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    Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
    2.
    发明授权
    Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures 有权
    微机电系统（MEMS）及相关执行器凸块，制造和设计结构的方法

    公开(公告)号：US09120667B2

    公开(公告)日：2015-09-01

    申请号：US13164331

    申请日：2011-06-20

    申请人： Christopher V. Jahnes ,  Anthony K. Stamper

    发明人： Christopher V. Jahnes ,  Anthony K. Stamper

    IPC分类号： H02N1/00 ,  B81B3/00 ,  H05K13/00

    CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B7/0006 ,  B81B2201/016 ,  B81B2203/0118 ,  B81B2203/04 ,  B81C1/0015 ,  B81C1/00293 ,  B81C2203/0145 ,  G06F17/5045 ,  G06F17/5068 ,  H01H1/0036 ,  H01H2001/0057 ,  Y10T29/49121

    摘要： Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

    摘要翻译： 提供微机电系统（MEMS）结构，制造方法和设计结构。 形成MEMS结构的方法包括在基板上形成固定的致动器电极和接触点。 该方法还包括在固定的致动器电极和接触点上形成MEMS光束。 该方法还包括形成与固定致动器电极的部分对准的致动器电极阵列，其尺寸和尺寸被设计成防止MEMS光束在重复循环之后塌陷在固定的致动器电极上。 致动器电极阵列形成为与MEMS光束的下侧和固定的致动器电极的表面中的至少一个直接接触。

    Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming thereof and design structures
    7.
    发明授权
    Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming thereof and design structures 有权
    微电子机械结构（MEMS）电容器件，其电容器修整和设计结构

    公开(公告)号：US08739096B2

    公开(公告)日：2014-05-27

    申请号：US13326409

    申请日：2011-12-15

    申请人： Christopher V. Jahnes ,  Anthony K. Stamper

    发明人： Christopher V. Jahnes ,  Anthony K. Stamper

    IPC分类号： G06F17/50 ,  H01L29/02

    CPC分类号： H01G5/18 ,  B81B2201/0221 ,  B81C99/0065 ,  H01G5/38 ,  H03H3/0076

    摘要： Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming for MEMS capacitor devices, and design structures are disclosed. The method includes identifying a process variation related to a formation of micro-electro-mechanical structure (MEMS) capacitor devices across a substrate. The method further includes providing design offsets or process offsets in electrode areas of the MEMS capacitor devices across the substrate, based on the identified process variation.

    摘要翻译： 公开了微电子机械结构（MEMS）电容器件，用于MEMS电容器件的电容器微调和设计结构。 该方法包括识别跨越衬底形成微机电结构（MEMS）电容器器件的过程变化。 该方法还包括基于所识别的过程变化，在跨越衬底的MEMS电容器器件的电极区域中提供设计偏移或过程偏移。