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1.发明申请THREE-COIL INDUCTIVELY COUPLED PLASMA SOURCE WITH INDIVIDUALLY CONTROLLED COIL CURRENTS FROM A SINGLE RF POWER GENERATOR 有权来自单个RF发电机的三线圈感应耦合等离子体源，具有单独控制的线圈电流公开(公告)号：US20130278142A1
公开(公告)日：2013-10-24
申请号：US13863614
申请日：2013-04-16
Applicant: APPLIED MATERIALS, INC.
Inventor： Leonid Dorf , Shahid Rauf , Jonathan Liu , Jason A. Kenney , Andrew Nguyen , Kenneth S. Collins , Kartik Ramaswamy , Steven Lane
IPC: H01J37/32
CPC classification number: H01J37/32183 , H01J37/32082
Abstract: An inductively coupled plasma reactor has three concentric coil antennas and a current divider circuit individually controlling currents in each of the three coil antennas by varying two variable impedance elements in the current divider circuit in response to a desired current apportionment among the coil antennas received from a user interface.
Abstract translation: 电感耦合等离子体反应器具有三个同心线圈天线和分流器电路，其分别控制三个线圈天线中的每一个中的电流，通过响应于从一个线圈天线接收的线圈天线之间的期望的电流分配，改变分流器电路中的两个可变阻抗元件 用户界面。
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2.发明授权Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator 有权三线圈感应耦合等离子体源，具有来自单个RF发电机的单独控制的线圈电流公开(公告)号：US09082591B2
公开(公告)日：2015-07-14
申请号：US13863614
申请日：2013-04-16
Applicant: APPLIED MATERIALS, INC.
Inventor： Leonid Dorf , Shahid Rauf , Jonathan Liu , Jason A. Kenney , Andrew Nguyen , Kenneth S. Collins , Kartik Ramaswamy , Steven Lane
CPC classification number: H01J37/32183 , H01J37/32082
Abstract: An inductively coupled plasma reactor has three concentric coil antennas and a current divider circuit individually controlling currents in each of the three coil antennas by varying two variable impedance elements in the current divider circuit in response to a desired current apportionment among the coil antennas received from a user interface.
Abstract translation: 电感耦合等离子体反应器具有三个同心线圈天线和分流器电路，其分别控制三个线圈天线中的每一个中的电流，通过响应于从一个线圈天线接收的线圈天线之间的期望的电流分配，改变分流器电路中的两个可变阻抗元件 用户界面。
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Patent Agency Ranking
3.发明授权Independent control of RF phases of separate coils of an inductively coupled plasma reactor 有权电感耦合等离子体反应器的单独线圈的RF相的独立控制公开(公告)号：US09161428B2
公开(公告)日：2015-10-13
申请号：US13804616
申请日：2013-03-14
Applicant: APPLIED MATERIALS, INC.
Inventor： Kenneth S. Collins , Satoru Kobayashi , Lawrence Wong , Jonathan Liu , Yang Yang , Kartik Ramaswamy , Shahid Rauf
CPC classification number: H05H1/46 , H01J37/321 , H01J37/32174 , H05H2001/4682
Abstract: Plasma distribution is controlled in a plasma reactor by controlling the phase differences between different RF coil antennas, in accordance with a desired or user-selected phase difference, by a phase-lock feedback control loop.
Abstract translation: 通过相位锁定反馈控制回路根据期望或用户选择的相位差控制不同RF线圈天线之间的相位差，等离子体反应器中的等离子体分布被控制。
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4.发明授权Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator 有权三线圈感应耦合等离子体源，具有来自单个RF发电机的单独控制的线圈电流公开(公告)号：US09111722B2
公开(公告)日：2015-08-18
申请号：US13836890
申请日：2013-03-15
Applicant: APPLIED MATERIALS, INC.
Inventor： Leonid Dorf , Shahid Rauf , Jonathan Liu , Jason A. Kenney , Andrew Nguyen , Kenneth S. Collins , Kartik Ramaswamy , Steven Lane
CPC classification number: H01J37/32082 , H01J37/32183
Abstract: An inductively coupled plasma reactor has three concentric RF coil antennas and a current divider circuit individually controlling currents in each of the three coil antennas by varying only two reactive elements in the current divider circuit.
Abstract translation: 电感耦合等离子体反应器具有三个同心的RF线圈天线和分流器电路，其通过仅改变分流器电路中的两个无功元件来单独控制三个线圈天线中的每一个中的电流。
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5.发明申请INDEPENDENT CONTROL OF RF PHASES OF SEPARATE COILS OF AN INDUCTIVELY COUPLED PLASMA REACTOR 有权感应耦合等离子体反应器的独立线圈的RF相位的独立控制公开(公告)号：US20130284370A1
公开(公告)日：2013-10-31
申请号：US13804616
申请日：2013-03-14
Applicant: APPLIED MATERIALS, INC.
Inventor： Kenneth S. Collins , Satoru Kobayashi , Lawrence Wong , Jonathan Liu , Yang Yang , Kartik Ramaswamy , Shahid Rauf
IPC: H05H1/46
CPC classification number: H05H1/46 , H01J37/321 , H01J37/32174 , H05H2001/4682
Abstract: Plasma distribution is controlled in a plasma reactor by controlling the phase differences between different RF coil antennas, in accordance with a desired or user-selected phase difference, by a phase-lock feedback control loop.
Abstract translation: 通过相位锁定反馈控制回路根据期望或用户选择的相位差控制不同RF线圈天线之间的相位差，等离子体反应器中的等离子体分布被控制。
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公开(公告)号：US20130284369A1
公开(公告)日：2013-10-31
申请号：US13632302
申请日：2012-10-01
Applicant: APPLIED MATERIALS, INC.
Inventor： Satoru Kobayashi , Lawrence Wong , Jonathan Liu , Yang Yang , Kartik Ramaswamy , Shahid Rauf , Shane C. Nevil , Kallol Bera , Kenneth S. Collins
IPC: C23C16/505 , B05C9/00
CPC classification number: C23C16/505 , B05C9/00 , H01J37/32091 , H01J37/32174 , H01J37/3299
Abstract: Plasma distribution is controlled in a plasma reactor by controlling the phase difference between opposing RF electrodes, in accordance with a desired or user-selected phase difference, by a phase-lock feedback control loop.
Abstract translation: 通过相位锁定反馈控制回路根据期望或用户选择的相位差控制相对RF电极之间的相位差，在等离子体反应器中控制等离子体分布。
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7.发明申请THREE-COIL INDUCTIVELY COUPLED PLASMA SOURCE WITH INDIVIDUALLY CONTROLLED COIL CURRENTS FROM A SINGLE RF POWER GENERATOR 有权来自单个RF发电机的三线圈感应耦合等离子体源，具有单独控制的线圈电流公开(公告)号：US20130278141A1
公开(公告)日：2013-10-24
申请号：US13836890
申请日：2013-03-15
Applicant: APPLIED MATERIALS, INC.
Inventor： Leonid Dorf , Shahid Rauf , Jonathan Liu , Jason A. Kenney , Andrew Nguyen , Kenneth S. Collins , Kartik Ramaswamy , Steven Lane
IPC: H01J37/32
CPC classification number: H01J37/32082 , H01J37/32183
Abstract: An inductively coupled plasma reactor has three concentric RF coil antennas and a current divider circuit individually controlling currents in each of the three coil antennas by varying only two reactive elements in the current divider circuit.
Abstract translation: 电感耦合等离子体反应器具有三个同心的RF线圈天线和分流器电路，其通过仅改变分流器电路中的两个无功元件来单独控制三个线圈天线中的每一个中的电流。
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