公开(公告)号：US08822255B2

公开(公告)日：2014-09-02

申请号：US13393654

申请日：2010-08-30

申请人： Yoshiaki Yamamoto ,  Hitoshi Ikeda ,  Tomoki Ohnishi ,  Kouichi Tamagawa

发明人： Yoshiaki Yamamoto ,  Hitoshi Ikeda ,  Tomoki Ohnishi ,  Kouichi Tamagawa

IPC分类号： H01L31/18

CPC分类号： B23K26/36 ,  B23K26/40 ,  B23K2103/172 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/18 ,  Y02E10/50

摘要： A method of manufacturing a solar cell, which includes an edge deletion step using a laser beam, and a manufacturing apparatus which is used in such a method, the method and the apparatus being capable of preventing a shunt and cracks from being generated are provided. By radiating a first laser beam to a multilayer body, which includes a transparent electrode layer, a photoelectric conversion layer, and a back electrode layer sequentially formed on a transparent substrate, from a side of the transparent substrate, the photoelectric conversion layer and the back electrode layer in a first region are removed, and by radiating a second laser beam into the region such that the second laser beam is spaced from a peripheral rim of the region, the transparent electrode layer in a second region is removed.

摘要翻译： 提供一种制造太阳能电池的方法，其包括使用激光束的边缘删除步骤以及在这种方法中使用的制造装置，能够防止分流和裂纹产生的方法和装置。 通过将第一激光束照射到多层体，其包括从透明基板侧，光电转换层和背面的透明基板上依次形成的透明电极层，光电转换层和背面电极层 去除第一区域中的电极层，并且通过将第二激光束照射到该区域中，使得第二激光束与该区域的外围边缘间隔开，从而去除第二区域中的透明电极层。

公开(公告)号：US08546210B2

公开(公告)日：2013-10-01

申请号：US12794120

申请日：2010-06-04

申请人： Yoshiaki Yamamoto ,  Koichiro Tanaka ,  Atsuo Isobe ,  Daisuke Ohgarane ,  Shunpei Yamazaki

发明人： Yoshiaki Yamamoto ,  Koichiro Tanaka ,  Atsuo Isobe ,  Daisuke Ohgarane ,  Shunpei Yamazaki

IPC分类号： H01L21/336

CPC分类号： H01L21/6835 ,  H01L21/02532 ,  H01L21/02683 ,  H01L21/02691 ,  H01L21/84 ,  H01L23/544 ,  H01L24/29 ,  H01L24/48 ,  H01L24/73 ,  H01L24/83 ,  H01L24/85 ,  H01L27/12 ,  H01L29/78603 ,  H01L29/78648 ,  H01L2221/6835 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/6677 ,  H01L2224/16 ,  H01L2224/2919 ,  H01L2224/2929 ,  H01L2224/293 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48464 ,  H01L2224/73265 ,  H01L2224/83191 ,  H01L2224/838 ,  H01L2224/85 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/0106 ,  H01L2924/01072 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/0665 ,  H01L2924/0781 ,  H01L2924/10253 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15788 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01Q1/38 ,  H01Q9/285 ,  H01Q23/00 ,  Y10S438/982 ,  H01L2924/00 ,  H01L2224/29099 ,  H01L2224/29199 ,  H01L2224/29299 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： It is an object of the present invention to provide a method of separating a thin film transistor, and circuit or a semiconductor device including the thin film transistor from a substrate by a method different from that disclosed in the patent document 1 and transposing the thin film transistor, and the circuit or the semiconductor device to a substrate having flexibility. According to the present invention, a large opening or a plurality of openings is formed at an insulating film, a conductive film connected to a thin film transistor is formed at the opening, and a peeling layer is removed, then, a layer having the thin film transistor is transposed to a substrate provided with a conductive film or the like. A thin film transistor according to the present invention has a semiconductor film which is crystallized by laser irradiation and prevents a peeling layer from exposing at laser irradiation not to be irradiated with laser light.

