公开(公告)号：US20150228640A1

公开(公告)日：2015-08-13

申请号：US14449028

申请日：2014-07-31

申请人： Electronics and Telecommunications Research Institute

发明人： JIN-GUN KOO ,  Jong II WON ,  Hyun-cheol BAE ,  Sang Gi KIM ,  Yil Suk YANG

IPC分类号： H01L27/06 ,  H01L29/78 ,  H01L29/66

CPC分类号： H01L29/0634 ,  H01L21/76224 ,  H01L21/8249 ,  H01L27/0623 ,  H01L27/0922 ,  H01L29/0657 ,  H01L29/1095 ,  H01L29/41741 ,  H01L29/6625 ,  H01L29/735 ,  H01L29/7813 ,  H01L29/7835

摘要： Provided is a semiconductor device. The semiconductor device includes: a first semiconductor layer having a first region with a first device and a second region with a second device; a device isolation pattern provided in the first semiconductor layer and electrically separating the first device and the second device from each other; a drain provided on a lower surface of the first region of the first semiconductor layer; and a second semiconductor layer provided on a lower surface of the second region of the first semiconductor layer.

摘要翻译： 提供一种半导体器件。 该半导体器件包括：第一半导体层，其具有带有第一器件的第一区域和具有第二器件的第二区域; 设置在所述第一半导体层中并将所述第一装置和所述第二装置彼此电分离的装置隔离图案; 设置在所述第一半导体层的所述第一区域的下表面上的漏极; 以及设置在所述第一半导体层的所述第二区域的下表面上的第二半导体层。

公开(公告)号：US20140086531A1

公开(公告)日：2014-03-27

申请号：US13794619

申请日：2013-03-11

申请人： Electronics and Telecommunications Research Institute

发明人： Sahnggi PARK ,  Sang Gi KIM ,  Jaegyu PARK ,  Gyungock KIM

IPC分类号： G02B6/34

CPC分类号： G02B6/34 ,  G02B6/12007 ,  G02B6/29326 ,  G02B6/29328 ,  G02B2006/12107

摘要： An optical filter of the inventive concept includes a slab waveguide disposed on a substrate, an input guide gate and an output guide gate spaced apart from each other in the slab waveguide, and an echelle grating filter disposed in the slab waveguide. The echelle grating filter has curvature and extends in a first direction. The echelle grating filter has gratings of sawtooth shape on one surface thereof. Light inputted through the input guide gate is totally reflected at the echelle grating filter by one reflecting process.

摘要翻译： 本发明构思的滤光器包括布置在基板上的平板波导，在平板波导中彼此间隔开的输入引导门和输出引导门，以及布置在平板波导中的梯形滤波器滤波器。 扇形光栅滤光片具有曲率并沿第一方向延伸。 梯形光栅滤光器在其一个表面上具有锯齿形格栅。 通过一个反射过程，通过输入引导门输入的光被光栅滤光片全反射。

公开(公告)号：US20140091388A1

公开(公告)日：2014-04-03

申请号：US14100780

申请日：2013-12-09

申请人： Electronics and Telecommunications Research Institute

发明人： Sang Gi KIM ,  Jin-Gun KOO ,  Seong Wook YOO ,  Jong-Moon PARK ,  Jin Ho LEE ,  KYOUNG IL NA ,  Yil Suk Yang ,  Jongdae KIM

IPC分类号： H01L29/78 ,  H01L29/10

CPC分类号： H01L29/7813 ,  H01L21/2255 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/1095 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7811

摘要： Provided are a semiconductor device and a method of fabricating the same. The method includes: forming a trench in a semiconductor substrate of a first conductive type; forming a trench dopant containing layer including a dopant of a second conductive type on a sidewall and a bottom surface of the trench; forming a doping region by diffusing the dopant in the trench dopant containing layer into the semiconductor substrate; and removing the trench dopant containing layer.

