发明授权
US09406472B2 Planar cavity MEMS and related structures, methods of manufacture and design structures
有权
平面腔MEMS及相关结构，制造方法和设计结构
- 专利标题： Planar cavity MEMS and related structures, methods of manufacture and design structures
- 专利标题（中）： 平面腔MEMS及相关结构，制造方法和设计结构
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申请号： US12974854申请日： 2010-12-21
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公开(公告)号： US09406472B2公开(公告)日： 2016-08-02
- 发明人: Dinh Dang , Thai Doan , George A. Dunbar, III , Zhong-Xiang He , Russell T. Herrin , Christopher V. Jahnes , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , John G. Twombly , Eric J. White
- 申请人： Dinh Dang , Thai Doan , George A. Dunbar, III , Zhong-Xiang He , Russell T. Herrin , Christopher V. Jahnes , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , John G. Twombly , Eric J. White
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Anthony Canale; Andrew M. Calderon
- 主分类号： B81C1/00
- IPC分类号： B81C1/00 ; H01H59/00 ; H01L21/768 ; H01L41/113 ; H01H57/00 ; B81B3/00 ; G06F17/50 ; H01H1/00
摘要：
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity having a planar surface using a reverse damascene process.
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