摘要翻译： 本发明的目的是提供一种通过与专利文献1中公开的方法不同的方法从衬底分离薄膜晶体管和包括薄膜晶体管的电路或半导体器件的方法，并且将薄膜 晶体管，以及电路或半导体器件到具有柔性的衬底。 根据本发明，在绝缘膜上形成大的开口或多个开口，在开口处形成连接到薄膜晶体管的导电膜，并且去除剥离层，然后，将具有薄的 薄膜晶体管转置到具有导电膜等的基板上。 根据本发明的薄膜晶体管具有通过激光照射而结晶的半导体膜，并且防止剥离层在不被激光照射的激光照射下曝光。

公开(公告)号：US08202825B2

公开(公告)日：2012-06-19

申请号：US12439858

申请日：2007-09-04

申请人： Yoshiaki Yamamoto

发明人： Yoshiaki Yamamoto

IPC分类号： C10M111/00 ,  C10M169/00

CPC分类号： C10M169/04 ,  C10M133/42 ,  C10M2201/053 ,  C10M2201/085 ,  C10M2205/022 ,  C10M2205/0225 ,  C10M2205/14 ,  C10M2205/16 ,  C10M2205/163 ,  C10M2207/125 ,  C10M2207/281 ,  C10M2209/084 ,  C10M2213/02 ,  C10M2213/062 ,  C10M2215/04 ,  C10M2215/08 ,  C10M2215/2203 ,  C10M2217/041 ,  C10M2217/0415 ,  C10M2217/042 ,  C10M2217/044 ,  C10M2217/0443 ,  C10M2217/045 ,  C10M2223/04 ,  C10N2210/01 ,  C10N2230/06 ,  C10N2240/02 ,  C10N2250/08 ,  C10N2250/14 ,  C10N2250/18 ,  F16C33/201 ,  F16C33/24 ,  C10N2210/04

摘要： There are provided a solid lubricant having an island-and-sea structure, which, with the sea phase strengthened, remains free of troubles such as chipping even in use under high load conditions, and a sliding member having the solid lubricant embedded therein. The solid lubricant comprises 1 to 10% by volume of a polyethylene resin, 20 to 60% by volume of a hydrocarbon-based wax, 10 to 60% by volume of melamine cyanurate, 5 to 15% by volume of a polyamide resin, and 2 to 10% by volume of a modified polyethylene resin. The sliding member has the solid lubricant embedded in pores or grooves formed in a sliding surface of the sliding member body.

摘要翻译： 提供了一种具有岛海结构的固体润滑剂，即使在高负载条件下使用时，海相强化也保持无切屑等问题，并且内嵌有固体润滑剂的滑动部件。 固体润滑剂包含1至10体积％的聚乙烯树脂，20至60体积％的烃类蜡，10至60体积％的三聚氰胺氰尿酸酯，5至15体积％的聚酰胺树脂，和 2〜10体积％的改性聚乙烯树脂。 滑动构件具有嵌入在滑动构件主体的滑动表面中形成的孔或槽中的固体润滑剂。

公开(公告)号：US07929154B2

公开(公告)日：2011-04-19

申请号：US11640394

申请日：2006-12-18

申请人： Koichiro Tanaka ,  Yoshiaki Yamamoto

发明人： Koichiro Tanaka ,  Yoshiaki Yamamoto

IPC分类号： G01B11/14

CPC分类号： B23K26/0853 ,  B23K26/04 ,  B23K26/0738 ,  G03F9/7088 ,  H01L21/02675 ,  H01L21/2026

摘要： The present invention provides a laser irradiation apparatus and a laser irradiation method which can conduct irradiation of a laser beam accurately by correcting misalignment of an irradiation position of the laser beam from the predetermined position due to temperature change. A laser irradiation apparatus includes a laser oscillator emitting a laser beam; an XY stage provided with an irradiation object; an optical system which shapes the laser beam into a linear beam on a surface of the irradiation object provided on the XY stage; an illumination device which emits light to the surface of the irradiation object; and a camera for imaging reflected light of the light on the surface of the irradiation object, in which misalignment of an irradiation position of the linear beam detected from the reflected light imaged by the camera is corrected.