摘要翻译： 提供半导体器件及其制造方法。 该方法包括：在第一导电类型的半导体衬底中形成沟槽; 在所述沟槽的侧壁和底表面上形成包含第二导电类型的掺杂剂的沟槽掺杂剂层; 通过将所述沟槽掺杂剂含量层中的掺杂剂扩散到所述半导体衬底中来形成掺杂区域; 并去除含沟槽掺杂剂层。

公开(公告)号：US20170261705A1

公开(公告)日：2017-09-14

申请号：US15607717

申请日：2017-05-30

申请人： Electronics and Telecommunications Research Institute

发明人： Gyungock KIM ,  Hyundai PARK ,  In Gyoo KIM ,  Sang Hoon KIM ,  Ki Seok JANG ,  Sang Gi KIM ,  Jiho JOO ,  Yongseok CHOI ,  Hyuk Je KWON ,  Jaegyu PARK ,  Sun Ae KIM ,  Jin Hyuk OH ,  Myung Joon KWACK

IPC分类号： G02B6/42 ,  H01L27/15 ,  H01L31/167 ,  H01L21/762 ,  G02B6/13 ,  G02B6/12

CPC分类号： G02B6/12004 ,  G02B6/13 ,  G02B6/4206 ,  G02B6/4214 ,  H01L21/762 ,  H01L27/15 ,  H01L31/167

摘要： Disclosed are an optical input/output device and an opto-electronic system including the same. The device includes a bulk silicon substrate, at least one vertical-input light detection element monolithically integrated on a portion of the bulk silicon substrate, and at least one vertical-output light source element monolithically integrated on another portion of the bulk silicon substrate adjacent to the vertical-input light detection element. The vertical-output light source element includes a III-V compound semiconductor light source active layer combined with the bulk silicon substrate by a wafer bonding method.

公开(公告)号：US20140241662A1

公开(公告)日：2014-08-28

申请号：US13934006

申请日：2013-07-02

申请人： Electronics and Telecommunications Research Institute

发明人： Sahnggi PARK ,  Sang Gi KIM ,  Seong Wook YOO ,  Gyungock KIM

IPC分类号： G02B6/12

CPC分类号： H04B10/27 ,  G02B6/12004 ,  G02B6/29373 ,  G02B6/34 ,  G02B6/4214 ,  G02B2006/12114

摘要： An optical device module includes a substrate, an interlayer insulating layer on the substrate, an optical waveguide on the interlayer insulating layer, an optical device on the optical waveguide, and a prism disposed between the optical device and the optical waveguide. The prism has a refractive index greater than a refractive index of the optical waveguide.

摘要翻译： 光学器件模块包括衬底，衬底上的层间绝缘层，层间绝缘层上的光波导，光波导上的光学器件，以及设置在光学器件和光波导之间的棱镜。 棱镜的折射率大于光波导的折射率。

公开(公告)号：US20170269298A1

公开(公告)日：2017-09-21

申请号：US15607726

申请日：2017-05-30

申请人： Electronics and Telecommunications Research Institute

发明人： Gyungock KIM ,  Hyundai PARK ,  In Gyoo KIM ,  Sang Hoon KIM ,  Ki Seok JANG ,  Sang Gi KIM ,  Jiho JOO ,  Yongseok CHOI ,  Hyuk Je KWON ,  Jaegyu PARK ,  Sun Ae KIM ,  Jin Hyuk OH ,  myung joon KWACK

IPC分类号： G02B6/12 ,  G02B6/13 ,  H01L27/15 ,  G02B6/42 ,  H01L21/762

CPC分类号： G02B6/12004 ,  G02B6/13 ,  G02B6/4206 ,  G02B6/4214 ,  H01L21/762 ,  H01L27/15 ,  H01L31/167

摘要： Disclosed are an optical input/output device and an opto-electronic system including the same. The device includes a bulk silicon substrate, at least one vertical-input light detection element monolithically integrated on a portion of the bulk silicon substrate, and at least one vertical-output light source element monolithically integrated on another portion of the bulk silicon substrate adjacent to the vertical-input light detection element. The vertical-output light source element includes a III-V compound semiconductor light source active layer combined with the bulk silicon substrate by a wafer bonding method.

