公开(公告)号：US20210151283A1

公开(公告)日：2021-05-20

申请号：US17129700

申请日：2020-12-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Hiroyuki SUZUKI ,  Shinya KITAYAMA

IPC: H01J37/20

Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, and a second charged particle beam column that irradiates an irradiation position of the first charged particle beam on the thin sample with a second charged particle beam. A sample holder as a base stage disposed on a sample stage, a motor-driven rotation driving section, a rotation stand rotatable about a flip axis by the driving of the rotation driving section, and a TEM grid that holds the thin sample. The TEM grid is movable within a surface perpendicular to an observation surface of the thin sample together with the rotation stand by being reciprocally driven around the flip axis by the driving section.

公开(公告)号：US20190259569A1

公开(公告)日：2019-08-22

申请号：US16400901

申请日：2019-05-01

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Hiroyuki SUZUKI ,  Shinya KITAYAMA

IPC: H01J37/20

Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam, a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage.

公开(公告)号：US20160093464A1

公开(公告)日：2016-03-31

申请号：US14868526

申请日：2015-09-29

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Hiroyuki SUZUKI ,  Shinya KITAYAMA

IPC: H01J37/20 ,  H01J37/285

CPC classification number: H01J37/20 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/31745

Abstract: A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first the charged particle beam of the thin sample with a second charged particle beam, and a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage.

Abstract translation: 复合带电粒子束装置包括：用第一带电粒子束照射细样品的第一带电粒子束柱;第二带电粒子束柱，用第二带电粒子束柱照射薄样品的第一带电粒子束的照射位置， 带电粒子束和固定薄样品的样品保持器以及安装有样品架的样品台。 样品架能够在与样品台上的第一旋转轴线周围的薄样品的观察表面平行的表面内旋转薄样品。