摘要翻译： 本发明提供一种激光照射装置和激光照射方法，该激光照射装置和激光照射方法能够通过校正由于温度变化导致的来自预定位置的激光束的照射位置的偏移而精确地进行激光束的照射。 激光照射装置包括发射激光束的激光振荡器; 设置有照射物体的XY台阶; 光学系统，其将激光束成形为设置在XY台上的照射物体的表面上的线性光束; 向照射物体的表面发光的照明装置; 以及用于对照射物体的表面上的光的反射光进行成像的相机，其中从由照相机成像的反射光检测到的线性光束的照射位置的未对准被校正。

公开(公告)号：US20100323504A1

公开(公告)日：2010-12-23

申请号：US12852636

申请日：2010-08-09

申请人： Koichiro TANAKA ,  Yoshiaki YAMAMOTO

发明人： Koichiro TANAKA ,  Yoshiaki YAMAMOTO

IPC分类号： H01L21/20 ,  H01L21/26

CPC分类号： H01L21/02683 ,  B23K26/0738 ,  B23K26/082 ,  B23K26/0821 ,  B23K26/0853 ,  H01L21/02532 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1285 ,  H01L27/3244 ,  H01L27/3295 ,  H01L51/5253

摘要： It is an object of the present invention to provide a laser irradiation apparatus being able to irradiate the irradiation object with the laser beam having homogeneous energy density without complicating the optical system. The laser irradiation apparatus of the present invention comprises a laser oscillator, an optical system for scanning repeatedly a beam spot of the laser beam emitted from the laser oscillator in a uniaxial direction over the surface of the irradiation object, and a position controlling means for moving the position of the irradiation object relative to the laser beam in a direction perpendicular to the uniaxial direction.

摘要翻译： 本发明的目的是提供一种激光照射装置，其能够用具有均匀能量密度的激光束照射照射物体，而不会使光学系统复杂化。 本发明的激光照射装置包括激光振荡器，用于在照射物体的表面上沿单轴方向重复扫描从激光振荡器发射的激光束的光点的光学系统，以及用于移动的位置控制装置 照射对象相对于激光束在垂直于单轴方向的方向上的位置。

公开(公告)号：US07790533B2

公开(公告)日：2010-09-07

申请号：US10582614

申请日：2005-06-15

申请人： Koichiro Tanaka ,  Yoshiaki Yamamoto

发明人： Koichiro Tanaka ,  Yoshiaki Yamamoto

IPC分类号： H01L21/00 ,  H01L21/84

CPC分类号： H01L21/02675 ,  B23K26/0604 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0665 ,  H01L21/02678 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/12 ,  H01L27/1285 ,  H01L29/78675 ,  H01S3/2383

摘要： The present invention is to provide a technique that can increase productivity with high output power by combining a plurality of laser beams on an irradiation surface without any difficulties in optical alignment. According to this technique, laser beams having different wavelengths are combined using a plurality of laser oscillators and a dichroic mirror, or additionally a polarizer. For example, a first laser beam emitted from a first laser oscillator is combined with a second laser beam emitted from a second laser oscillator having different wavelength from the first laser beam in such a way that the first laser beam passes through a dichroic mirror and the second laser beam is reflected on the dichroic mirror, and the combined laser beam is projected to an irradiation surface.