公开(公告)号：US20150283743A1

公开(公告)日：2015-10-08

申请号：US14517482

申请日：2014-10-17

申请人： Electronics and Telecommunications Research Institute

发明人： Jong-Moon PARK ,  Kunsik PARK ,  Dong Suk JUN ,  Seong Wook YOO ,  Sang Gi KIM ,  Jin Ho LEE

IPC分类号： B29C45/17

CPC分类号： B29C33/3842 ,  B29C45/17 ,  B29C59/002 ,  B29C2033/385 ,  B29L2031/757

摘要： Provided is a method of fabricating a mold, the method including: forming a first preliminary layer and a second preliminary layer, which are spaced apart from each other and stacked on a substrate; forming a first pattern by patterning the first preliminary layer; forming a first spacer on both sidewalls of the first pattern;forming a second pattern by etching the second preliminary layer by using the first spacer as an etching mask; forming a multilayer structure including the first pattern and the second pattern on the substrate by removing the first spacer; and forming a mold layer covering the multilayer structure.

摘要翻译： 提供一种制造模具的方法，该方法包括：形成彼此间隔开并堆叠在基板上的第一预备层和第二预备层; 通过图案化第一预备层形成第一图案; 在所述第一图案的两个侧壁上形成第一间隔物; 通过使用第一间隔件作为蚀刻掩模蚀刻第二预备层来形成第二图案; 通过去除所述第一间隔件在所述基板上形成包括所述第一图案和所述第二图案的多层结构; 以及形成覆盖所述多层结构的模具层。

公开(公告)号：US20150215045A1

公开(公告)日：2015-07-30

申请号：US14684195

申请日：2015-04-10

申请人： Electronics and Telecommunications Research Institute

发明人： Sahnggi PARK ,  Sang Gi KIM ,  Seong Wook YOO ,  Gyungock KIM

IPC分类号： H04B10/27 ,  G02B6/34

CPC分类号： H04B10/27 ,  G02B6/12004 ,  G02B6/29373 ,  G02B6/34 ,  G02B6/4214 ,  G02B2006/12114

摘要： An optical device module includes a substrate, an interlayer insulating layer on the substrate, an optical waveguide on the interlayer insulating layer, an optical device on the optical waveguide, and a prism disposed between the optical device and the optical waveguide. The prism has a refractive index greater than a refractive index of the optical waveguide.

摘要翻译： 光学器件模块包括衬底，衬底上的层间绝缘层，层间绝缘层上的光波导，光波导上的光学器件，以及设置在光学器件和光波导之间的棱镜。 棱镜的折射率大于光波导的折射率。

公开(公告)号：US20140346532A1

公开(公告)日：2014-11-27

申请号：US14062454

申请日：2013-10-24

申请人： Electronics and Telecommunications Research Institute

发明人： Gyungock KIM ,  Hyundai PARK ,  In Gyoo KIM ,  Sang Hoon KIM ,  Ki Seok JANG ,  Sang Gi KIM ,  Jiho JOO ,  Yongseok CHOI ,  Hyuk Je KWON ,  Jaegyu PARK ,  Sun Ae KIM ,  Jin Hyuk OH ,  Myung Joon KWACK

IPC分类号： H01L31/167 ,  G02B6/42

CPC分类号： G02B6/12004 ,  G02B6/13 ,  G02B6/4206 ,  G02B6/4214 ,  H01L21/762 ,  H01L27/15 ,  H01L31/167

摘要： Disclosed are an optical input/output device and an opto-electronic system including the same. The device includes a bulk silicon substrate, at least one vertical-input light detection element monolithically integrated on a portion of the bulk silicon substrate, and at least one vertical-output light source element monolithically integrated on another portion of the bulk silicon substrate adjacent to the vertical-input light detection element. The vertical-output light source element includes a III-V compound semiconductor light source active layer combined with the bulk silicon substrate by a wafer bonding method.

摘要翻译： 公开了一种光输入/输出装置和包括其的光电系统。 该器件包括体硅衬底，整体地集成在体硅衬底的一部分上的至少一个垂直输入光检测元件以及整体集成在体硅衬底的另一部分上的至少一个垂直输出光源元件， 垂直输入光检测元件。 垂直输出光源元件包括通过晶片接合方法与体硅衬底组合的III-V化合物半导体光源有源层。