysis apparatus includes: a measurement data storage configured to store electron back-scattering pattern (EBSP) data measured at electron beam irradiation points on a plurality of cross-sections of a sample formed substantially in parallel at prescribed intervals; a crystal orientation database configured to accumulate therein information of crystal orientations corresponding to EBSPs; and a map constructing unit that constructs a three-dimensional crystal orientation map based on distribution of crystal orientations in normal directions of a plurality of faces of a polyhedral image having the cross-sections arranged at the prescribed intervals by reading out the crystal orientations in the normal directions of the faces from the crystal orientation database on the basis of the EBSP data stored in the measurement data storage.

Abstract translation: 晶体分析装置包括：测量数据存储器，被配置为存储在电子束照射点处测量的电子后向散射图案（EBSP）数据，所述数据基本上以规定间隔大致平行地形成的样品的多个横截面上; 晶体取向数据库，其被配置为在其中累积与EBSP对应的晶体取向的信息; 以及地图构造单元，其基于通过读出所述三维晶体取向图中的晶体取向，以基于以规定间隔布置的多面体图像的多个面的多个面的正交方向的分布来构造三维晶体取向图 根据存储在测量数据存储器中的EBSP数据，从晶体取向数据库的面的法线方向。