摘要翻译： 本发明是提供一种通过在照射面上组合多个激光束而能够以高输出功率提高生产率的技术，而不会使光取向困难。 根据该技术，使用多个激光振荡器和分色镜或另外的偏振器来组合具有不同波长的激光束。 例如，从第一激光振荡器发射的第一激光束与从第一激光束具有不同波长的第二激光振荡器发射的第二激光束组合，使得第一激光束通过二向色镜，并且 第二激光束在分色镜上反射，并且将组合的激光束投射到照射表面。

公开(公告)号：US20100207040A1

公开(公告)日：2010-08-19

申请号：US12757063

申请日：2010-04-09

申请人： Koichiro TANAKA ,  Yoshiaki YAMAMOTO

发明人： Koichiro TANAKA ,  Yoshiaki YAMAMOTO

IPC分类号： G21G5/00

CPC分类号： H01L21/02675 ,  G03F7/70383 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1266 ,  H01L27/1285 ,  Y10T29/41

摘要： When annealing of a semiconductor film is conducted using a plurality of lasers, each of the distances between laser irradiation regions is different. When a lithography step is conducted in accordance with a marker which is formed over a substrate in advance after the step, light-exposure is not correctly conducted to a portion crystallized by laser. By using a laser irradiation region obtained on a laser irradiation step as a marker, light-exposure is conducted by making a light-exposure position of a stepper coincide with a large grain size region in the laser irradiation region. A large grain size region and a poorly crystalline region are detected by utilizing a thing that scattering intensity of light is different between the large grain size region and the poorly crystalline region, thereby determining a light-exposure position.

摘要翻译： 当使用多个激光器进行半导体膜的退火时，激光照射区域之间的距离各不相同。 当根据在步骤之后预先在衬底上形成的标记进行光刻步骤时，曝光不能正确地传导到通过激光结晶的部分。 通过使用在激光照射步骤中获得的激光照射区域作为标记，通过使激光照射区域中的步进曝光位置与大粒径区域重合来进行曝光。 通过利用在大晶粒尺寸区域和不良结晶区域之间的散射光强度不同的物质来检测大晶粒尺寸区域和不良结晶区域，从而确定曝光位置。

公开(公告)号：US07704765B2

公开(公告)日：2010-04-27

申请号：US11889110

申请日：2007-08-09

申请人： Junya Maruyama ,  Atsuo Isobe ,  Susumu Okazaki ,  Koichiro Tanaka ,  Yoshiaki Yamamoto ,  Koji Dairiki ,  Tomoko Tamura

发明人： Junya Maruyama ,  Atsuo Isobe ,  Susumu Okazaki ,  Koichiro Tanaka ,  Yoshiaki Yamamoto ,  Koji Dairiki ,  Tomoko Tamura

IPC分类号： H01L21/00 ,  H01L21/76

CPC分类号： H01L27/1266 ,  H01L21/6835 ,  H01L24/83 ,  H01L27/1214 ,  H01L27/1218 ,  H01L2221/6835 ,  H01L2221/68368 ,  H01L2224/83 ,  H01L2924/01029 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/3025 ,  H01L2924/3512 ,  H01L2924/00

摘要： It is an object of the present invention to provide a method for manufacturing a semiconductor device, capable of keeping a peeling layer from being peeled from a substrate in the phase before the completion of a semiconductor element and peeling a semiconductor element rapidly. It is considered that a peeling layer tends to be peeled from a substrate because the stress is applied to a peeling layer due to the difference in thermal expansion coefficient between a substrate and a peeling layer, or because the volume of a peeling layer is reduced and thus the stress is applied thereto by crystallization of the peeling layer due to heat treatment. Therefore, according to one feature of the invention, the adhesion of a substrate and a peeling layer is enhanced by forming an insulating film (buffer film) for relieving the stress on the peeling layer between the substrate and the peeling layer before forming the peeling layer over the substrate.

摘要翻译： 本发明的目的是提供一种制造半导体器件的方法，该半导体器件的制造方法能够在半导体元件完成之前相位保持剥离层从基板剥离并快速剥离半导体元件。 由于衬底和剥离层之间的热膨胀系数的差异，或者由于剥离层的体积减小，由于将剥离层施加到剥离层上，因此认为剥离层倾向于剥离， 因此通过热处理使剥离层结晶而施加应力。 因此，根据本发明的一个特征，通过在形成剥离层之前形成用于缓解基板和剥离层之间的剥离层上的应力的绝缘膜（缓冲膜），增强了基板和剥离层的粘附性 在基板上。

公开(公告)号：US07615424B2

公开(公告)日：2009-11-10

申请号：US11087843

申请日：2005-03-24

申请人： Koichiro Tanaka ,  Yoshiaki Yamamoto ,  Nami Kosaka

发明人： Koichiro Tanaka ,  Yoshiaki Yamamoto ,  Nami Kosaka

IPC分类号： H01L21/00 ,  H01L21/84 ,  H01L31/036

CPC分类号： B23K26/04 ,  B23K26/0736 ,  B23K26/0853 ,  G02B27/0944 ,  H01L27/3244

摘要： An object of the present invention is to provide a laser irradiation method being able to control the irradiation position of the laser beam accurately compared with the conventional irradiation method. Another object of the present invention is to provide a method for manufacturing a semiconductor device with the use of the laser irradiation method being able to irradiate a large substrate accurately with the laser beam.The irradiation position of the laser beam is controlled by using a laser oscillator emitting a laser beam, an optical system for shaping the laser beam into rectangular on the irradiation object, means for moving the irradiation object relative to the laser beam in the long-side direction and the short-side direction of the beam spot, means for moving the irradiation object more slowly in the long-side direction than in the short-side direction, and a laser positioning mechanism.

摘要翻译： 本发明的目的是提供一种能够与传统的照射方法相比准确地控制激光束的照射位置的激光照射方法。 本发明的另一个目的是提供一种使用激光照射方法制造半导体器件的方法，该方法能够用激光束精确地照射大的衬底。 激光束的照射位置通过使用发射激光束的激光振荡器，用于将激光束成形为照射对象上的矩形的光学系统来控制，用于使照射对象相对于激光束在长边移动的装置 光束点的方向和短边方向，用于使照射物体在长边方向上比在短边方向上更慢地移动的装置，以及激光定位机构。

公开(公告)号：US07585791B2

公开(公告)日：2009-09-08

申请号：US10584729

申请日：2005-10-18

申请人： Koichiro Tanaka ,  Yoshiaki Yamamoto

发明人： Koichiro Tanaka ,  Yoshiaki Yamamoto

IPC分类号： H01L21/00 ,  C30B13/00

CPC分类号： H01L21/02683 ,  B23K26/0736 ,  B23K26/0738 ,  B23K26/0853 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1255 ,  H01L27/1266 ,  H01L27/1285 ,  H01L27/1296 ,  H01L29/78621 ,  H01L29/78648 ,  Y10T117/1076

摘要： In conducting laser annealing using a CW laser or a quasi-CW laser, productivity is not high as compared with an excimer laser and thus, it is necessary to further enhance productivity. According to the present invention, a fundamental wave is used without putting laser light into a non linear optical element, and laser annealing is conducted by irradiating a semiconductor thin film with pulsed laser light having a high repetition rate. A laser oscillator having a high output power can be used for laser annealing, since a non linear optical element is not used and thus light is not converted to a harmonic. Therefore, the width of a region having large grain crystals that is formed by scanning once can be increased, and thus the productivity can be enhanced dramatically.

摘要翻译： 在使用CW激光或准CW激光进行激光退火时，与准分子激光相比，生产率不高，因此有必要进一步提高生产率。 根据本发明，使用基波而不将激光投射到非线性光学元件中，并且通过用具有高重复率的脉冲激光照射半导体薄膜来进行激光退火。 具有高输出功率的激光振荡器可用于激光退火，因为不使用非线性光学元件，因此光不转换成谐波。 因此，可以增加通过扫描一次形成的具有大晶粒的区域的宽度，从而可以显着提高生产率。